Capacitance Manometers

Edge® CDG025D2

Full scale 0.1 … 1000 Torr / mbar

Edge-CDG025D2-CDG045D2-CDG100D2
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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. 

Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

Advantages

  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

  • Etch, PVD and other semiconductor production processes
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

Specifications

1000 Torr, 1100 mbar
500 ... 10 Torr / mbar
1 Torr / mbar
0.25 Torr / mbar
0.1 Torr / mbar
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy % of reading0.25
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems130
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
Accuracy % of reading0.5
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems130 (30 for pressure control type only)
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
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Part Number

Edge CDG025D2 Ordering information
Edge CDG025D2 Ordering information

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