Controllers

Cygnus® 2

The Best Measurement Precision Possible for OLED Applications

Cygnus 2 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process.

Cygnus 2 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of Cygnus 2, allowing you to make excellence repeatable.

Features

INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
Up to six sources can be controlled simultaneously, independently or in any combination by one Cygnus 2, relieving the need for two or three controllers
Color TFT LCD display makes it easy to see what’s going on with your process
10 Hz measurement
+/-0.0035 Hz over 100ms sample
USB data storage for screen shots, recipe storage and data logging
Thickness summing of multiple sources
Measurement rate averaging for low density, very low rate materials (up to 30 seconds for use with stable sources for very low rate OLED dopant material deposition)
Display rate resolution of up to 0.001Å
4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
Non-deposit control allows for continuous source control as substrates are cycled through the deposition chamber
6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
Optional Ethernet communications
RoHS compliant

Specifications

Measurement Performance
Thickness and rate resolution/measurement (1)	±0.00433 Å
Measurement frequency range	6.0 to 4.5 MHz (fixed)

Process Recipe & Data Management
Material programs	6 independent materials

Number of sources (2)	up to 6

(1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2) Cygnus 2 has 6 DAC outputs standard, 6 more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6

Part Number

Accessories

Accessories and Replacement Parts

Consumables

Front Load Single Sensor

Front Load Dual Sensor

Cool Drawer Single Sensor

Cool Drawer Dual Sensor

Low Profile Single Sensor

Easy Rate Dual Sensor

Low Profile Dual Sensor

ALD Sensor

UHV Bakeable Sensor

Sputtering Sensor

CrystalSix® Sensor

Crystal 12® Sensor

Easy Rate Single Sensor

RSH-600 Rotary Sensor

Part Number	Description
779-220-G1	CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2	CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits	(Includes oscillator and cables)
781-611-G15	XIU PKG with 4.6 m (15 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G30	XIU PKG with 9.1 m (30 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G50	XIU PKG with 15.2 m (50 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G100	XIU PKG with 30.5 m (100 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G15	4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G30	4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G50	4 m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G100	4m XIU with 30.5 m (100 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G15	4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G30	4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G50	4m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G100	4m XIU PKG with 30.5 m (100 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
Oscillator Only	(No cables included)
781-600-G1	XIU (oscillator) - For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) - For use with Cygnus 2, IC6, or XTC/3
781-600-G2	XIU (oscillator) - for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) - For use with Cygnus 2 or IC6
Cables
755-257-G6	15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
600-1261-P15	4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P30	9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P50	15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P100	30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU