BPG402-Sx

More Flexibility. Better Stability.

Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable) and more.

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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere).

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.

Also available with the EtherCAT digital interface!

Advantages

Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10Torr to atmosphere)
Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
Pirani interlock protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
RoHS compliance

Typical applications

Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	mbar Torr	5×10^-10 … 1000 3.8×10^-10 … 750

Accuracy

10^-8 … 10^-2 mbar	% of reading	±15

Repeatability

10^-8 … 10^-2 mbar	% of reading	5

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange without electronics BPG402-S	°C	80
Bakeout at flange without electronics BPG402-SL	°C	150

Supply voltage	V (dc) A (dc)	+20 … +28 ≤0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

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Part Number

Accessories

Spare Parts

Part Number	Description
353-570	BPG402-S DN 25 ISO-KF
353-571	BPG402-S DN 40 CF-R
353-572	BPG402-S LCD, DN 25 ISO-KF
353-573	BPG402-S LCD, DN 40 CF-R
353-578	BPG402-SL long tube DN 40 CF-R
353-574	BPG402-SP PBus, DN 25 ISO-KF
353-575	BPG402-SP PBus, DN 40 CF-R
353-576	BPG402-SD DNet, DN 25 ISO-KF
353-577	BPG402-SD DNet, DN 40 CF-R
353-590	BPG402-SE ECAT, DN 25 ISO-KF
353-591	BPG402-SE ECAT, DN 40 CF-R
353-596	BPG402-SE ECAT, DN 25 ISO-KF
353-597	BPG402-SE ECAT, DN 40 CF-R