Capacitance Manometers

Edge® CDG025D2

Full scale 0.1 … 1000 Torr / mbar

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Revolutionize your vacuum gauge experience with us!

INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.

Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

Advantages

Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Corrosion resistant ceramic sensor
Excellent long term signal stability
Temperature compensated
Sensor protected from contamination
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, PVD and other semiconductor production processes
Data storage and display manufacturing equipment
Industrial vacuum equipment
General high accuracy pressure measurement

Specifications

1000 Torr, 1100 mbar

500 ... 10 Torr / mbar

1 Torr / mbar

0.25 Torr / mbar

0.1 Torr / mbar

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.25

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.5

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130 (30 for pressure control type only)

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

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Order Information

Product

Part Number

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Choose language

Brochures

Edge® Brochure

pdf • 2,5 MB • English • Brochures

Vacuum Instrumentation with EtherCAT Brochure

pdf • 3,3 MB • English • Brochures

Datasheets

Edge® CDG025D2 Datasheet

pdf • 125,2 KB • English • Datasheets

Edge® CDG025D2 EtherCAT データシート

pdf • 682,3 KB • Japanese • Datasheets

Edge® CDG025D2 mit EtherCAT Datenblatt

pdf • 540,3 KB • German • Datasheets

Edge® CDG025D2 with EtherCAT Ficha de datos

pdf • 580,1 KB • Spanish • Datasheets

Edge® CDG025D2 with EtherCAT 数据表

pdf • 672,2 KB • Chinese • Datasheets

Edge® CDG025D2 with EtherCAT 데이터시트

pdf • 579,2 KB • Korean • Datasheets

Edge® CDG045D2 Datenblatt

pdf • 463,1 KB • German • Datasheets

Edge® CDG045D2 数据表

pdf • 607,5 KB • Chinese • Datasheets

Dimension Drawings

Edge® CDG025D2 Dimensions

png • 176,1 KB • German, Japanese, Korean, Spanish, Chinese, English • Dimension Drawings

Manuals

带 EtherCAT 的 Edge® CDG025D2 操作手册

pdf • 2,2 MB • Chinese • Operating Manual

SKY® CDG045D-100D, Edge® CDG025D2-100D2, Stripe® CDG045Dhs-200Dhs EtherCAT New Generation Communication Protocol

pdf • 2,1 MB • English • Operating Manual

SKY® CDG045D-100D, Edge® CDG025D2-100D2, Stripe® CDG045Dhs-100Dhs EtherCAT Communication Protocol

pdf • 972,1 KB • English • Operating Manual

SKY® CDG025D-200D RS232C Kommunikationsanleitung

pdf • 188,5 KB • German • Operating Manual

SKY® CDG025D-200D RS232C Communication Protocol

pdf • 187,4 KB • English • Operating Manual

Edge® CDG025D2 with EtherCAT Operating Manual

pdf • 2,1 MB • English • Operating Manual

Edge® CDG025D2 EtherCAT Gebrauchsanleitung

pdf • 2,1 MB • German • Operating Manual

3D Step Files

Edge® CDG025D2 3D 16CF EtherCAT

zip • 262,0 KB • 3D Files

Edge® CDG025D2 3D 16KF EtherCAT

zip • 254,1 KB • 3D Files

Edge® CDG025D2 3D 4-VCR-f

zip • 2,0 MB • 3D Files

Edge® CDG025D2 3D 4-VCR-m

zip • 1,9 MB • 3D Files

Edge® CDG025D2 3D 8VCR EtherCAT

zip • 265,3 KB • 3D Files

Edge® CDG025D2 3D Tube EtherCAT

zip • 252,0 KB • 3D Files

Others

SKY® CDG045D EtherCAT ESI

xml • 1,3 MB • English

SKY® CDG045D, Edge®, EtherCAT New Generation ESI V2

zip • 10,5 KB • Japanese, English

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Advantages

Typical applications

Specifications

Order Information

Part Number

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