Sensors & Feedthroughs

ALD Sensor

Optimum Accuracy, maximal Uptime and Minimal Maintenance


Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.

Designed Specifically for ALD

A unique feature of the INFICON ALD Sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.

Feedthrough and Feedthrough Connection

INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 ¾ in. (CF40) ConFlat® flange feedthrough.

High Temperature Crystals for More Accurate Measurements

The INFICON ALD Sensor can achieve the best measurement accuracy and lower frequency noise in high temperature applications when used with INFICON’s new high temperature quartz crystals. These high temperature crystals are optimized for 120, 240, and 285°C applications, so you always have the right crystal for your process. Crystals optimized for other temperatures may be available. Contact INFICON for your needs.


  • Operating temperature up to 450°C
  • Gas purge line keeps back of crystal free of depsotion material
  • Welded Conflat flange (CF40) option
  • O-ring compression fitting option
  • High temperature crystals available


  • Compatible with most ALD process temperatures
  • Significantly reduces maintenance
  • Maximizes system uptime
  • Maximizes measurement accuracy
  • Stable readings with low noise at high process temperatures

Typical Applications

  • Atomic Layer Deposition (ALD)


Part NumberDescription
750-1058-G10120° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10
750-1059-G10240° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10
750-1060-G10285° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10
Quartz Monitor CrystalsQuartz Monitor Crystals

Spare Parts

Part NumberDescription
007-007Retainer spring (for crystal holder)
007-064Ceramic retainer
007-094Clamping spring
007-098Female Connector (includes ferrules and nut)
007-099Bakeable head contact
007-100Insulator for BNC
007-103Insulator for bakeable head contact
007-104BNC Body
007-147#4-40 X 3/8 screw
007-228#4-40 X 5/8 screw
007-267-P2Spreader bar
007-268-P1Shoulder washer
007-269-P1Shoulder washer
070-201#4 Split lockwasher
084-069-P1#4-40 x 3/16 screw
750-018-P3Split clamp
750-018-P5Split clamp
750-218-G1Cyrstal holder
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