Controllers

SQC-310

Highly Accurate Sequential or Codeposition Control

SQC-310

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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With advanced electronics, an improved display, and a very affordable price, the INFICON SQC-310 Series gives you features not found on competitors' thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC-310) or codeposition (SQC-310C).

Features

  • Bright, color LCD display - available in English or Chinese
  • Standard RS-232 and USB (RS-232 and Ethernet optional)
  • Easy setup and operation with a "Quick Setup" Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
  • Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
  • Accurate process control, especially for low deposition rates, with ±0.03 Hz resolution at 10 readings/second
  • Storage capacity for up to 100 processes, 1,000 layers, 50 films
  • Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring

Specifications

SQC-310
SQC-310C
Measurement
QCM InputsQCM Inputs2 (4 optional)
Measurement Frequency RangeMeasurement Frequency RangeAdjustable:
1.0 MHz minimum
6.5 MHz maximum
Frequency Resolution (1)Frequency Resolution (1)± 0.012 Hz
Thickness and rate resolution/measurement (2)Thickness and rate resolution/measurement (2)±0.015 Å
Frequency StabilityFrequency Stability± 2 ppm total, 0 to 50C
Measurement IntervalMeasurement Interval0.10 to 1.0 s (adjustable)
Rate DisplayRate Display0.01 Å/sec
Control
StorageStorage100 processes, 1000 layers, 50 films
Control OutputsControl Outputs2 (4 optional)
Output SignalOutput Signal± 0 to 10 VDC, 15 bits
Digital Inputs/RelaysDigital Inputs/Relays8/8 (16/16 optional)
Digital InputsDigital Inputs5 VDC non-isolated
RelaysRelaysSPST Form 1A, 30V, 2A max
Interface(s)Interface(s)Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power ControlRemote Power ControlOptional (IPN 782-900-017)
Display
TypeType1/4 VGA 320 x 240 active matrix color LCD
GraphsGraphsRate, deviation, power or full screen numeric
General
PowerPower100-240 VAC, 50/60 Hz, 25W
ComplianceComplianceCE, RoHS
Windows® SoftwareWindows® SoftwareIncluded
Housing / MountingHousing / Mounting5 1/4” half-rack
(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval
Measurement
QCM InputsQCM Inputs4
Measurement Frequency RangeMeasurement Frequency RangeAdjustable:
1.0 MHz minimum
6.5 MHz maximum
Frequency Resolution (1)Frequency Resolution (1)± 0.012 Hz
Thickness and rate resolution/measurement (2)Thickness and rate resolution/measurement (2)±0.015 Å
Frequency StabilityFrequency Stability± 2 ppm total, 0 to 50C
Measurement IntervalMeasurement Interval0.10 to 1.0 s (adjustable)
Rate DisplayRate Display0.01 Å/sec
Control
StorageStorage100 processes, 1000 layers, 50 films
Control OutputsControl Outputs4
Output SignalOutput Signal± 0 to 10 VDC, 15 bits
Digital Inputs/RelaysDigital Inputs/Relays16/16
Digital InputsDigital Inputs5 VDC non-isolated
RelaysRelaysSPST Form 1A, 30V, 2A max
Interface(s)Interface(s)Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power ControlRemote Power ControlOptional (IPN 782-900-017)
Display
TypeType1/4 VGA 320 x 240 active matrix color LCD
GraphsGraphsRate, deviation, power or full screen numeric
General
PowerPower100-240 VAC, 50/60 Hz, 25 W
ComplianceComplianceCE, RoHS
Windows® SoftwareWindows® SoftwareIncluded
Housing / MountingHousing / Mounting5 1/4” half-rack
(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

Accessories

Accessories
Accessories and Replacement Parts
NameDescription
Front Load Single SensorFront Load Single Sensor
Front Load Dual SensorFront Load Dual Sensor
Cool Drawer Single SensorCool Drawer Single Sensor
Cool Drawer Dual SensorCool Drawer Dual Sensor
Low Profile Single SensorLow Profile Single Sensor
Easy Rate Dual SensorEasy Rate Dual Sensor
Low Profile Dual SensorLow Profile Dual Sensor
UHV Bakeable SensorUHV Bakeable Sensor
Sputtering SensorSputtering Sensor
CrystalSix® SensorCrystalSix® Sensor
Crystal 12® SensorCrystal 12® Sensor
Easy Rate Single SensorEasy Rate Single Sensor
RSH-600 Rotary SensorRSH-600 Rotary Sensor
Part NumberDescription
782-900-007Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
782-900-016Rack adapter - mounts two SQC-310 instruments in 19 in. rack
782-502-097-G1Ethernet option card
782-502-096-G2USB option card
Oscillator kits(Includes oscillator and cables)
783-500-109-103 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-257.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-5015.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-7522.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only(No cables included)
783-500-013-G1OSC-100 oscillator only (no cables)
Cables 
782-902-01115.2 cm (6 in.) BNC cable, male/female
782-902-012-103 m (10 ft.) BNC cable, male/male
782-902-012-257.6 m (25 ft.) BNC cable, male/male
782-902-012-5015.2 m (50 ft.) BNC cable, male/male
782-902-012-7522.8 m (75 ft.) BNC cable, male/male
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