Hot Ionization Gauges

HPG400

ATM to High Vacuum Gauge

The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10^-6 mbar to atmosphere (1.5×10^-6 Torr to atmosphere).

The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

Advantages

HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
User selectable hot ion emission activation between 5×10^-2 and 1 mbar
Pirani interlock protects the hot filament from premature burnout
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
RoHS compliance

Typical applications

Sputter applications in semiconductor manufacturing, electronics and media industry
Industrial coating
General vacuum measurement and control in the low to high vacuum range

Specifications

Measurement range (air, N₂)	mbar Torr	2×10^-6 … 1000 1.5×10^-6 … 750

Accuracy

10^-5 … 1 mbar	% of reading	±15 ⁽¹⁾

Repeatability

10^-5 … 10^-1 mbar	% of reading	2
10^-1 … 100 mbar	% of reading	30

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange	°C	80
Bakeout electronics removed	°C	150

Supply voltage	V (dc) A (dc)	20 … 28 0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

(1) Accuracy from 10^-5 mbar to the selected hot ion emission on value

Download full specifications

Part Number

Accessories

Spare Parts

Part Number	Description
353-520	HPG400 DN 25 ISO-KF
353-521	HPG400 LCD, DN 25 ISO-KF
353-522	HPG400 DN 40 CF-F
353-523	HPG400 LCD, DN 40 CF-F
353-525	HPG400-SP PBus, DN 25 ISO-KF
353-526	HPG400-SP PBus, DN 40 CF-F
353-527	HPG400-SD DNet DN 25 ISO-KF
353-528	HPG400-SD DNet DN 40 CF-F

Part Number	Description
211-113	Centering ring with baffle DN 25 KF
353-511	Power supply BPG400 24VDC
357-499	Baffle HPG (10 pieces)

Part Number	Description
354-487	Spare sensor head HPG400, DN 25 ISO-KF
354-488	Spare sensor head HPG400, DN 40 CF-F

Downloads

Brochure

Hot Ion Gauge Brochure

pdf • 1,1 MB • English

Manuals

TIMA31E1_Operating manual_short

pdf • 307,4 KB • English

TIMA32E1_Operating manual for SD_SP_short

pdf • 417,4 KB • English

TINA31E1_Operating manual_long

pdf • 1,1 MB • English

TIRA03E1_Communication Protocol for DeviceNet

pdf • 323,7 KB • English

TIRA36E1_Communication Protocol for ProfiBus

pdf • 404,8 KB • English

3D Step Files

353-520 HPG400 without LCD

zip • 445,3 KB • German, Japanese, Korean, Spanish, Chinese, English

353-521 HPG400 without LCD

zip • 462,0 KB • German, Japanese, Korean, Spanish, Chinese, English

353-522 HPG400 without LCD

zip • 452,1 KB • German, Japanese, Korean, Spanish, Chinese, English

353-523 HPG400 with LCD

zip • 459,2 KB • German, Japanese, Korean, Spanish, Chinese, English

353-525 HPG400-SP with Profibus DP

zip • 467,4 KB • German, Japanese, Korean, Spanish, Chinese, English

353-526 HPG with Profibus DP

zip • 470,4 KB • German, Japanese, Korean, Spanish, Chinese, English

353-527 HPG400-SD with DeviceNet

zip • 461,2 KB • German, Japanese, Korean, Spanish, Chinese, English

353-528 HPG400-SD with DeviceNet

zip • 464,5 KB • German, Japanese, Korean, Spanish, Chinese, English

354-487 HPG Replacment Sensor 25 ISO-KF

zip • 31,1 KB • German, Japanese, Korean, Spanish, Chinese, English

354-488 HPG Replacment Sensor 25 ISO-KF

zip • 45,4 KB • German, Japanese, Korean, Spanish, Chinese, English

Others

HPG400_06A8_DPV1.GSD

GSD • 3,6 KB • English

HPG400-float.eds

eds • 33,6 KB • English

HPG400-int.eds

eds • 33,5 KB • English

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Display

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Energy

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Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

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Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

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Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma

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Research & Academia

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Semiconductor IDM & Foundry

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Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

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Advantages

Typical applications

Specifications

Downloads

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