Mass Spectrometers

Transpector® APX ALD Single Pressure

Advanced Process Expert for Single Pressure ALD/CVD and Etch
 

Transpector APX ALD Single Pressure

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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Minimize Scrap and Maximize Yield in Real Time

INFICON Transpector APX remains the market leading Residual Gas Analyzer (RGA) for semiconductor and display process monitoring. INFICON knows semiconductor and display customers have unique needs, and the latest revision of the Transpector APX allows for more flexibility to meet specific application requirements, while maintaining industry leading measurement speed and sensitivity. Transpector APX  is the ideal RGA process monitor for semiconductor processes such as ALD, CVD, PVD, and Etch.

The next generation Transpector APX ALD Single Pressure inlet system is designed to survive process chemistries prone to particle or coating generation like ALD or PECVD. This allows for continuous monitoring to capture data points at all critical process steps. In addition the inlet is temperature controlled for resistance to corrosive gases, essential for chamber clean endpoint monitoring applications.

Advantages

  • Application specific platform design for longest lifetime on your ALD or CVD process for the best wafer and panel protection and process optimization
  • ALD ready with measurement speeds of over 550 data points per second
  • Reduced fab footprint by 30% and easier installation due ne high performance pumping system
  • Temperature controlled inlet with INFICON proprietary coating for discrete pressure inlet that can withstand harsh corrosive chemistry
  • Automated calibration ensures long-term data reliability and accuracy for sensor to sensor and tool to tool chamber matching
  • Transpector APX becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard® software and supported by INFICON world-class application experts

Specifications

100 AMU
200 AMU
300 AMU
Total Pressure Range

5E-7 – 1E-3 Torr

6.6E-7 – 1.3E-3 mbar

Detection Limit<10 ppb
Process Pressure Range

1E-8 Torr – 1.2 atm

1.3E-8 mbar – 1.2 atm

Sensitivity (Low Emission)

>4.0E-6 amps/Torr

>3E-6 amps/mbar

Sensitivity (High Emission)

>2.0E-5 amps/Torr

>1.5E-5 amps/mbar

Total Pressure Range

5E-7 – 1E-3 Torr

6.6E-7 – 1.3E-3 mbar

Detection Limit<25 ppb
Process Pressure Range

1E-8 Torr – 1.2 atm

1.3E-8 mbar – 1.2 atm

Sensitivity (Low Emission)

>2.0E-6 amps/Torr

>1.5E-6 amps/mbar

Sensitivity (High Emission)

>1.0E-5 amps/Torr

>7.6E-6 amps/mbar

Total Pressure Range

5E-7 – 1E-3 Torr

6.6E-7 – 1.3E-3 mbar

Detection Limit<50 ppb
Process Pressure Range

1E-8 Torr – 1.2 atm

1.3E-8 mbar – 1.2 atm

Sensitivity (Low Emission)

>1.0E-6 amps/Torr

>7.6E-7 amps/mbar

Sensitivity (High Emission)

>5.0E-6 amps/Torr

>3.8E-6 amps/mbar

Consumables

Part NumberDescription
969-800-G1SAPX CIS Tungsten Filament Kit GOLD
969-800-G2SAPX CIS Coated Filament Kit GOLD
969-801-G1SAPX CIS Tungsten Ion Source Kit GOLD
969-801-G2SAPX CIS Tungsten Ion Source Kit with Anode Liner GOLD
969-801-G3SAPX CIS Coated Ion Source Kit GOLD
969-801-G4SAPX CIS Coated Ion Source Kit with Anode Liner GOLD
961-707-G1Electron Multiplier Replacement Kit
923-418-G2Replacement diaphragm kit for 2-stage pump
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