BPG400

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere).

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.

Advantages

Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere)
Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
Long-life yttrium oxide coated iridium filament
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
RoHS compliance
General vacuum measurement and control in the low to ultra high vacuum range

Typical applications

Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	mbar Torr	5×10^-10 … 1000 3.8×10^-10 … 750

Accuracy

10^-8 … 10^-2 mbar	% of reading	±15

Repeatability

10^-8 … 10^-2 mbar	% of reading	5

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange with extension	°C	150
Bakeout at flange without extension	°C	80
Bakeout electronics removed	°C	150

Supply voltage	V (dc) A (dc)	+20 … +28 0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

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Part Number

Accessories

Spare Parts

Part Number	Description
353-500	BPG400 DN 25 ISO-KF
353-501	BPG400 LCD, DN 25 ISO-KF
353-502	BPG400 DN 40 CF-R
353-503	BPG400 LCD, DN 40 CF-R
353-505	BPG400-SP PBus, DN 25 ISO-KF
353-506	BPG400-SP PBus, DN 40 CF-R
353-507	BPG400-SD DNet, DN 25 ISO-KF
353-508	BPG400-SD DNet, DN 40 CF-R

Part Number	Description
353-511	Power supply BPG400 24VDC
353-510	100 mm sensor extension tube
353-512	Baffle for BPG400
211-113	Centering ring with baffle DN 25 KF

Part Number	Description
354-490	Spare sensor head BPG400, DN 25 ISO-KF
354-491	Spare sensor head BPG400, DN 40 CF-R

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Advantages

Typical applications

Specifications

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