Hot Ionization Gauges

BPG402-Sx

ATM to Ultra High Vacuum Gauge

Pirani-BAG402-BPG400-BPG402
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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). 

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.

Also available with the EtherCAT digital interface!

Advantages

  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Pirani interlock protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr
5×10-10 … 1000
3.8×10-10 … 750
   
Accuracy  
10-8 … 10-2 mbar% of reading±15
   
Repeatability  
10-8 … 10-2 mbar% of reading5
   
Temperature  
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange without electronics BPG402-S°C80
Bakeout at flange without electronics BPG402-SL°C150
   
Supply voltageV (dc)
A (dc)
+20 … +28
≤0.8
   
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Download full specifications
Part Number
Accessories
Spare Parts
Part NumberDescription
353-570BPG402-S DN 25 ISO-KF
353-571BPG402-S DN 40 CF-R
353-572BPG402-S LCD, DN 25 ISO-KF
353-573BPG402-S LCD, DN 40 CF-R
353-578BPG402-SL long tube DN 40 CF-R
353-574BPG402-SP PBus, DN 25 ISO-KF
353-575BPG402-SP PBus, DN 40 CF-R
353-576BPG402-SD DNet, DN 25 ISO-KF
353-577BPG402-SD DNet, DN 40 CF-R
353-590BPG402-SE ECAT, DN 25 ISO-KF
353-591BPG402-SE ECAT, DN 40 CF-R
353-596BPG402-SE ECAT, DN 25 ISO-KF
353-597BPG402-SE ECAT, DN 40 CF-R
Part NumberDescription
353-511Power supply BPG400 24VDC
353-512Baffle for BPG400
211-113Centering ring with baffle DN 25 KF
Part NumberDescription
354-494Spare sensor head BPG402 DN 25 ISO-KF
354-495Spare sensor head BPG402 DN 40 CF-R

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