Quartz Monitor Crystals

Quartz Monitor Crystals

INFICON Crystals are 100% Tested for Accuracy and Reliability

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Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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Experience Quality Quartz Crystals for Yourself
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The stability and longevity of a crystal affect not only the accuracy of rate and thickness measurements, but more importantly the successful completion of the process being controlled. INFICON quartz crystals offer proven stability and reliability-proven by millions of successful process runs with a wide range of materials, applications and industries.

Our 6 MHz crystals are used with all INFICON controllers and monitors. Our 5 MHz crystals can be used with 5MHz instruments only; and are not compatible with some INFICON instruments. The 6 MHz and the 5 MHz crystals are available in gold, silver, or alloy electrodes and come in a variety of packages depending on your needs.

The INFICON clean room quartz crystal package enables convenient dispensing of the crystals directly from the package to the sensor, minimizing operator handling and risk of contamination. To make the crystal package more cleanroom-friendly, we eliminated the paper and foam inserts and made the packages stackable for easy storage.

Ask about our new 50 pack for customers with high crystal usage!

Mg Sensitive OLED Crystals

INFICON Quartz Crystals are uniquely designed and manufactured to bring process advantages to a variety of applications. The newest crystal line, the Mg Sensitive OLED Crystal line are designed specifically for magnesium deposition in the OLED industry. These high-level crystals significantly shorten the initial time delay in magnesium monitoring and increase the thickness accuracy of the OLED panel. In addition to those two grand benefits, these crystals preserve the high stability and reproducibility of the INFICON High Precision Sensor Crystals, including rate and activity stability. With INFICON, Maxtek, and Fil-Tech crystals, your process is never interrupted. In addition, you have access to the expert knowledge and worldwide applications support that INFICON offers.

 

High Precision Sensor Crystals

INFICON introduces improved gold crystals for OLED deposition OLED makers are using gold crystals to monitor and control the deposition of organic materials. Many OLED producers choose INFICON's crystals for this demanding task.

INFICON recently launched a new high-precision sensor crystal line that features improved activity stability, which leads to less activity dips and improved deposition rate stability.

To develop the new sensor crystal line, INFICON performed a detailed investigation into all components of crystal manufacturing and many process parameters including the shape and finish of the crystal, electrode thickness, electrode materials, and the coating rate of the electrode. The materials and process parameters were optimized by fabricating a wide variety of crystals, testing them, and analyzing the results thoroughly. INFICON is now producing the new crystals at its EDC plant, in Kansas, USA.

INFICON tested the new crystals and compared them to its competitor crystals, finding that the resistance of INFICON's crystal is lower, and the thermal shock is also significantly lower.
 

Fil-Tech Quality Crystals Now Manufactured and Distributed by INFICON

INFICON has successfully transferred the manufacturing of the Fil-Tech Quality Crystals® product line to our world class facility in Overland Park, Kansas. The quality and specifications for this crystal product line will remain unchanged so that your process is never interrupted. As a bonus, you will also have access to the expert knowledge and worldwide applications support that INFICON can offer.

Features

  • 5 and 6 MHz
  • Gold, silver (for processes with high heat loads), and alloy (for optimizing optical and other high stress applications)
  • Three convenient packaging options--clean-room-compatible dispenser, flat-pack dispenser, and compact box
  • Custom crystals produced to your specific sizes and frequencies
Part Number
Part Number
INFICON Crystals 
6 MHz INFICON Crystals0.550 in. (14 mm) diameter, 10 crystals per pkg
008-010-G106 MHz Gold, in clean-room compatible dispenser
008-009-G106 MHz Silver, in clean-room compatible dispenser
750-679-G16 MHz Alloy, in clean-room compatible dispenser
750-1000-G106 MHz Gold, in flat-pack carousel dispenser
750-1001-G106 MHz Silver, in flat-pack carousel dispenser
750-1002-G106 MHz Alloy, in flat-pack carousel dispenser
SPC-1093-G106 MHz Gold, in compact box
750-1014-G106 MHz Silver, in compact box
750-1015-G106 MHz Alloy, in compact box
SPC-1157-G106 MHz Gold, THERMAL SHOCK, in clean-room compatible dispenser
SPC-1194-G106 MHz Gold, THERMAL SHOCK, in flat-pack carousel dispenser
5 MHz INFICON Crystals0.550 in. (14 mm) diameter, 10 crystals per pkg
750-225-G25 MHz Gold, in clean-room compatible dispenser
750-226-G25 MHz Silver, in clean-room compatible dispenser
750-678-G15 MHz Alloy, in clean-room compatible dispenser
750-1005-G105 MHz Gold, in flat-pack carousel dispenser
750-1006-G105 MHz Silver, in flat-pack carousel dispenser
750-1007-G105 MHz Alloy, in flat-pack carousel dispenser
750-1016-G105 MHz Gold, in compact box
750-1017-G105 MHz Silver, in compact box
750-1018-G105 MHz Alloy, in compact box
6 MHz Crystals0.550 in. (14 mm) diameter, 10 crystals per pkg
  
Maxtek Crystals 
0.550 in. (14 mm) DiameterCompatible with most sensors (INFICON, Maxtek, Sigma, Sycon, etc)
103200-26 MHz Crystals, Gold, Box of 5
1032045 MHz Crystals, Gold, box of 5
1032206 MHz Crystals, Gold, Carousel of 10
1032216 MHz Crystals, Silver, Carousel of 10
1032406 MHz Crystals, Alloy, Carousel of 10
1032225 MHz Crystals, Gold, Carousel of 10
1032235 MHz Crystals, Silver, Carousel of 10
0.550 in. (14mm) Dia - BalzersCompatible with Balzers sensors
1032075 MHz, Silver, Balzers pattern, box of 5
1032245 MHz Crystals, Gold, Balzers pattern, Carousel of 10
0.490 in. (12.5 mm) DiameterCompatible with Ulvac and Sloan sensors
1862015 MHz 0.490 in. Crystals, Gold, Carousel of 10
1862005 MHz 12.5 mm (0.490 in.) Crystals, Silver, Carousel of 10
  
Fil-Tech Crystals 
 6 MHz Sensor Crystals 14 mm (0.550 in.)
QI8008NP6MHz Stress Relieving Alloy No Pattern 10/disc   
QI8009      6MHz AG 10/disc  
QI8010  6MHz AU 10/disc
QI8010NP 6MHz AU No Pattern 10/disc
QI80126MHz Longer Life Gold 10/disc 
QI80086MHz Stress Relieving Alloy 10/disc 
QI8008F 6MHz Spec Frequency Stress Relieving Alloy 10/disc 
QXT8008   6MHz Alloy Extreme Temperature 10/disc
QXT8010 6MHz AU Extreme Temperature 10/disc   
  
 5 MHz Sensor Crystals 14 mm (0.550 in.) diameter
QB104A 5MHz Alloy 10/disc 
QB104ANP   5MHz Alloy No Pattern 10/disc 
QB104G  5MHz AU 10/disc
QB104S 5MHz AG 10/disc 
  
 5 MHz Sensor Crystals 12.4 mm (0.490 in.) diameter
QS3952 5MHz AU Sloan 10/disc     
QS3952GL5MHz Longer Life Gold 10/disc 
QS3954   5MHz Alloy Sloan 10/disc  
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