Mass Spectrometers

Transpector® XPR 3+

Extended Pressure Range RGA - Innovation by Sensorization


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Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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Monitor and Control Rapid Process Changes

The new Transpector XPR 3+ Residual Gas Analyzer (RGA) provides industry-leading measurement speeds to monitor and control the rapid process changes required for modern semiconductor and display manufacturing. Transpector XPR 3+ is ideal for in-situ air leak, gas purity, hydrocarbon, and contamination monitoring. Real time measurement with the Transpector XPR 3+ provides far superior product protection compared to periodic rate of rise tests.


Drivng Profitability by Maximizing Tool Uptime

The Transpector XPR 3+ RGA is a field proven quadrupole and dual ion source sensor for sputtering pressure range applications. No pressure conversion equipment is required, long lifetime components, and the ability to rapidly detect and diagnose problems combine to maximize tool availability, product throughput and yield. The sensor can be operated continuously from high vacuum to 20 mTorr, without the need for pumps. The Transpector XPR 3+ dual ion source’s chambers are designed to limit coating to maintain ion source sensitivity and extend the sensor’s mean time to maintenance.


  • Real time wafer and panel protection due to high sensitivity air leak and contamination detection from high vacuum to PVD process pressures
  • Maximize PM efficiency and tool uptime, with rapid and reliable chamber qualification
  • Minimize total cost of ownership with the longer lifetime, contamination resistant, dual ion source design; monitors up to 20 mTorr without the need for pumps. Low pressure EM variant provides cost sensitive alternative
  • Seamless fab integration and reliable interdiction through powerful data acquisition and synchronization
  • Enhance unique manufacturing capabilities with tailored recipe optimization
  • Protects critical process needs with immediate on-site response from experts

Typical Applications

  • PVD and sputtering process modules
  • Preclean modules
  • Non-cluster PVD tools
  • Clamped degas modules


Mass position stability<0.1 amu over 24 hours
Sensitivity (FC mode)≥4E-7 amps/Torr (3E-7 amps/mbar)
Sensitivity (nominal)≥8E-3 amps/Torr (3E-3 amps/mbar)
Minimum detectable partial pressure (FC mode)≤1E-9 Torr (1.3E-9 mbar)
Minimum detectable partial pressure (EM mode)≤6E-12 Torr (8E-12 mbar)
Maximum operating pressure (FC or EM mode)20 mTorr (2.6E-2 mbar)
Maximum operating pressure (linear operation)10 mTorr (1.3E-2 mbar)
The product is used in the following markets
Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets. 

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From electrode production to end-of-line testing

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INFICON supports leading-edge technology and enables the highest quality Display products

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Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

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Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

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Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

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Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma 

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Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

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Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

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Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

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