Sensors & Feedthroughs

Crystal 12® Sensor

Auto Crystal Switching Maximizes Production Time


Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. 

Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.


  • Holds 12 crystals with robust, automatic switching to maximize process up-time
  • Easy-to-remove carousel allows fast replacement of all 12 crystals
  • Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
  • Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
  • Optional mounting-post kit can be user-modified to accommodate metric hardware


Maximum bakeout temp with no water130°C
Maximum operating isothermal environment temperature with minimum water flow300° C
Size (maximum envelope)4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
Crystal exchangeFront-loading
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Spare Parts
QCM Sensor FeedthroughsQCM Sensor Feedthroughs
Quartz Monitor CrystalsQuartz Monitor Crystals
Part NumberDescription
750-276-P3Actuator cover
XL12-000100Deposition Shield, Crystal 12 Sensor
750-286-P2Pneumatic actuator
750-902-G1Crystal 12 Kit
750-294-P2Stop ratchet
750-256-P2Extension spring
750-252-P2Spring post
750-649-G1Electrical connection
750-295-G1Pawl and actuator
750-258-P2Bearing Shaft
070-0779Ball bearing
XL12-001000Carousel Assembly, Crystal 12 Sensor
750-650-P1Aperture plate (without dowel pin)
070-1253Dowel pin
750-651-P1Resistor network support
750-655-P1Resistor network insulator
750-642-G1Resistor Network
750-661-P1Contact terminal (carousel component)
750-656-P1Crystal insulator (carousel component)
321-038-P6Leaf spring (carousel component)
750-657-P1Grounding leaf spring
750-671-P1Torsion spring
750-626-P1Spring for sputtering head cover
070-1268Spindle bearing (spindle component)
070-1254E-Ring (spindle component)
750-660-P1Location screw (spindle component)
007-1260.125 in. x 30 in. (3.175 mm x 762 mm) seamless tubing
070-201#4 Split lockwasher
084-004#4-40 X .187 Hex socket head screw
070-398Retaining ring
070-0867Shaft spacer
070-170S#2 Split Lockwasher SS Spare
070-177#4-40 X 3.12 Hex head screw
080-038SScrew 0-80 x.375 LG Phil Pan HD SS Spare
082-032SLock Washer #2 Stainless Steel Spare
082-045#2-56 x .187 Phillips screw
084-054#4 Split lock washer
082-022#2 Flat washer
082-024#2-56 x .250 Hex socket screw
750-292-P2Detent spacer
080-013#0-80 Split washer
080-007-P1#0-80 x .170 Flat washer
080-009-P1#0-80 X .188 Socket head screw
084-048#4-40 x .250 Flat head screw
750-665-P1#2-56 Torsion spring shoulder screw
084-093SScrew Socket HD 4-40 x 1.125 in Spare
086-084-P2SScrew Socket HD Set 6-32 x 0.125in Spare
086-041#6 Flat washer
086-038#6 Split lock washer

#6-32 x 3/8 socket head screw


In-vacuum cables 
321-039-G12In-vacuum cable, 15.2 cm (6 in.)
007-252In-vacuum cable, 30.5 cm (12 in.)
321-039-G11In-vacuum cable, 61.0 cm (24 in.)
007-044In-vacuum cable, 78.1 cm (30.75 in.)
007-059In-vacuum cable, 91.4 cm (36 in.)
007-061In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU
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