Capacitance Manometers
Edge® CDG025D2
Full scale 0.1 … 1000 Torr / mbar
Drop-in Options
Revolutionize your vacuum gauge experience with us!
INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.
Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.
Advantages
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
- Etch, PVD and other semiconductor production processes
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Specifications
1000 Torr, 1100 mbar
500 ... 10 Torr / mbar
1 Torr / mbar
0.25 Torr / mbar
0.1 Torr / mbar
| Accuracy | % of reading | 0.2 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 30 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
| Accuracy | % of reading | 0.2 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 30 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
| Accuracy | % of reading | 0.2 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 30 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
| Accuracy | % of reading | 0.25 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 130 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
| Accuracy | % of reading | 0.5 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 130 (30 for pressure control type only) |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
Part Number
Downloads
Choose language
Brochures
Datasheets
Edge® CDG025D2 Datasheet
pdf
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125,2 KB
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English
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Datasheets
Edge® CDG025D2 EtherCAT データシート
pdf
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682,3 KB
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Japanese
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Datasheets
Edge® CDG025D2 mit EtherCAT Datenblatt
pdf
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540,3 KB
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German
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Datasheets
Edge® CDG025D2 with EtherCAT Ficha de datos
pdf
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580,1 KB
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Spanish
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Datasheets
Edge® CDG025D2 with EtherCAT 数据表
pdf
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672,2 KB
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Chinese
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Datasheets
Edge® CDG025D2 with EtherCAT 데이터시트
pdf
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579,2 KB
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Korean
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Datasheets
Edge® CDG045D2 Datenblatt
pdf
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463,1 KB
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German
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Datasheets
Edge® CDG045D2 数据表
pdf
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607,5 KB
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Chinese
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Datasheets
Dimension Drawings
Manuals
带 EtherCAT 的 Edge® CDG025D2 操作手册
pdf
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2,2 MB
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Chinese
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Operating Manual
SKY® CDG045D-100D, Edge® CDG025D2-100D2, Stripe® CDG045Dhs-200Dhs EtherCAT New Generation Communication Protocol
pdf
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2,1 MB
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English
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Operating Manual
SKY® CDG045D-100D, Edge® CDG025D2-100D2, Stripe® CDG045Dhs-100Dhs EtherCAT Communication Protocol
pdf
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972,1 KB
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English
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Operating Manual
SKY® CDG025D-200D RS232C Kommunikationsanleitung
pdf
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188,5 KB
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German
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Operating Manual
SKY® CDG025D-200D RS232C Communication Protocol
pdf
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187,4 KB
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English
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Operating Manual
Edge® CDG025D2 with EtherCAT Operating Manual
pdf
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2,1 MB
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English
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Operating Manual
Edge® CDG025D2 EtherCAT Gebrauchsanleitung
pdf
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2,1 MB
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German
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Operating Manual
3D Step Files
Edge® CDG025D2 3D 16CF EtherCAT
zip
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262,0 KB
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3D Files
Edge® CDG025D2 3D 16KF EtherCAT
zip
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254,1 KB
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3D Files
Edge® CDG025D2 3D 4-VCR-f
zip
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2,0 MB
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3D Files
Edge® CDG025D2 3D 4-VCR-m
zip
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1,9 MB
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3D Files
Edge® CDG025D2 3D 8VCR EtherCAT
zip
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265,3 KB
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3D Files
Edge® CDG025D2 3D Tube EtherCAT
zip
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252,0 KB
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3D Files
The product is used in the following markets
