Cold Cathode Gauges
MPG40X
ATM to Ultra High Vacuum Gauge

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere).
Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.
Advantages
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Specifications
MPG400 FPM sealed
MPG401 metal-sealed
Measurement range (air, N2) | mbar Torr | 5 x 10-9 … 1000 3.8 x 10-9 … 760 |
Accuracy | ||
1 x 10-8 … 100 mbar | % of reading | ≈±30% |
Repeatability | ||
1 x 10-8 … 100 mbar | % of reading | ≈±5% |
Temperature | ||
Operation (ambient) | °C | +5 … +55 |
Storage | °C | –40 … +65 |
Bake-out (1) | °C | 150 |
Supply voltage | ||
At gauge | V (dc) | +15 … +30 |
At supply unit with max. cable length (2) | V (dc) | +16 … +30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤2 |
Materials exposed to vacuum | stainless steel, Al2O3, FPM75, Mo, Ni, Au, W | |
(1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable. |
Measurement range (air, N2) | mbar Torr | 5 x 10-9 … 1000 3.8 x 10-9 … 760 |
Accuracy | ||
1 x 10-8 … 100 mbar | % of reading | ≈±30% |
Repeatability | ||
1 x 10-8 … 100 mbar | % of reading | ≈±5% |
Temperature | ||
Operation (ambient) | °C | +5 … +55 |
Storage | °C | –40 … +65 |
Bake-out (1) | °C | 150 |
Supply voltage | ||
At gauge | V (dc) | +15 … +30 |
At supply unit with max. cable length (2) | V (dc) | +16 … +30 |
Ripple | V (p-p) | ≤1 |
Power consumption | W | ≤2 |
Materials exposed to vacuum | stainless steel, Al2O3, Ag, Cu, Sn, Mo, Ni, Au, W | |
(1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable. |
Part Number
Accessories
Spare Parts
MPG400 FPM sealed | |
Part Number | Description |
351-010 | MPG400 FPM sealed, DN 25 ISO-KF |
351-011 | MPG400 FPM sealed, DN 40 ISO-KF |
351-012 | MPG400 FPM sealed, DN 40 CF-F |
MPG401 metal-sealed | |
Part Number | Description |
351-020 | MPG401 metal sealed, DN 25 ISO-KF |
351-021 | MPG401 metal sealed, DN 40 ISO-KF |
351-022 | MPG401 metal sealed, DN 40 CF-F |
351-023 | Magnetic shield |
MPG400 FPM sealed | |
Part Number | Description |
351-023 | Magnetic shield |
MPG401 metal-sealed | |
Part Number | Description |
351-023 | Magnetic shield |
MPG400 FPM sealed | |
Part Number | Description |
BN846469-T | Spare measurement system MPG400 |
MPG401 metal-sealed | |
Part Number | Description |
BN846472-T | Replacement meas. unit MPG401 DN25 KF |
MPG400 FPM sealed | |
Part Number | Description |
BN846470-T | Spare measurement system MPG400 DN40 KF |
MPG401 metal-sealed | |
Part Number | Description |
BN846473-T | Replacement meas. unit MPG401 DN40 KF |
MPG400 FPM sealed | |
Part Number | Description |
BN846471-T | Spare measurement system MPG400 DN40CF-F |
MPG401 metal-sealed | |
Part Number | Description |
BN846474-T | Spare meas. system, MPG401 DN40CF-F |
MPG400 FPM sealed | |
Part Number | Description |
351-994 | MPG40x Ignition tool set |
MPG401 metal-sealed | |
Part Number | Description |
351-994 | MPG40x Ignition tool set |
MPG400 FPM sealed | |
Part Number | Description |
351-995 | MxG40x/50x Spare parts ignition aid (10) |
MPG401 metal-sealed | |
Part Number | Description |
351-995 | MxG40x/50x Spare parts ignition aid (10) |
MPG400 FPM sealed | |
Part Number | Description |
351-998 | MPG400 Repair set. |
MPG401 metal-sealed | |
Part Number | Description |
351-996 | MPG401 Repair set |
MPG400 FPM sealed | |
Part Number | Description |
351-999 | MPG400 Maintenance set |
MPG401 metal-sealed | |
Part Number | Description |
351-997 | MPG401 Maintenance set |
Downloads
Manuals
3D Step Files
351-010 MPG400 FPM sealed, DN 25 ISO-KF
zip
•
133,7 KB
•
German, Japanese, Korean, Spanish, Chinese, English
351-011 MPG400 FPM sealed, DN 40 CF-F
zip
•
142,8 KB
•
German, Japanese, Korean, Spanish, Chinese, English
351-011 MPG400 FPM sealed, DN 40 ISO-KF
zip
•
137,5 KB
•
German, Japanese, Korean, Spanish, Chinese, English
351-020 MPG401 metal sealed, DN 25 ISO-KF
zip
•
149,0 KB
•
German, Japanese, Korean, Spanish, Chinese, English
351-021 MPG401 metal sealed, DN 40 ISO-KF
zip
•
153,3 KB
•
German, Japanese, Korean, Spanish, Chinese, English
351-022 MPG401 metal sealed, DN 40 CF-F
zip
•
157,9 KB
•
German, Japanese, Korean, Spanish, Chinese, English
The product is used in the following markets