Capacitance Manometers

Edge® CDG025D2

Full scale 0.1 … 1000 Torr / mbar

INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.

Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

Advantages

Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Corrosion resistant ceramic sensor
Excellent long term signal stability
Temperature compensated
Sensor protected from contamination
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, PVD and other semiconductor production processes
Data storage and display manufacturing equipment
Industrial vacuum equipment
General high accuracy pressure measurement

Specifications

1000 Torr, 1100 mbar

500 ... 10 Torr / mbar

1 Torr / mbar

0.25 Torr / mbar

0.1 Torr / mbar

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.25

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.5

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130 (30 for pressure control type only)

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Download full specifications

Part Number

Downloads

Brochures

Edge Brochure

pdf • 2,1 MB • English

Datasheets

Edge™ CDG045D2 1 … 1000Torr / mbar DE

pdf • 463,1 KB • German

Edge™ CDG025D2 mit EtherCAT 0.1 … 1000Torr / mbar DE

pdf • 540,3 KB • German

Edge™ CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar ES

pdf • 580,1 KB • Spanish

Edge™ CDG025D2 EtherCAT 付き 0.1 … 1000Torr / mbar JA

pdf • 682,3 KB • Japanese

Edge CDG025D2 with EtherCAT 0.1 … 1000Torr/mbar KO

pdf • 579,2 KB • Korean

Edge CDG045D2 1 … 1000 托 / 毫巴 ZH

pdf • 607,5 KB • Chinese

Edge CDG025D2 with EtherCAT 0.1 … 1000 托 / 毫巴 ZH

pdf • 672,2 KB • Chinese

Edge® CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar

pdf • 1,0 MB • English

Dimension Drawings

CDG025D2 dimension drawing

png • 176,1 KB • German, Japanese, Korean, Spanish, Chinese, English

Manuals

Manual Edge CDG025D2 with EtherCAT

pdf • 913,3 KB • English

Gebruachsanleitung Edge CDG025D2 EtherCAT

pdf • 929,0 KB • German

Communication protocol EtherCAT new generation

pdf • 2,1 MB • English

Communication protocol EtherCAT

pdf • 972,1 KB • English

CDGxxxD Kommunikationsanleitung RS232C

pdf • 188,5 KB • German

CDGxxxD Communication manual RS232C

pdf • 187,4 KB • English

3D Step Files

Edge CDGxxxD2 16CF EtherCAT

stp • 1,5 MB

Edge CDGxxxD2 16KF EtherCAT

stp • 1,4 MB

Edge CDGxxxD2 4-VCR-f

stp • 10,9 MB

Edge CDGxxxD2 4-VCR-m

stp • 11,0 MB

Edge CDGxxxD2 8VCR EtherCAT

stp • 1,5 MB

Edge CDGxxxD2 tube EtherCAT

stp • 1,4 MB

Others

EtherCAT ESI file CDG V1_4_0_0

xml • 1,3 MB • English

EtherCAT new generation ESI file CDG V2_0_0_0

zip • 10,5 KB • Japanese, English

The product is used in the following markets

Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets.

Learn more

Battery

From electrode production to end-of-line testing

Learn more

Display

INFICON supports leading-edge technology and enables the highest quality Display products

Learn more

Energy

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

Learn more

HVAC/R

Refrigeration and air conditioning technology is undoubtedly one of the important topics of the 21st century. Effectiveness of use, energy efficiency, and last but not least optimal temperatures or an optimal climate (in the private as well as commercial sector) play an important role.

Learn more

Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

Learn more

Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

Learn more

Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma

Learn more

Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

Learn more

Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

Learn more

Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

Learn more

Advantages

Typical applications

Specifications

Part Number

Downloads

Related Products