Sensors & Feedthroughs
RSH-600 Rotary Sensor
Excellent Crystal Performance in Demanding Applications

RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. The RSH-600 holds six crystals in a thermally shielded, water-cooled housing, ensuring excellent crystal performance in temperature environments up to 300°C. Crystals are housed in an easy to remove Teflon® and stainless steel crystal holder.
Features
- Six crystals
- Position feedback (Controller dependent)
- Adjustable length (with optional flange)
- Rugged design
Specifications
| Number of crystals | 6 |
| Installation aperture | 50.8 mm (2.0 in.) diameter |
| Operating temperature (with water cooling) | 300° C max with stainless steel head cover 400° C max with copper head cover |
Accessories
Accessories
Consumables
Spare Parts
| Part Number | Description |
| 153202 | Adjustable flange |
| 153204 | Crystal Retainer Assembly, Flat |
| 153204-2 | Crystal Retainer Assembly, Angled |
| 153731 | RSH-600 Sensor Head Cover, Copper, Flat |
| 153731-2 | RSH-600 Sensor Head Cover, Copper, Angled |
| 153708 | RSH-600 Sensor Head Cover, Stainless Steel, Flat |
| 153713 | RSH-600 Sensor Head Cover, Stainless Steel, Angled |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
| Part Number | Description |
| 153706 | Spring Retainer assembly Flat |
| 153707 | 24 VDC Solenoid valve assembly |
| 153709 | Retaining Screw for Flat crystal retainer |
| 153710 | Crystal Holder Flat (includes 153709) |
| 153714 | Spring Retainer Assembly, Angled,RSH-600 |
| 153715 | Retainer Screw for angled crystal retainer |
| 153716 | Crystal Holder, Angled, RSH-600 |
| 153722 | Signal/Ground Contact Module, RSH-600 |
| 153724 | Spring retainer contact kit - Flat (set of six) |
| 153726 | Crystal Contact for Crystal Retainer Assembly |
| 889128 | 7 pin male connector |
| 889128-2 | 7-pin Female Connector |
| 144-101 | M3x6 SOC Head Screw for Flat Crystal Retainer |
Downloads
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3D Step Files
Others
RSH-600 Cooling Efficiency (English)
pdf
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10,8 KB
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English
Sensor Alignment (English)
pdf
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32,4 KB
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English
Use of Maxtek Sensor Heads in a Sputtering Environment (English)
pdf
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27,7 KB
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English
What is a QCM Sensor?
pdf
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531,6 KB
•
English
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