Hot Ionization Gauges
BPG400
ATM to Ultra High Vacuum Gauge

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Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere).
Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.
Advantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Specifications
Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 1000 3.8×10-10 … 750 |
Accuracy | ||
10-8 … 10-2 mbar | % of reading | ±15 |
Repeatability | ||
10-8 … 10-2 mbar | % of reading | 5 |
Temperature | ||
Operation (ambient) | °C | 0 … +50 |
Storage | °C | -20 … +70 |
Bakeout at flange with extension | °C | 150 |
Bakeout at flange without extension | °C | 80 |
Bakeout electronics removed | °C | 150 |
Supply voltage | V (dc) A (dc) | +20 … +28 0.8 |
Materials exposed to vacuum | Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
Part Number
Accessories
Spare Parts
Part Number | Description |
353-500 | BPG400 DN 25 ISO-KF |
353-501 | BPG400 LCD, DN 25 ISO-KF |
353-502 | BPG400 DN 40 CF-R |
353-503 | BPG400 LCD, DN 40 CF-R |
353-505 | BPG400-SP PBus, DN 25 ISO-KF |
353-506 | BPG400-SP PBus, DN 40 CF-R |
353-507 | BPG400-SD DNet, DN 25 ISO-KF |
353-508 | BPG400-SD DNet, DN 40 CF-R |
Part Number | Description |
353-511 | Power supply BPG400 24VDC |
353-510 | 100 mm sensor extension tube |
353-512 | Baffle for BPG400 |
211-113 | Centering ring with baffle DN 25 KF |
Part Number | Description |
354-490 | Spare sensor head BPG400, DN 25 ISO-KF |
354-491 | Spare sensor head BPG400, DN 40 CF-R |
354-498 | Spare electronic BPG400 without Display |
354-499 | Spare electronic BPG400 with Display |
Downloads
Manuals
TIMA03D1 BPG400xx Gebrauchsanleitung kurz
pdf
•
319,1 KB
•
German
TINA03D1 BPG400-xx Gebrauchsanleitung_lang.Web
pdf
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1,1 MB
•
German
TIMA03D1 BPG400xx Gebrauchsanleitung kurz
pdf
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319,1 KB
•
English
TIMA03E1 BPG400xx Operating manual short
pdf
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314,5 KB
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English
TIMA36E1_BPG400xx operating manual-supplement
pdf
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326,7 KB
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English
TINA03E1_BPG400-xx operating manual_long
pdf
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1,1 MB
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English
TIRA03E1 DeviceNet BPG400x Communication Protocol
pdf
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319,3 KB
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English
TIRA36E1 Profibus BPG400x Communication Protocol
pdf
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399,9 KB
•
English
3D Step Files
352-501 BPG400 with LCD, DN 25 ISO-KF
zip
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456,8 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-500 BPG400 without LCD, DN 25 ISO-KF
zip
•
449,5 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-502 BPG400 without LCD, DN 40 CF-R
zip
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427,5 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-503 BPG400 with LCD, DN 40 CF-R
zip
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468,1 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-505 BPG400-SP with Profibus DP, DN 25 ISO-KF
zip
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468,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
353-506 BPG400-SP with Profibus DP, DN 40 CF-R
zip
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468,2 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-507 BPG400-SD with DeviceNet™, DN 25 ISO-KF
zip
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457,3 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-508 BPG400-SD with DeviceNet™, DN 40 CF-R
zip
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462,3 KB
•
German, Japanese, Korean, Spanish, Chinese, English
354-490 BPG400 Replacement sensor DN 25 ISO-KF
zip
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48,5 KB
•
German, Japanese, Korean, Spanish, Chinese, English
354-491 BPG400 Replacement sensor DN 40 CF-R
zip
•
69,2 KB
•
German, Japanese, Korean, Spanish, Chinese, English
The product is used in the following markets