INFICON’s sensors for the Display market employ a suite of process sensing technologies including thin film controllers, residual gas analysis, optical emission spectrometry, quartz crystal microbalance, leak detectors, pressure gauges and RF measurements. Coupled with proprietary software, users have real-time visibility into their processes, and immediate control of their equipment to enable leading edge technologies and ensure the highest quality products.
INFICON’s sensors have supported the technology shifts from LCD to LED to OLED and beyond, and continually improve to provide the sensitivity and precision needed to match latest generation of products. These sensors are used during process steps, chamber cleaning, and tool maintenance activities to ensure product safety and quality while minimizing downtime. In addition, there are subfab and facility-wide monitoring applications that are used to reduce greenhouse gas usage and improve overall efficiency.
INFICON’s supports the entire Display production cycle, from early stage research and development, to backplane thin film transistor processing, encapsulation and evaporation, along with subfab and factory-wide utilities performance. The result is a high quality, reliable process that runs at maximum productivity and highest efficiency.