Capacitance Manometers

Capacitance Diaphragm Gauge SKY® CDG025D-X3

Precision and Reliability Redefined

Sky CDG025D
Drop-in Options

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Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
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Gemini™ MxG5xx
Gemini™ MAG500
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In applications where precision and reliability are critical, INFICON SKY introduces the CDG025D-X3 Capacitance Diaphragm Gauge, a top-of-the-line product for pressure measurement and control. This gauge combines decades of experience with state-of-the-art technology to set an unsurpassed standard in the industry.

Introduction to SKY® CDG025D-X3

Highly accurate temperature compensation: The CDG025D-X3 uses advanced temperature-compensated technology. This ensures that the instrument provides reliable and accurate measurements even under extreme conditions. 

The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts.

Advanced digital electronics: The electronics in this gauge are not only state-of-the-art, but also offer an impressive list of features. One-touch zeroing and setpoint adjustment increase ease of use.

SKY ceramic sensor
SKY ceramic sensor

The Latest SKY® Technology

Long-life ceramic sensor: The corrosion-resistant ultra-ceramic sensor gives the gauge excellent long-term signal stability and a life expectancy of millions of pressure cycles, even during atmospheric pressure drops.

In addition, a patent-pending sensor shield protects the gauge from process contamination. This is particularly important in typical applications such as semiconductor production equipment, especially in processes such as Etch, CVD, PVD and ALD. The CDG025D-X3 is also ideal for data storage and display manufacturing equipment, industrial vacuum process equipment, and general pressure measurement where high accuracy is required.

SKY inside
SKY inside

Special Qualities and Advantages

In today's industrial environment, where electromagnetic interference can be a serious problem, the CDG025D-X3 has been designed with EMC compatibility in mind. This, combined with its impressive long-term stability and temperature compensation, ensures years of reliable performance.

In addition, the CDG025D-X3 provides fast stability after power-up and equally fast recovery after atmospheric pressure exposure, making it an indispensable instrument for demanding industrial applications. It is not just a gauge, but a symbol of quality and innovation in vacuum measurement technology.

INFICON Drop-in Replacement VCP
INFICON Drop-in Replacement VCP


  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Wide range power supply
  • 2 setpoints
  • RS232 interface
  • Clean room compliant

Typical applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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1000 Torr / 1100 mbar
500 ... 10 Torr / mbar
1 Torr / mbar
0.25 Torr
0.1 Torr / mbar
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy% of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy% of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy% of reading0.25
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems130
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy% of reading0.5
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems130  (30 for pressure control type only)
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
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Part Number

CDG025D-X3 Ordering information
CDG025D-X3 Ordering information


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