Capacitance Manometers

SKY® CDG025D-X3, 4-20mA

Full scale 0.1 … 1000 Torr / mbar

SKY-CDG025D-X3-4-20MA

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. 

Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function. New Version with 2wire current Loop is now available. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. 

The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor double protected from contamination
  • One pushbutton zero function
  • Interface with 2-wire current loop
  • Long cable distance (<300m)
  • Low energy gauge
  • Remote zero included
  • Clean room compliant
  • Status LED

Typical applications

  • Chemical vacuum
  • Energy application
  • Industrial vacuum equipment

Specifications

1000 Torr / 1100 mbar
500 ... 10 Torr / mbar
1 Torr / mbar
0.25 Torr
0.1 Torr / mbar
Accuracy (1)% of reading0.2
Resolutionpercent FS0.003
Output signal (analog)  
Signal rangemA3.8 ... 20.2
Measuring range (zero ...FS)mA4.0 ... 20.0
Relationship current-pressureRelationship current-pressurelinear
Response time (2)ms≤100
Materials exposed to vacuum 

Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))

 

(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 ... 90 percent FS
(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe
Accuracy (1)% of reading0.2
Resolutionpercent FS0.003
Output signal (analog)  
Signal rangemA3.8 ... 20.2
Measuring range (zero ...FS)mA4.0 ... 20.0
Relationship current-pressureRelationship current-pressurelinear
Response time (2)ms≤100
Materials exposed to vacuum 

Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))

 

(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 ... 90 percent FS
(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe
Accuracy (1)% of reading0.2
Resolutionpercent FS0.003
Output signal (analog)  
Signal rangemA3.8 ... 20.2
Measuring range (zero ...FS)mA4.0 ... 20.0
Relationship current-pressureRelationship current-pressurelinear
Response time (2)ms≤100
Materials exposed to vacuum 

Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))

 

(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 ... 90 percent FS
(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe
Accuracy (1)% of reading0.25
Resolutionpercent FS0.003
Output signal (analog)  
Signal rangemA3.8 ... 20.2
Measuring range (zero ...FS)mA4.0 ... 20.0
Relationship current-pressureRelationship current-pressurelinear
Response time (2)ms≤100
Materials exposed to vacuum 

Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))

 

(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 ... 90 percent FS
(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe
Accuracy (1)% of reading0.5
Resolutionpercent FS0.003
Output signal (analog)  
Signal rangemA3.8 ... 20.2
Measuring range (zero ...FS)mA4.0 ... 20.0
Relationship current-pressureRelationship current-pressurelinear
Response time (2)ms≤100
Materials exposed to vacuum 

Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))

 

(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 ... 90 percent FS
(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe
Download full specifications

Part Number

SKY CDG025D-X3, 4-20mA
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