Hydrocarbon Detector (HCD)
Detect volatile organic compounds in industrial manufacturing settings.
Critical-Process Monitoring in Real Time
Take your manufacturing process control to the next level by detecting volatile organic compounds with the hydrocarbon detector from INFICON.
Our broadband, non-selective sensor monitors critical processes in harsh industrial manufacturing settings—including semiconductor, solar, pharmaceutical, or other vacuum-based process—and provides real-time detection of hydrocarbons and silicone oils with superior sensitivity.
Whether detecting photoresist contamination in semiconductor or pump oil contamination in freeze drying applications, the HCD sensor is a user-friendly and effective solution. It seamlessly integrates with existing systems or with INFICON FabGuard® software. The sensor is compatible with any chamber condition, and pumping system maintenance is not required.
Advantages
- Real-time monitoring
- Tailored sensor operation control and easy data interpretation
- Seamless tool integration and reliable interdiction through data acquisition
- Quick and easy sensor installation, minimized tool space occupation
- Low total cost of ownership, high return on investment
Specifications
| Operating Pressure Range | sub 1 Torr - 1 ATM |
| Limit of Detection | ppm to ppb based on operating pressure |
| Operating Temperature Range | -25C to 180C |
| Sensitivity (High Emission) | > 2E-5 Amps/Torr |
| Mounting Flange | Standard FK25; custom options available |
| Available Inputs/Outputs | 4-20mA, 0-10 V analog, Modbus TCP |
| Contamination Measurement by UV Photoionization | 10 / 10.6 eV Kr discharge |
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Interested in learning how our HCD can improve your industrial processes?
