ALD Sensor
Optimum Accuracy, maximal Uptime and Minimal Maintenance
Product configurator
Gemini™ MxG5xx
INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.
Designed Specifically for ALD
A unique feature of the INFICON ALD Sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.
Feedthrough and Feedthrough Connection
INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 ¾ in. (CF40) ConFlat® flange feedthrough.
High Temperature Crystals for More Accurate Measurements
The INFICON ALD Sensor can achieve the best measurement accuracy and lower frequency noise in high temperature applications when used with INFICON’s new high temperature quartz crystals. These high temperature crystals are optimized for 120, 240, and 285°C applications, so you always have the right crystal for your process. Crystals optimized for other temperatures may be available. Contact INFICON for your needs.
Features
- Operating temperature up to 450°C
- Gas purge line keeps back of crystal free of depsotion material
- Welded Conflat flange (CF40) option
- O-ring compression fitting option
- High temperature crystals available
Advantages
- Compatible with most ALD process temperatures
- Significantly reduces maintenance
- Maximizes system uptime
- Maximizes measurement accuracy
- Stable readings with low noise at high process temperatures
Typical Applications
- Atomic Layer Deposition (ALD)
Accessories
| Part Number | Description |
| 750-1058-G10 | 120° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10 |
| 750-1059-G10 | 240° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10 |
| 750-1060-G10 | 285° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10 |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
| Part Number | Description |
| 007-007 | Retainer spring (for crystal holder) |
| 007-064 | Ceramic retainer |
| 007-094 | Clamping spring |
| 007-095 | Handle |
| 007-098 | Female Connector (includes ferrules and nut) |
| 007-099 | Bakeable head contact |
| 007-100 | Insulator for BNC |
| 007-103 | Insulator for bakeable head contact |
| 007-104 | BNC Body |
| 007-147 | #4-40 X 3/8 screw |
| 007-228 | #4-40 X 5/8 screw |
| 007-267-P2 | Spreader bar |
| 007-268-P1 | Shoulder washer |
| 007-269-P1 | Shoulder washer |
| 070-201 | #4 Split lockwasher |
| 084-069-P1 | #4-40 x 3/16 screw |
| 750-018-P3 | Split clamp |
| 750-018-P5 | Split clamp |
| 750-218-G1 | Cyrstal holder |
