Gas Analysis
Discover our range of advanced gas analyzers designed for precise and reliable gas analysis across various industrial applications, including but not limit to Semiconductor, Battery, Display, Energy, Pharma & Medical, Research & Academia and General Vacuum Coating industries. Explore our solutions to find the right gas analyzer tailored to your needs.
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QMG 800 Analytical Mass Spectrometer – Surpass detection limits and elevate your process to new heights of innovation
- Advanced digital platform allows communication over OPC UA
- Seamless OEM integration
- Ion source options for Diverse Applications
- Fully compatible with the complete FabGuard® software suite for unparalleled diagnostics
- 90° off-axis SEM to minimize noise from radicals and non-ionized particles
- Unparalleled precision and sensitivity with single ion detection capabilities
Advanced process expert for Multi-Pressure ALD/CVD and Etch.
- xParts coated for extended lifetime in harsh chemistry
- Multi pressure sampling inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Advanced process expert for Single Pressure ALD/CVD and Etch.
- xParts coated for extended lifetime in harsh chemistry
- High temperature single pressure inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Compact Process Expert for Advanced Process Monitoring
- HexBlock multi-pressure sampling inlet
- Detection limit below 200 ppb
- Industry leading pumping speed
- 30% decrease in system volume
Extreme PVD Process Monitoring Quadrupole Mass Spectrometer
- Industry leading maximum operating pressure
- Optional overpressure isolation valve interlock
- Scans up to 100 amu
High performance quadrupole mass spectrometer
- Nine-decade dynamic range
- Industry leading data collection rate
- Interchangeable sensors and electronics
- Scans up to 300 amu
Multi-Purpose Quadrupole Mass Spectrometer
- Nine-decade dynamic range
- Interchangeable sensors and electronics
- Optional continuous dynode electron multiplier
- Scans up to 200 amu
Process monitoring at target pressure range
- Targeted high pressure processes
- Single pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping system
Provide fast real-time leak detection, gas analysis, and process monitoring for semiconductor manufacturing and other markets.
- High speed leak detection allows chamber leak test
- Smart algorithm for easy integration
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
Provide real-time leak detection, endpoint detection and process monitoring for cutting-edge semiconductor manufacturing processes and other gas analysis applications
- Operating range from 1 Torr up to 450 Torr
- Superior detection limit < 1 ppm
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
Provide real-time leak detection and endpoint detection for critical process environments
- Operating range of 10 mTorr to 1 Torr
- Excellent detection limits down to low ppm levels
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
Optimize your combustion efficiency
- Displays efficiency, O2, CO2, CO and flue gas temperature readings all on one screen
- Easy-to-read backlit display
- Monitor system pressures with built-in manometer and hose kit
- QR code for quick analysis reports using the FLUE-Mate mobile app
Simplify and Accelerate Gas Analysis
- Minimize analysis time
- Maximize availability
- License free access
- Easy connectivity
High pressure samples, especially those containing contaminants, such as condensing aerosols, can be harmful to Micro GC Fusion. The External Sample Conditioner, or ESC, provides both a pressure reducing feature while maintaining the sample temperature at >50°C (122°F).
- Easily attaches to Micro GC Fusion
- Side door for easy filter replacement
- Use a quick connect fitting for easy sampling
- Can be taken into the field for on-site sampling
Web-based user interface that provides several novel benefits over traditional software.
- Operating system independent
- License-free
- Built with every instrument
- No installation required
Advanced Gas Analyzers and Industrial Gas Analysis Solutions
INFICON offers advanced gas analyzers that provide accurate gas analysis for critical industrial applications. Our tools are essential for accurate gas detection and monitoring, helping industries maintain safety, compliance, and operational efficiency in a variety of areas, including semiconductor manufacturing process optimization and environmental control.
A powerful example is the Transpector® APX Multi-Pressure Mass Spectrometer, which excels in residual gas analysis by providing real-time monitoring over multiple pressures. This analyzer is ideal for semiconductor manufacturing, where it delivers fast, accurate data on gas compositions, allowing for precise control over production environments. Its versatility and accuracy make it invaluable in maintaining quality standards and minimizing process disruptions.
INFICON's industrial gas analysis solutions ensure that companies can rely on the reliability of their gas detection and monitoring systems. With INFICON tools, industries can confidently meet regulatory standards, improve safety, and increase process efficiency, making them essential components of modern industrial operations.