Sensors & Feedthroughs

CrystalSix® Sensor


Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON CrystalSix Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, solar, long optical coating, or other processes having an extended period between chamber venting, the CrystalSix sensor offers the security of 6 quartz monitor crystals in one sensor head. When used with an INFICON Thin Film Controller, the CrystalSix automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continued deposition rate monitoring.

Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatically driven motor provides better crystal thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement.

When used with certain INFICON thin film controllers, the sensor provides position feedback so specific positions can be used with specific materials.


  • Holds 6 crystals with robust, automatic switching to maximize process uptime
  • Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat-generating motors)
  • 1/8" tubes maintain thermal stability and allow flexibility in sensor placement
  • Optional crystal shutter available


Maximum bakeout temp with no water130°C
Maximum operating isothermal environment temperature with minimum water flow400° C
Crystal exchangeFront-loading, extraction tool required (supplied with unit)
Water and air tubesS-304, 0.125 in. (0.32 cm) O.D. x 0.016 in. (0.04 cm) Wall Thickness 30 in. Long (76 cm) seamless stainless steel tubing
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Part Number

Part NumberDescription
750-446-G1CrystalSix sensor (sensor only, no feedthrough included)


Spare Parts
QCM Sensor FeedthroughsQCM Sensor Feedthroughs
Quartz Monitor CrystalsQuartz Monitor Crystals
Part NumberDescription
007-007Retainer spring (for crystal holder)
007-023Ceramic Retainer
070-0170#2 Lockwasher (part of heat shield assembly)
070-0398Retaining ring (secures bearing located next to pawl and actuator stem)
070-0777Compression spring (on carousel shaft)
070-0778Ball bearing (underneath carousel)
070-0779Ball bearing
070-0870Teflon washer (on carousel shaft)
070-0877Shim spacer (part of heat shield assembly)
070-0879Bearing (at center of top plate weld assembly)
073-114Wire .022 in. x 1.06 in (clamps heat shield retaining pin)
082-026# 2-56 Nut (part of heat shield assembly)
750-048-P1Retainer spring for 007-048 and 751-619-G1 sputtering head bodies
750-175-P1Insulator (underneath leaf spring)
750-188-P3Leaf Spring
750-249-P2Retaining pin (part of heat shield assembly)
750-250-G1Deposition Shield, CrystalSix Sensor
750-256-P2Extension spring
750-257-P3Corrugated spring 4.40 in. (11.2 cm)
750-261-G1Carousel assembly (includes resistor network and electrical contacts)
750-262-G1Crystal holder
750-265-G1Top plate weld assembly
750-276-P2Actuator cover
750-278-P2Water line
750-286-P2Pneumatic actuator
750-290-P3Carousel electrical contacts (set of eight)
750-901-G1Crystal 6 Kit
750-294-P2Stop ratchet
750-295-G1Pawl and actuator
750-336-G1Resistor network assembly
750-338-P1Contact insulator (underneath carousel electrical contacts)
In-vacuum cables 
321-039-G12In-vacuum cable, 15.2 cm (6 in.)
007-252In-vacuum cable, 30.5 cm (12 in.)
321-039-G11In-vacuum cable, 61.0 cm (24 in.)
007-044In-vacuum cable, 78.1 cm (30.75 in.)
007-059In-vacuum cable, 91.4 cm (36 in.)
007-061In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU
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