PBR 260
ATM to Ultrahigh Vacuum hot cathode gauge
Revolutionize your vacuum gauge experience with us!
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Gemini™ MxG5xx
The INFICON PBR 260 is a combination gauge that operates as two gauges in one single and compact unit. The leading measuring principle is a hot cathode gauge according to the Bayard-Alpert principle, which will be completed and supported by a Pirani thermal conductivity measuring principle. The PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge measures from UHV range (5×10-10) mbar to atmosphere range (1000 mbar). One of the key benefits PBR 260 is its drop in compatibility with PBR 260 gauges of other manufacturers, thanks to combining technologies, equal analog output signal and electrical interface used. This results in a simpler installation, setup, and process integration. The PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge provides the most economical solution for obtaining affordable and reliable base pressure measurements on the market.
Advantages
- PBR 260 Pirani/Bayard-Alpert hot cathode combination gauge offers general vacuum measurement and control in the low to ultrahigh vacuum range with just one compact measuring device
- Flange size: DN 25 ISO-KF, DN 40 CF-R, DN 40 ISO-KF
- Maximum pressure applies to inert gases and temperatures of less then 55°C
- Highly accurate, excellent repeatability in the process range 10-8 … 10-2 mbar
- Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
- Long-life yttrium oxide coated iridium filament
- RoHS compliance
Drop in compatible to other manufacturers PBR 260 Pirani/Bayard-Alpert hot cathode gauges
- Part number IGG27000 matches PT R27 000
- Part number IGG27001 matches PT R27 001
- Part number IGG27002 matches PT R27 002
Typical applications
- General pressure measurement in semiconductor and analytical process environment
- Optical and other industrial coating processes
Specifications
| Measurement range max. Measurement range min. | mbar mbar | 1000 5·10-10 |
| Bakeout temperature | °C | 150 (removed electronics) |
| Accuracy: 10-8 to 10-2 mbar | % of reading | 15 |
| Repeatability: 10-8 to 10-2 mbar | % of reading | 5 |
| Filament (cathode) | yttrium oxide coated iridium | |
| Materials exposed to vacuum | Cu,W, Glass, NiFe, Mo, St. steel, NiCr | |
| Pressure max. | bar | 2 |
| Part Number | Description |
| IGG27000 | PBR 260 DN 25 ISO-KF |
| IGG27001 | PBR 260 DN 40 ISO-KF |
| IGG27002 | PBR 260 DN 40 CF-R |
| Part Number | Description |
| IN846517-T | Spare sensor head PBR 260, DN 25 ISO-KF |
| IN846518-T | Spare sensor head PBR 260, DN 40 ISO-KF |
| IN846519-T | Spare sensor head PBR 260, DN 40 CF-R |
