Capacitance Manometers
Edge® CDG025D2
Full scale 0.1 … 1000 Torr / mbar

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.
Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.
Advantages
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
- Etch, PVD and other semiconductor production processes
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Specifications
1000 Torr, 1100 mbar
500 ... 10 Torr / mbar
1 Torr / mbar
0.25 Torr / mbar
0.1 Torr / mbar
Accuracy | % of reading | 0.2 |
Resolution | percent FS | 0.003 |
Output signal (analog) | V (dc) | 0 … +10 |
Response time | ms | 30 |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
Accuracy | % of reading | 0.2 |
Resolution | percent FS | 0.003 |
Output signal (analog) | V (dc) | 0 … +10 |
Response time | ms | 30 |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
Accuracy | % of reading | 0.2 |
Resolution | percent FS | 0.003 |
Output signal (analog) | V (dc) | 0 … +10 |
Response time | ms | 30 |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
Accuracy | % of reading | 0.25 |
Resolution | percent FS | 0.003 |
Output signal (analog) | V (dc) | 0 … +10 |
Response time | ms | 130 |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
Accuracy | % of reading | 0.5 |
Resolution | percent FS | 0.003 |
Output signal (analog) | V (dc) | 0 … +10 |
Response time | ms | 130 (30 for pressure control type only) |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
Part Number

Downloads
Datasheets
Edge™ CDG045D2 1 … 1000Torr / mbar DE
pdf
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463,1 KB
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German
Edge™ CDG025D2 mit EtherCAT 0.1 … 1000Torr / mbar DE
pdf
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540,3 KB
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German
Edge™ CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar ES
pdf
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580,1 KB
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Spanish
Edge™ CDG025D2 EtherCAT 付き 0.1 … 1000Torr / mbar JA
pdf
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682,3 KB
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Japanese
Edge CDG025D2 with EtherCAT 0.1 … 1000Torr/mbar KO
pdf
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579,2 KB
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Korean
Edge CDG045D2 1 … 1000 托 / 毫巴 ZH
pdf
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607,5 KB
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Chinese
Edge CDG025D2 with EtherCAT 0.1 … 1000 托 / 毫巴 ZH
pdf
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672,2 KB
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Chinese
Edge® CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar
pdf
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1,0 MB
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English
Dimension Drawings
Manuals
Manual Edge CDG025D2 with EtherCAT
pdf
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913,3 KB
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English
Gebruachsanleitung Edge CDG025D2 EtherCAT
pdf
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929,0 KB
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German
Communication protocol EtherCAT new generation
pdf
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2,1 MB
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English
Communication protocol EtherCAT
pdf
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972,1 KB
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English
CDGxxxD Kommunikationsanleitung RS232C
pdf
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188,5 KB
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German
CDGxxxD Communication manual RS232C
pdf
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187,4 KB
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English
3D Step Files
The product is used in the following markets