Gas Analysis
Technology
Mass Spectrometry
Optical Spectroscopy
Process
PVD
CVD
ALD
Etch
Lithography
Pressure
< E-5 Torr
> E-4 Torr to 1E-2 Torr
1E-2 Torr to 1 Torr
> 1 Torr
Detection Limits
1-10 ppm
< 1 ppm
< 10 ppb
Market
HVAC/R
Industrial Manufacturing
Vacuum Coating
Security
Energy
Semiconductor IDM & Foundry
Semiconductor Tool Manufacturer
Display
Pharma & Medical
Mobility & Automotive
Research & Academia
Analytical Instrumentation
Batteries
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Optical Gas Analyzers
Augent™ OPG550
High speed chamber leak test - gas analysis
Augent™ OPG550
- High speed leak detection allows chamber leak test
- Smart algorithm for easy integration
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
Mass Spectrometers
Mobile Cart for Transpector® CPM
Allows the Transpector CPM to become a mobile troubleshooting instrument
Mobile Cart for Transpector® CPM
- Flexible enough to get a Transpector CPM where you need it
- A small footprint to fit in those tight spaces
- A complete system able to hold everything needed to run the Transpector CPM
Mass Spectrometers
QMG 700
QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation
QMG 700
- Mass range options from 1-512 amu
- More than nine decades of dynamic range
- Extremely fast measurement speeds: 0.125 ms/amu
- MDPP < 10E-16 mbar
Optical Gas Analyzers
Quantus® HP100
Provide real-time leak detection, endpoint detection and process monitoring for cutting-edge semiconductor manufacturing processes and other gas analysis applications
Quantus® HP100
- Operating range from 1 Torr up to 450 Torr
- Superior detection limit < 1 ppm
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
Optical Gas Analyzers
Quantus® LP100
Provide real-time leak detection and endpoint detection for critical process environments
Quantus® LP100
- Operating range of 10 mTorr to 1 Torr
- Excellent detection limits down to low ppm levels
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
Mass Spectrometers
Transpector® CPM 3
Versatile process monitoring from baseline to process pressure
Transpector® CPM 3
- Ideal semiconductor process monitor
- Multi pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping
Mass Spectrometers
Transpector® MPH
High performance quadrupole mass spectrometer
Transpector® MPH
- Nine-decade dynamic range
- Industry leading data collection rate
- Interchangeable sensors and electronics
- Scans up to 300 amu
Mass Spectrometers
Transpector® MPS
Multi-Purpose Quadrupole Mass Spectrometer
Transpector® MPS
- Nine-decade dynamic range
- Interchangeable sensors and electronics
- Optional continuous dynode electron multiplier
- Scans up to 200 amu
Mass Spectrometers
Transpector® SPS
Process monitoring at target pressure range
Transpector® SPS
- Targeted high pressure processes
- Single pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping system
Mass Spectrometers
Transpector® XPR 3+
Extreme PVD Process Monitoring Quadrupole Mass Spectrometer
Transpector® XPR 3+
- Industry leading maximum operating pressure
- Optional overpressure isolation valve interlock
- Scans up to 100 amu