Hot Ionization Gauges
HPG400
ATM to High Vacuum Gauge
Drop-in Options
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere).
The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.
Advantages
- HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
- The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
- User selectable hot ion emission activation between 5×10-2 and 1 mbar
- Pirani interlock protects the hot filament from premature burnout
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
Typical applications
- Sputter applications in semiconductor manufacturing, electronics and media industry
- Industrial coating
- General vacuum measurement and control in the low to high vacuum range
Specifications
| Measurement range (air, N2) | mbar Torr | 2×10-6 … 1000 1.5×10-6 … 750 |
| Accuracy | ||
| 10-5 … 1 mbar | % of reading | ±15 (1) |
| Repeatability | ||
| 10-5 … 10-1 mbar | % of reading | 2 |
| 10-1 … 100 mbar | % of reading | 30 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange | °C | 80 |
| Bakeout electronics removed | °C | 150 |
| Supply voltage | V (dc) A (dc) | 20 … 28 0.8 |
| Materials exposed to vacuum | Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass | |
| (1) Accuracy from 10-5 mbar to the selected hot ion emission on value | ||
Part Number
Accessories
Spare Parts
| Part Number | Description |
| 353-520 | HPG400 DN 25 ISO-KF |
| 353-521 | HPG400 LCD, DN 25 ISO-KF |
| 353-522 | HPG400 DN 40 CF-F |
| 353-523 | HPG400 LCD, DN 40 CF-F |
| 353-525 | HPG400-SP PBus, DN 25 ISO-KF |
| 353-526 | HPG400-SP PBus, DN 40 CF-F |
| 353-527 | HPG400-SD DNet DN 25 ISO-KF |
| 353-528 | HPG400-SD DNet DN 40 CF-F |
| Part Number | Description |
| 211-113 | Centering ring with baffle DN 25 KF |
| 353-511 | Power supply BPG400 24VDC |
| 357-499 | Baffle HPG (10 pieces) |
| Part Number | Description |
| 354-487 | Spare sensor head HPG400, DN 25 ISO-KF |
| 354-488 | Spare sensor head HPG400, DN 40 CF-F |
Downloads
Manuals
TIMA31E1_Operating manual_short
pdf
•
307,4 KB
•
English
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Operating Manual
TIMA32E1_Operating manual for SD_SP_short
pdf
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417,4 KB
•
English
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Operating Manual
TINA31E1_Operating manual_long
pdf
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1,1 MB
•
English
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Operating Manual
TIRA03E1_Communication Protocol for DeviceNet
pdf
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323,7 KB
•
English
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Operating Manual
TIRA36E1_Communication Protocol for ProfiBus
pdf
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404,8 KB
•
English
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Operating Manual
3D Step Files
353-520 HPG400 without LCD
zip
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445,3 KB
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3D Files
353-521 HPG400 without LCD
zip
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462,0 KB
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3D Files
353-522 HPG400 without LCD
zip
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452,1 KB
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3D Files
353-523 HPG400 with LCD
zip
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459,2 KB
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3D Files
353-525 HPG400-SP with PROFIBUS DP
zip
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467,4 KB
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3D Files
353-526 HPG with PROFIBUS DP
zip
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470,4 KB
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3D Files
353-527 HPG400-SD with DeviceNet
zip
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461,2 KB
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3D Files
353-528 HPG400-SD with DeviceNet
zip
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464,5 KB
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3D Files
354-487 HPG Replacment Sensor 25 ISO-KF
zip
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31,1 KB
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3D Files
354-488 HPG Replacment Sensor 25 ISO-KF
zip
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45,4 KB
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3D Files
The product is used in the following markets
