Cold Cathode Gauges

Gemini™ MxG5xx

ATM to Ultra-High Vacuum Gauge

Gemini-MxG5xx
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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON Gemini™ Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. While Gemini MPG50x combines two sensor systems in one small device to measure from atmosphere down to 1x10– 9 mbar, the Gemini MAG50x is a pure cold cathode sensor System (without Pirani element) which covers the range from 1x10-2 mbar to 1x10– 9 mbar. The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.

Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. The Cold cathode and Pirani combination version (MPG) option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.

MAG and MPG Gemini are now available with EtherCAT fieldbus and setpoints as MAG55x and MPG55x.

For corrosive applications we suggest to use the ceramic coated version MxG5x4. Feedthrough and Pirani inside the sensor head are fully ceramic coated for enhanced corrosion resistance.

Gemini™ Cold Cathode and combination sensor`s come with fully integrated digital electronics, providing ultimate flexibility for System Integration.

Both, cold cathode and Pirani combination sensor Option provide seamless Transition, reliability, proactivity and flexibility across wide ranging applications.

Advantages

  • Long lifetime in harsh environments
  • Low magnetic stray field
  • Reliable fast ignition
  • Fastest maintenance - replaceable insert
  • Compact size - easy to integrate
  • Corrosion proof feed-through & sensor element
  • Selectable measuring current
  • 2 relay setpoints (in conjunction with MxG55x EtherCAT Version)
  • EtherCAT and RS232/ RS485 digital interace

Typical applications

  • Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
  • General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
  • Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.

Specifications

MAG5xx
MPG5xx
Measurement range (air, N2)mbar
Torr
1×10-9 … 1×10-2
(7.6×10-10 … 7.6×10-3)
Accuracy  
1×10-8 … 1×10-2 mbar% of reading30
1×10-2 … 100 mbar% of reading-
100 … 1000 mbar% of reading-
Repeatability  
1×10-8 … 1×10-2 mbar% of reading5
1×10-8 … 100 mbar% of reading-
Temperature  
Operation (ambient)°C+5 ... +55
Bakeout at flange (1)°C<150
Storage°C-40 ... +70
Filament temperature°C-
Supply voltage  
At gauge (2)V (dc)+14.5 ... +30
RippleV (p-p)<1
Power consumptionW<2
Fuse to be connectedAT<1
   
(1) Without electronics.
(2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Measurement range (air, N2)mbar
Torr
1×10-9 … 1000
(7.6×10-10 … 760)
Accuracy  
1×10-8 … 1×10-2 mbar% of reading30
1×10-2 … 100 mbar% of reading30
100 … 1000 mbar% of reading50
Repeatability  
1×10-8 … 1×10-2 mbar% of reading-
1×10-8 … 100 mbar% of reading5
Temperature  
Operation (ambient)°C+5 ... +55
Bakeout at flange (1)°C<150
Storage°C-40 ... +70
Filament temperature°C120
Supply voltage  
At gauge (2)V (dc)+14.5 ... +30
RippleV (p-p)<1
Power consumptionW<=3
Fuse to be connectedAT<1
   
(1) Without electronics.
(2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Download full specifications
Accessories
Spare Parts
MAG5xx
Part NumberDescription
211-098Centering ring with fine filter DN 25 KF
351-550MxG50x Ignition tool set
211-113Centering ring with baffle DN 25 KF
353-512

Baffle for BPG400

 

 

MPG5xx
Part NumberDescription
211-098Centering ring with fine filter DN 25 KF
351-550MxG50x Ignition tool set
211-113Centering ring with baffle DN 25 KF
353-512Baffle for BPG400
MAG5xx
Part NumberDescription
351-500MAG500 spare sensor, 25KF, SS
351-556Spare ion chamber ti
351-512MAG500 spare sensor, 40KF, SS
351-536MAG500 spare sensor, 40CF-R, SS
351-524MAG500 spare sensor, 40CF-F, SS
351-502MAG500 spare sensor, 25KF, TI
351-514MAG500 spare sensor, 40KF, TI
351-538MAG500 spare sensor, 40CF-R, TI
351-526MAG500 spare sensor, 40CF-F, TI
351-501MAG504 spare sensor, 25KF, SS
351-513MAG504 spare sensor, 40KF, SS
351-537MAG504 spare sensor, 40CF-R, SS
351-525MAG504 spare sensor, 40CF-F, SS
351-503MAG504 Ersatzsensor, 25KF, TI
351-515MAG504 spare sensor, 40KF, TI
351-539MAG504 spare sensor, 40CF-R, TI
351-527MAG504 spare sensor, 40CF-F, TI
351-995MxG40x/50x Spare parts ignition aid (10)
351-555

Spare ion chamber ss

 

 

MPG5xx
Part NumberDescription
351-506MPG500 spare sensor, 25KF, SS
351-518MPG500 spare sensor, 40KF, SS
351-542MPG500 spare sensor, 40CF-R, SS
351-530MPG500 spare sensor, 40CF-F, SS
351-508MPG500 spare sensor, 25KF, TI
351-520MPG500 spare sensor, 40KF, TI
351-544MPG500 spare sensor, 40CF-R, TI
351-532MPG500 spare sensor, 40CF-F, TI
351-507MPG504 SS,LC,9DSub,25KF
351-519MPG504 spare sensor, 40KF, SS
351-543MPG504 spare sensor, 40CF-R, SS
351-531MPG504 spare sensor, 40CF-F, SS
351-509MPG504 spare sensor, 25KF, TI
351-521MPG504 spare sensor, 40KF, TI
351-545MPG504 spare sensor, 40CF-R, TI
351-533MPG504 spare sensor, 40CF-F, TI
351-995MxG40x/50x Spare parts ignition aid (10)
351-555Spare ion chamber ss
351-556Spare ion chamber ti

Part Number

Gemini Ordering Information_13.03.2019
Gemini Ordering Information_13.03.2019

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