Monitors

SQM-160

Measure rate and thickness in thin film deposition processes

SQM-160

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals.

Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. 

In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings.

Features

  • Two measurement channels standard, an additional four optional
  • Analog outputs for rate/thickness recording
  • High resolution option: 0.03Hz at 10 readings/sec
  • RS-232 standard, USB or Ethernet optional

Specifications

SQM-160 Standard Resolution
SQM-160 High Resolution
QCM Sensor InputsStandard: 2; optional: 4
Measurement Frequency RangeAdjustable:
1.0 MHz minimum
6.5 MHz maximum
Thickness and rate resolution/measurement (1)± 0.37 Å
Stored Films99
Digital Inputs/OutputsFour inputs, four relay outputs
  
(1)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval
QCM Sensor InputsStandard: 2; optional: 4
Measurement Frequency RangeAdjustable:
1.0 MHz minimum
6.5 MHz maximum
Thickness and rate resolution/measurement (1)± 0.037 Å
Stored Films99
Digital Inputs/OutputsFour inputs, four relay outputs
  
(1)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval

Part Number

Accessories

Accessories
Replacement Parts
Consumables
Part NumberDescription
782-900-01419 in. Rack Mount Kit for two SQM-160 or CI-100 instruments
782-502-096-G1USB option card
782-502-097-G1Ethernet option card
  
Oscillator kits(Includes oscillator and cables)
783-500-109-103 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-257.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-5015.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-7522.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
  
Oscillator Only(No cables included)
783-500-013-G1OSC-100 oscillator only (no cables)
  
Cables 
782-902-01115.2 cm (6 in.) BNC cable, male/female
782-902-012-103 m (10 ft.) BNC cable, male/male
782-902-012-257.6 m (25 ft.) BNC cable, male/male
782-902-012-5015.2 m (50 ft.) BNC cable, male/male
782-902-012-7522.8 m (75 ft.) BNC cable, male/male