Dual Gauge for Optical Gas Analysis and Total Pressure Measurement
Prices & Availability
Augent® OPG550
Optical Plasma Vacuum Gauge

Drop-in Options
Revolutionize your vacuum gauge experience with us!
The INFICON Augent® Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring.
Augent combines two sensor technologies into one compact device for gas type monitoring from 1 x 10-7 to 5 mbar and to measure total pressure from 1 x 10-7 mbar to atmosphere at the same time. Augent is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. The fast optical measurement principle allows the detection of in principle any type of gas.
Advantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
3D Model
Zoom and pan for a closer look at the Augent® OPG550
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
Specifications
| Measurement range N2 | mbar Torr | 1×10-7 … 5
|
| Accuracy total pressure reading N2 | ||
| 1 x 10-7 ... 100 mbar | % of reading | 30 |
| 100 ... 1000 mbar | % of reading | 50 |
| Repeatability total pressure reading N2 | ||
| 1 x 10-7 ... 100 mbar | % of reading | 5 |
| Temperature | ||
| Operation (ambient) | °C | +5 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange with electronic unit | °C | <80 |
| Bakeout at flange w/o electronic unit | °C | <120 |
| Supply voltage | ||
| At gauge | V (dc) | +14.5 … +30 |
| Ripple | V (p-p) | <1 |
| Power consumption | W | <5 |
| Fuse to be connected | AT | 1 |
| Materials exposed to vacuum | ||
| General | General | Al2O3, Stainless steel |
| Anode | Anode | Molybdenum |
| Ionization chamber | Ionization chamber | Titanium, stainless steel |
| Ignition aid | Ignition aid | Stainless steel |
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Order Information
Product
Spare parts
Accessories
OPG550 TI,LC,9DSub,16KF
3OF0-011-010P
OPG550 TI,LC,9DSub,8-VCR f
3OF0-01E-010P
OPG550 TI,LC,9DSub,25KF
3OF1-016-010P
OPG550 TI,LC,9DSub,40KF
3OF1-017-010P
OPG550 TI,LC,9DSub,40CF-F
3OF1-01Q-010P
OPG550 spare sensor TI-LC, 16KF
351-594
OPG550 spare sensor TI-LC, 25KF
351-597
Cleaning tool kit OPG5xx
351-052
Ionisation Chamber TI - OPG550
351-055
MxG40x/50x Spare parts ignition aid (10)
351-995
Diagnostic cable 1.9m (P3)
303-333
Power Supply, OPG550, RS232/Analog Out
351-051
Centering ring DN 16 ISO-KF, Inox / FPM
211-066
Centering ring DN 25 ISO-KF, SS/FPM
211-068
Clamping ring DN 10-16 ISO-KF
211-001
Clamping ring DN 20-25 ISO-KF
211-002
Copper seal DN 16 CF; set of 10 pcs
213-451
Part Number

Downloads
Choose language
Manuals
Augent® OPG550 Communication Protocol RS232
pdf
•
3,4 MB
•
English
•
Operating Manual
Augent® OPG550 EtherCAT Manual
pdf
•
1,7 MB
•
English
Augent® OPG550 Gebrauchsanleitung
pdf
•
3,6 MB
•
German
•
Operating Manual
Augent® OPG550 Operating Manual
pdf
•
4,5 MB
•
English
•
Operating Manual
Augent® OPG550 PROFINET Manual
pdf
•
1,2 MB
•
English
3D Step Files
Augent® OPG550 3D 8VCR
stp
•
4,8 MB
•
3D Files
Augent® OPG550 3D CF16
stp
•
3,7 MB
•
3D Files
Augent® OPG550 3D CF40
stp
•
4,9 MB
•
3D Files
Augent® OPG550 3D KF16
stp
•
3,6 MB
•
3D Files
Augent® OPG550 3D KF16 EtherCAT
stp
•
7,1 MB
•
3D Files
Augent® OPG550 3D KF25
stp
•
4,9 MB
•
3D Files
Augent® OPG550 3D KF25 EtherCAT
stp
•
13,6 MB
•
3D Files
Augent® OPG550 3D KF25 PROFINET
stp
•
5,6 MB
•
3D Files
Augent® OPG550 3D KF40
stp
•
4,7 MB
•
3D Files
Application Notes
Download GUI-Software
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