Cold Cathode Gauges

MPG40X

ATM to Ultra High Vacuum Gauge

MPG40x

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). 

Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

Specifications

MPG400 FPM sealed
MPG401 metal-sealed
Measurement range (air, N2)mbar
Torr
5 x 10-9 … 1000
3.8 x 10-9 … 760
Accuracy  
1 x 10-8 … 100 mbar% of reading≈±30%
Repeatability  
1 x 10-8 … 100 mbar% of reading≈±5%
Temperature  
Operation (ambient)°C+5 … +55
Storage°C–40 … +65
Bake-out (1)°C150
Supply voltage  
At gaugeV (dc)+15 … +30
At supply unit with max. cable length (2)V (dc)+16 … +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuum stainless steel, Al2O3, FPM75, Mo, Ni, Au, W
   
(1) Without electronics and magnetic shielding.
(2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Measurement range (air, N2)mbar
Torr
5 x 10-9 … 1000
3.8 x 10-9 … 760
Accuracy  
1 x 10-8 … 100 mbar% of reading≈±30%
Repeatability  
1 x 10-8 … 100 mbar% of reading≈±5%
Temperature  
Operation (ambient)°C+5 … +55
Storage°C–40 … +65
Bake-out (1)°C150
Supply voltage  
At gaugeV (dc)+15 … +30
At supply unit with max. cable length (2)V (dc)+16 … +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuum stainless steel, Al2O3, Ag, Cu, Sn, Mo, Ni, Au, W
   
(1) Without electronics and magnetic shielding.
(2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Download full specifications
Part Number
Accessories
Spare Parts
MPG400 FPM sealed
Part NumberDescription
351-010MPG400 FPM sealed, DN 25 ISO-KF
351-011MPG400 FPM sealed, DN 40 ISO-KF
351-012MPG400 FPM sealed, DN 40 CF-F
  
MPG401 metal-sealed
Part NumberDescription
351-020MPG401 metal sealed, DN 25 ISO-KF
351-021MPG401 metal sealed, DN 40 ISO-KF
351-022MPG401 metal sealed, DN 40 CF-F
351-023Magnetic shield
MPG400 FPM sealed
Part NumberDescription
351-023Magnetic shield
  
MPG401 metal-sealed
Part NumberDescription
351-023Magnetic shield
MPG400 FPM sealed
Part NumberDescription
BN846469-TSpare measurement system MPG400
  
MPG401 metal-sealed
Part NumberDescription
BN846472-TReplacement meas. unit MPG401 DN25 KF
  
MPG400 FPM sealed
Part NumberDescription
BN846470-TSpare measurement system MPG400 DN40 KF
  
MPG401 metal-sealed
Part NumberDescription
BN846473-TReplacement meas. unit MPG401 DN40 KF
  
MPG400 FPM sealed
Part NumberDescription
BN846471-TSpare measurement system MPG400 DN40CF-F
  
MPG401 metal-sealed
Part NumberDescription
BN846474-TSpare meas. system, MPG401 DN40CF-F
  
MPG400 FPM sealed
Part NumberDescription
351-994MPG40x Ignition tool set
  
MPG401 metal-sealed
Part NumberDescription
351-994MPG40x Ignition tool set
  
MPG400 FPM sealed
Part NumberDescription
351-995MxG40x/50x Spare parts ignition aid (10)
  
MPG401 metal-sealed
Part NumberDescription
351-995MxG40x/50x Spare parts ignition aid (10)
  
MPG400 FPM sealed
Part NumberDescription
351-998MPG400 Repair set.
  
MPG401 metal-sealed
Part NumberDescription
351-996MPG401 Repair set
  
MPG400 FPM sealed
Part NumberDescription
351-999MPG400 Maintenance set
  
MPG401 metal-sealed
Part NumberDescription
351-997MPG401 Maintenance set
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