4. Edge® CDG025D2
Capacitance Manometers

Edge® CDG025D2

Full scale 0.1 … 1000 Torr / mbar

Edge-CDG025D2-CDG045D2-CDG100D2

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. 

Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

Advantages

  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

  • Etch, PVD and other semiconductor production processes
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

Specifications

1000 Torr, 1100 mbar
500 ... 10 Torr / mbar
1 Torr / mbar
0.25 Torr / mbar
0.1 Torr / mbar
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
Accuracy % of reading0.25
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems130
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
Accuracy % of reading0.5
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response timems130 (30 for pressure control type only)
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
Download full specifications

Part Number

Edge CDG025D2 Ordering information

Downloads

Brochures
Edge Brochure
pdf • 2,1 MB • English
Datasheets
Edge™ CDG045D2 1 … 1000Torr / mbar DE
pdf • 463,1 KB • German
Edge™ CDG025D2 mit EtherCAT 0.1 … 1000Torr / mbar DE
pdf • 540,3 KB • German
Edge™ CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar ES
pdf • 580,1 KB • Spanish
Edge™ CDG025D2 EtherCAT 付き 0.1 … 1000Torr / mbar JA
pdf • 682,3 KB • Japanese
Edge CDG025D2 with EtherCAT 0.1 … 1000Torr/mbar KO
pdf • 579,2 KB • Korean
Edge CDG045D2 1 … 1000 托 / 毫巴 ZH
pdf • 607,5 KB • Chinese
Edge CDG025D2 with EtherCAT 0.1 … 1000 托 / 毫巴 ZH
pdf • 672,2 KB • Chinese
Edge™ CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar
pdf • 526,2 KB • English
Dimension Drawings
CDG025D2 dimension drawing
png • 176,1 KB • German, Japanese, Korean, Spanish, Chinese, English
Manuals
Manual Edge CDG025D2 with EtherCAT
pdf • 913,3 KB • English
Gebruachsanleitung Edge CDG025D2 EtherCAT
pdf • 929,0 KB • German
Communication protocol EtherCAT new generation
pdf • 2,1 MB • English
Communication protocol EtherCAT
pdf • 972,1 KB • English
CDGxxxD Kommunikationsanleitung RS232C
pdf • 188,5 KB • German
CDGxxxD Communication manual RS232C
pdf • 187,4 KB • English
3D Step Files
Edge CDGxxxD2 16CF EtherCAT
zip • 547,2 KB • German, Japanese, Korean, Spanish, Chinese, English
Edge CDGxxxD2 16KF EtherCAT
zip • 540,5 KB • German, Japanese, Korean, Spanish, Chinese, English
Edge CDGxxxD2 4-VCR-f
zip • 1,3 MB • German, Japanese, Korean, Spanish, Chinese, English
Edge CDGxxxD2 4-VCR-m
zip • 1,3 MB • German, Japanese, Korean, Spanish, Chinese, English
Edge CDGxxxD2 8VCR EtherCAT
zip • 550,9 KB • German, Japanese, Korean, Spanish, Chinese, English
Edge CDGxxxD2 tube EtherCAT
zip • 538,8 KB • German, Japanese, Korean, Spanish, Chinese, English
Others
EtherCAT ESI file CDG V1_4_0_0
xml • 1,3 MB • English
EtherCAT new generation ESI file CDG V2_0_0_0
zip • 10,5 KB • English
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