4. HPG400
Hot Ionization Gauges

HPG400

ATM to High Vacuum Gauge

HPG400

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere). 

The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

Specifications

Measurement range (air, N2)mbar
Torr		2×10-6 … 1000
1.5×10-6 … 750
   
Accuracy  
10-5 … 1 mbar% of reading±15 (1)
   
Repeatability  
10-5 … 10-1 mbar% of reading2
10-1 … 100 mbar% of reading30
   
Temperature  
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange°C80
Bakeout electronics removed°C150
   
Supply voltageV (dc)
A (dc)		20 … 28
0.8
   
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
   
(1) Accuracy from 10-5 mbar to the selected hot ion emission on value
Download full specifications
Part Number
Accessories
Spare Parts
Part NumberDescription
353-520HPG400 DN 25 ISO-KF
353-521HPG400 LCD, DN 25 ISO-KF
353-522HPG400 DN 40 CF-F
353-523HPG400 LCD, DN 40 CF-F
353-525HPG400-SP PBus, DN 25 ISO-KF
353-526HPG400-SP PBus, DN 40 CF-F
353-527HPG400-SD DNet DN 25 ISO-KF
353-528HPG400-SD DNet DN 40 CF-F
Part NumberDescription
211-113Centering ring with baffle DN 25 KF
353-511Power supply BPG400 24VDC
357-499Baffle HPG (10 pieces)
Part NumberDescription
354-487Spare sensor head HPG400, DN 25 ISO-KF
354-488Spare sensor head HPG400, DN 40 CF-F

Downloads

Brochure
Hot Ion Gauge Brochure
pdf • 1,1 MB • English
Manuals
TIMA31E1_Operating manual_short
pdf • 307,4 KB • English
TIMA32E1_Operating manual for SD_SP_short
pdf • 417,4 KB • English
TINA31E1_Operating manual_long
pdf • 1,1 MB • English
TIRA03E1_Communication Protocol for DeviceNet
pdf • 323,7 KB • English
TIRA36E1_Communication Protocol for ProfiBus
pdf • 404,8 KB • English
3D Step Files
353-520 HPG400 without LCD
zip • 445,3 KB • German, Japanese, Korean, Spanish, Chinese, English
353-521 HPG400 without LCD
zip • 462,0 KB • German, Japanese, Korean, Spanish, Chinese, English
353-522 HPG400 without LCD
zip • 452,1 KB • German, Japanese, Korean, Spanish, Chinese, English
353-523 HPG400 with LCD
zip • 459,2 KB • German, Japanese, Korean, Spanish, Chinese, English
353-525 HPG400-SP with Profibus DP
zip • 467,4 KB • German, Japanese, Korean, Spanish, Chinese, English
353-526 HPG with Profibus DP
zip • 470,4 KB • German, Japanese, Korean, Spanish, Chinese, English
353-527 HPG400-SD with DeviceNet
zip • 461,2 KB • German, Japanese, Korean, Spanish, Chinese, English
353-528 HPG400-SD with DeviceNet
zip • 464,5 KB • German, Japanese, Korean, Spanish, Chinese, English
354-487 HPG Replacment Sensor 25 ISO-KF
zip • 31,1 KB • German, Japanese, Korean, Spanish, Chinese, English
354-488 HPG Replacment Sensor 25 ISO-KF
zip • 45,4 KB • German, Japanese, Korean, Spanish, Chinese, English
Others
HPG400_06A8_DPV1.GSD
GSD • 3,6 KB • English
HPG400-float.eds
eds • 33,6 KB • English
HPG400-int.eds
eds • 33,5 KB • English
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