Dual Gauge for Optical Gas Analysis and Total Pressure Measurement

Augent® OPG550

Optical Plasma Vacuum Gauge

Prices & Availability
Augent-OPG550
Drop-in Options

Revolutionize your vacuum gauge experience with us!

The INFICON Augent® Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring. 

Augent combines two sensor technologies into one compact device for gas type monitoring from 1 x 10-7 to 5 mbar and to measure total pressure from 1 x 10-7 mbar to atmosphere at the same time. Augent is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. The fast optical measurement principle allows the detection of in principle any type of gas.

Advantages

  • High speed leak detection allows chamber leak test
  • Increase of productivity and yield    
  • Long life time, no filament burns, air inrush protection
  • Withstand process chemistry
  • Smart algorithm for easy integration 
  • Compact design and small footprint  
  • Reliable and fast start up 

3D Model

Zoom and pan for a closer look at the Augent® OPG550

Typical Applications

  • Chamber leak check, faster RoR (rate of rise) test
  • Leak check to find internal leaks from gas supply lines
  • Real time end point control
  • Gas type and concentrations control
Watch video

Tutorial Videos

How to clean the sensor?
How to replace the sensor?

Specifications

Measurement range N2mbar
Torr

1×10-7 … 5
(7.6×10-8 … 3.8)

 

Accuracy total pressure reading N2  
1 x 10-7 ... 100 mbar% of reading30
100 ... 1000 mbar% of reading50
   
Repeatability total pressure reading N2  
1 x 10-7 ... 100 mbar% of reading5
   
Temperature  
Operation (ambient)°C+5 … +50
Storage°C-20 … +70
Bakeout at flange with electronic unit°C<80
Bakeout at flange w/o electronic unit°C<120
   
Supply voltage  
At gaugeV (dc)+14.5 … +30
RippleV (p-p)<1
Power consumptionW<5
Fuse to be connectedAT1
   
Materials exposed to vacuum  
GeneralGeneralAl2O3, Stainless steel 
AnodeAnodeMolybdenum
Ionization chamberIonization chamberTitanium, stainless steel 
Ignition aidIgnition aidStainless steel 
Download full specifications

Order Information

Product
Spare parts
Accessories
OPG550 TI,LC,9DSub,16KF
3OF0-011-010P
OPG550 TI,LC,9DSub,8-VCR f
3OF0-01E-010P
OPG550 TI,LC,9DSub,25KF
3OF1-016-010P
OPG550 TI,LC,9DSub,40KF
3OF1-017-010P
OPG550 TI,LC,9DSub,40CF-F
3OF1-01Q-010P
OPG550 spare sensor TI-LC, 16KF
351-594
OPG550 spare sensor TI-LC, 25KF
351-597
Cleaning tool kit OPG5xx
351-052
Ionisation Chamber TI - OPG550
351-055
MxG40x/50x Spare parts ignition aid (10)
351-995
Diagnostic cable 1.9m (P3)
303-333
Power Supply, OPG550, RS232/Analog Out
351-051
Centering ring DN 16 ISO-KF, Inox / FPM
211-066
Centering ring DN 25 ISO-KF, SS/FPM
211-068
Clamping ring DN 10-16 ISO-KF
211-001
Clamping ring DN 20-25 ISO-KF
211-002
Copper seal DN 16 CF; set of 10 pcs
213-451

Part Number

Ordering Information Augent OPG550
Ordering Information Augent OPG550

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