Hot Ionization Gauges

BPG402-Sx

ATM to Ultra High Vacuum Gauge

Prices & Availability

Drop-in Options

Revolutionize your vacuum gauge experience with us!

More Flexibility. Better Stability.

Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable) and more.

Upgrade now

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere).

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.

Also available with the EtherCAT digital interface!

Advantages

Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10Torr to atmosphere)
Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
Pirani interlock protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
RoHS compliance

Typical applications

Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	mbar Torr	5×10^-10 … 1000 3.8×10^-10 … 750

Accuracy

10^-8 … 10^-2 mbar	% of reading	±15

Repeatability

10^-8 … 10^-2 mbar	% of reading	5

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange without electronics BPG402-S	°C	80
Bakeout at flange without electronics BPG402-SL	°C	150

Supply voltage	V (dc) A (dc)	+20 … +28 ≤0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

Download full specifications

Order Information

Product

Spare parts

Accessories

Downloads

Choose language

Brochures

Hot Ion Gauge Brochure

pdf • 2,5 MB • English • Brochures

Vacuum Instrumentation with EtherCAT Brochure

pdf • 3,3 MB • English • Brochures

Datasheet

BPG402-S Datasheet

pdf • 184,6 KB • English • Datasheets

BPG402-S Datenblatt

pdf • 363,5 KB • German • Datasheets

BPG402-S Ficha de datos

pdf • 360,7 KB • Spanish • Datasheets

BPG402-S データシート

pdf • 447,3 KB • Japanese • Datasheets

BPG402-S 数据表

pdf • 439,9 KB • Chinese • Datasheets

BPG402-S 데이터시트

pdf • 355,4 KB • Korean • Datasheets

Manuals

BPG402 DeviceNET Communication Protocol

pdf • 240,3 KB • English • Operating Manual

BPG402 EtherCAT Comunication Protocol

pdf • 318,2 KB • English • Operating Manual

BPG402 EtherCAT New Generation Communication Protocol

pdf • 671,5 KB • English • Operating Manual

BPG402 Gebrauchsanleitung

pdf • 1,3 MB • German • Operating Manual

BPG402 Gebrauchsanleitung (Kurzanleitung)

pdf • 388,1 KB • German • Operating Manual

BPG402 Gebrauchsanleitung, Feldbus Version (Kurzanleitung)

pdf • 372,9 KB • German • Operating Manual

BPG402 Operating Manual

pdf • 1,3 MB • English • Operating Manual

BPG402 Operating Manual (short version)

pdf • 392,1 KB • English • Operating Manual

BPG402 Operating Manual, Fieldbus Version (short version)

pdf • 375,1 KB • English • Operating Manual

BPG402 ProfiBUS Communication Protocol

pdf • 337,9 KB • English • Operating Manual

3D Step Files

BPG402-S 3D DN40 CF-R

zip • 428,2 KB • 3D Files

BPG402-S 3D LCD DN25 ISO-KF

zip • 421,5 KB • 3D Files

BPG402-S 3D LCD DN40 CF-R

zip • 430,8 KB • 3D Files

BPG402-S D3 DN25 ISO-KF

zip • 530,1 KB • 3D Files

BPG402-SD 3D DNET DN25 ISO-KF

zip • 424,5 KB • 3D Files

BPG402-SD 3D DNET DN40 CF-R

zip • 433,8 KB • 3D Files

BPG402-SE 3D EtherCAT 25 ISO-KF

zip • 197,6 KB • 3D Files

BPG402-SE 3D EtherCAT 40 CF-R

zip • 196,8 KB • 3D Files

BPG402-SL 3D Long-Tube DN40 CF-R

zip • 391,4 KB • 3D Files

BPG402-SP 3D PROFIBUS DN25 ISO-KF

zip • 431,8 KB • 3D Files

BPG402-SP 3D PROFIBUS DN40 CF-R

zip • 442,2 KB • 3D Files

Others

BGP402-float.eds

eds • 42,8 KB • English

BPG402 09AA GSD

GSD • 3,0 KB • English

BPG402 EtherCAT ESI V1.3

zip • 66,5 KB • English

BPG402 EtherCAT New Generation ESI V2

xml • 171,8 KB • English

BPG402 int EDS

eds • 42,8 KB • English

Inficon_402_SP_STEP7

zip • 847,3 KB • English

The product is used in the following markets

Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets.

Learn more

Battery

From electrode production to end-of-line testing

Learn more

Display

INFICON supports leading-edge technology and enables the highest quality Display products

Learn more

Energy

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

Learn more

Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

Learn more

Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

Learn more

Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma

Learn more

Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

Learn more

Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

Learn more

Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

Learn more

More Flexibility. Better Stability.

Advantages

Typical applications

Specifications

Order Information

Downloads

Related Products

Login

Reset password