Cold Cathode Gauges
Cold Cathode Gauges by INFICON are the perfect solution for robust and maintenance-friendly vacuum measurement. They ensure stability and reliability, even in challenging applications.
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Provide fast real-time leak detection, gas analysis, and process monitoring for semiconductor manufacturing and other markets.
- High speed leak detection allows chamber leak test
- Smart algorithm for easy integration
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. Measurement range from 1x10-9 mbar to atmosphere.
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance - replaceable insert
Inverted Magnetron Vacuum Gauge is for all ultra high vacuum applications, measurement range from 5x10-11 mbar
- Measurement range down to 5x10-11 mbar
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
Inverted Magnetron Pirani Gauges, measure from 5 x 10-9 mbar to atmosphere
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
Cold cathode passive gauge heads for VGC094 and VGC083C
- Reliable and proven gauge head design, based on the inverted magnetron principle
- Large vacuum pressure measurement range capability from 1×10-11 (MAG070) to 5×10-3 mbar
- Bakeable to 150 °C (MAG050) or 250 °C (MAG060, MAG070)
- Good ignition properties
The gauge head MAG084 is a unique magnetic field resistant inverted magnetron cold cathode gauge designed to operate with the Vacuum Gauge Controller VGC094.
- Developed to sustain operation in strong external magnetic fields
- Reliable and proven gauge head design, based on the inverted magnetron principle
- Innovative double ionization chamber principle
- Bakeable to 230 °C