Monitors

IMM-100

Making Excellence Repeatable

Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.

With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.

Features

INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
Maximize yield with the best QCM thickness measurement possible
Single channel rate and thickness monitor without unnecessary added features to minimize cost
±0.0035 Hz over 100 ms sample
EtherCAT communications for seamless integration
Compact size to minimize integration costs by saving tool real estate
Expert application support, able to discuss unique application needs and give greater support than the competition
RoHS compliant

Typical Applications

OLED Applications

Specifications

Sensor inputs	1

Measurement frequency range	6.0 to 4.5 MHz (fixed)

Rate and thickness resolution	0.0042 Å (new crystal); 0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0

Communication type	EtherCAT, 2 RJ45 jacks, supports data daisy chaining. Explicit device ID via switches

Part Number

Accessories

Consumables

Part Number	Description
785-600-G1	IMM-100 Thin Film Deposition Monitor

Part Number	Description

Optional Power Supplies	The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1	Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
961-021-G7	Power Supply Kit IL 240V
961-021-G8	Power Supply Kit IL 4.5 M Extension
961-021-G9	Power Supply Kit IL 9.0 M Extension
961-021-G10	Power Supply Kit UK 240V
961-021-G11	Power Supply Kit UK 4.5 M Extension
961-021-G12	Power Supply Kit UK 9.0 M Extension

Optional Mounting Bracket
785-202-G1	Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1	Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet

Optional Communications Cable
600-1190-P1	ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2	SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4	ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8	Ethernet 7m cable
600-1190-P15	Ethernet 15m cable