4. BPG400
Hot Ionization Gauges

BPG400

ATM to Ultra High Vacuum Gauge

BCG400

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). 

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.

Advantages

  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr		5×10-10 … 1000
3.8×10-10 … 750
   
Accuracy  
10-8 … 10-2 mbar% of reading±15
   
Repeatability  
10-8 … 10-2 mbar% of reading5
   
Temperature  
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange with extension°C150
Bakeout at flange without extension°C80
Bakeout electronics removed°C150
   
Supply voltageV (dc)
A (dc)		+20 … +28
0.8
   
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Download full specifications
Part Number
Accessories
Spare Parts
Part NumberDescription
353-500BPG400 DN 25 ISO-KF
353-501BPG400 LCD, DN 25 ISO-KF
353-502BPG400 DN 40 CF-R
353-503BPG400 LCD, DN 40 CF-R
353-505BPG400-SP PBus, DN 25 ISO-KF
353-506BPG400-SP PBus, DN 40 CF-R
353-507BPG400-SD DNet, DN 25 ISO-KF
353-508BPG400-SD DNet, DN 40 CF-R
Part NumberDescription
353-511Power supply BPG400 24VDC
353-510100 mm sensor extension tube
353-512Baffle for BPG400
211-113Centering ring with baffle DN 25 KF
Part NumberDescription
354-490Spare sensor head BPG400, DN 25 ISO-KF
354-491Spare sensor head BPG400, DN 40 CF-R
354-498Spare electronic BPG400 without Display
354-499Spare electronic BPG400 with Display

Downloads

Brochure
Hot Ion Gauge Brochure
pdf • 1,1 MB • English
Manuals
TIMA03D1 BPG400xx Gebrauchsanleitung kurz
pdf • 319,1 KB • German
TINA03D1 BPG400-xx Gebrauchsanleitung_lang.Web
pdf • 1,1 MB • German
TIMA03D1 BPG400xx Gebrauchsanleitung kurz
pdf • 319,1 KB • English
TIMA03E1 BPG400xx Operating manual short
pdf • 314,5 KB • English
TIMA36E1_BPG400xx operating manual-supplement
pdf • 326,7 KB • English
TINA03E1_BPG400-xx operating manual_long
pdf • 1,1 MB • English
TIRA03E1 DeviceNet BPG400x Communication Protocol
pdf • 319,3 KB • English
TIRA36E1 Profibus BPG400x Communication Protocol
pdf • 399,9 KB • English
3D Step Files
352-501 BPG400 with LCD, DN 25 ISO-KF
zip • 456,8 KB • German, Japanese, Korean, Spanish, Chinese, English
353-500 BPG400 without LCD, DN 25 ISO-KF
zip • 449,5 KB • German, Japanese, Korean, Spanish, Chinese, English
353-502 BPG400 without LCD, DN 40 CF-R
zip • 427,5 KB • German, Japanese, Korean, Spanish, Chinese, English
353-503 BPG400 with LCD, DN 40 CF-R
zip • 468,1 KB • German, Japanese, Korean, Spanish, Chinese, English
353-505 BPG400-SP with Profibus DP, DN 25 ISO-KF
zip • 468,2 KB • German, Japanese, Korean, Spanish, Chinese, English
353-506 BPG400-SP with Profibus DP, DN 40 CF-R
zip • 468,2 KB • German, Japanese, Korean, Spanish, Chinese, English
353-507 BPG400-SD with DeviceNet™, DN 25 ISO-KF
zip • 457,3 KB • German, Japanese, Korean, Spanish, Chinese, English
353-508 BPG400-SD with DeviceNet™, DN 40 CF-R
zip • 462,3 KB • German, Japanese, Korean, Spanish, Chinese, English
354-490 BPG400 Replacement sensor DN 25 ISO-KF
zip • 48,5 KB • German, Japanese, Korean, Spanish, Chinese, English
354-491 BPG400 Replacement sensor DN 40 CF-R
zip • 69,2 KB • German, Japanese, Korean, Spanish, Chinese, English
Others
BPG400_06A9.GSD
GSD • 2,5 KB • English
BPG400-float.eds
eds • 35,1 KB • English
BPG400-int.eds
eds • 31,4 KB • English
Inficon_400_SP_STEP7.zip
zip • 856,6 KB • English
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