Mass Spectrometers
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Mass Spectrometers
Transpector APX Multi-Pressure
Advanced process expert for Multi-Pressure ALD/CVD and Etch.
Transpector APX Multi-Pressure
- xParts coated for extended lifetime in harsh chemistry
- Multi pressure sampling inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Mass Spectrometers
Transpector® APX ALD Single Pressure
Advanced process expert for Single Pressure ALD/CVD and Etch.
Transpector® APX ALD Single Pressure
- xParts coated for extended lifetime in harsh chemistry
- High temperature single pressure inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Mass Spectrometers
Transpector® XPR 3+
Extreme PVD Process Monitoring Quadrupole Mass Spectrometer
Transpector® XPR 3+
- Industry leading maximum operating pressure
- Optional overpressure isolation valve interlock
- Scans up to 100 amu
Mass Spectrometers
Transpector® MPH
High performance quadrupole mass spectrometer
Transpector® MPH
- Nine-decade dynamic range
- Industry leading data collection rate
- Interchangeable sensors and electronics
- Scans up to 300 amu
Mass Spectrometers
Transpector® MPS
Multi-Purpose Quadrupole Mass Spectrometer
Transpector® MPS
- Nine-decade dynamic range
- Interchangeable sensors and electronics
- Optional continuous dynode electron multiplier
- Scans up to 200 amu
Mass Spectrometers
Transpector® CPM 3
Versatile process monitoring from baseline to process pressure
Transpector® CPM 3
- Ideal semiconductor process monitor
- Multi pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping
Mass Spectrometers
Transpector® SPS
Process monitoring at target pressure range
Transpector® SPS
- Targeted high pressure processes
- Single pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping system
Mass Spectrometers
Mobile Cart for Transpector® CPM
Allows the Transpector CPM to become a mobile troubleshooting instrument
Mobile Cart for Transpector® CPM
- Flexible enough to get a Transpector CPM where you need it
- A small footprint to fit in those tight spaces
- A complete system able to hold everything needed to run the Transpector CPM
Mass Spectrometers
QMG 700
QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation
QMG 700
- Mass range options from 1-512 amu
- More than nine decades of dynamic range
- Extremely fast measurement speeds: 0.125 ms/amu
- MDPP < 10E-16 mbar