Hot Ionization Gauges
BPG402-Sx
ATM to Ultra High Vacuum Gauge
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Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable) and more.
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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere).
Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.
Also available with the EtherCAT digital interface!
Advantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Specifications
Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 1000 3.8×10-10 … 750 |
Accuracy | ||
10-8 … 10-2 mbar | % of reading | ±15 |
Repeatability | ||
10-8 … 10-2 mbar | % of reading | 5 |
Temperature | ||
Operation (ambient) | °C | 0 … +50 |
Storage | °C | -20 … +70 |
Bakeout at flange without electronics BPG402-S | °C | 80 |
Bakeout at flange without electronics BPG402-SL | °C | 150 |
Supply voltage | V (dc) A (dc) | +20 … +28 ≤0.8 |
Materials exposed to vacuum | Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
Part Number
Accessories
Spare Parts
Part Number | Description |
353-570 | BPG402-S DN 25 ISO-KF |
353-571 | BPG402-S DN 40 CF-R |
353-572 | BPG402-S LCD, DN 25 ISO-KF |
353-573 | BPG402-S LCD, DN 40 CF-R |
353-578 | BPG402-SL long tube DN 40 CF-R |
353-574 | BPG402-SP PBus, DN 25 ISO-KF |
353-575 | BPG402-SP PBus, DN 40 CF-R |
353-576 | BPG402-SD DNet, DN 25 ISO-KF |
353-577 | BPG402-SD DNet, DN 40 CF-R |
353-590 | BPG402-SE ECAT, DN 25 ISO-KF |
353-591 | BPG402-SE ECAT, DN 40 CF-R |
353-596 | BPG402-SE ECAT, DN 25 ISO-KF |
353-597 | BPG402-SE ECAT, DN 40 CF-R |
Part Number | Description |
353-511 | Power supply BPG400 24VDC |
353-512 | Baffle for BPG400 |
211-113 | Centering ring with baffle DN 25 KF |
Part Number | Description |
354-494 | Spare sensor head BPG402 DN 25 ISO-KF |
354-495 | Spare sensor head BPG402 DN 40 CF-R |
Downloads
Brochures
Manuals
TIMA46D1_BPG402 Gebrauchsanleitung_kurz
pdf
•
388,1 KB
•
German
•
Operating Manual
TIMA47D1_BPG402 Gebrauchsanleitung (Feldbus Versionen)_kurz
pdf
•
372,9 KB
•
German
•
Operating Manual
TINA46D1_BPG402 (alle Versionen) Gebrauchsanleitung_lang
pdf
•
1,3 MB
•
German
•
Operating Manual
TIMA46E1_BPG402 Operating manual_short.pdf
pdf
•
392,1 KB
•
English
•
Operating Manual
TIMA47E1_BPG402 Operating manual (Fieldbus Versions)_short
pdf
•
375,1 KB
•
English
•
Operating Manual
TINA46E1_BPG402 (all versions) Operating manual_long
pdf
•
1,3 MB
•
English
•
Operating Manual
TIRA46E1_BPG402 Communication Protocol DeviceNET
pdf
•
240,3 KB
•
English
•
Operating Manual
TIRA47E1_BPG402 Communication Protocol ProfiBUS
pdf
•
337,9 KB
•
English
•
Operating Manual
TIRA93E1_BPG402_Comunication protocol EtherCAT
pdf
•
318,2 KB
•
English
•
Operating Manual
TIRB53e1_BPG402_Communication protocol EtherCAT_New Generation
pdf
•
671,5 KB
•
English
•
Operating Manual
3D Step Files
353-570 BPG402-S DN 25 ISO-KF
zip
•
530,1 KB
•
3D Files
353-571 BPG402-S DN 40 CF-R
zip
•
428,2 KB
•
3D Files
353-572 BPG402-S LCD DN 25 ISO-KF
zip
•
421,5 KB
•
3D Files
353-573 BPG402-S LCD DN 40 CF-R
zip
•
430,8 KB
•
3D Files
353-574 BPG402-SP PROFIBUS DN 25 ISO-KF
zip
•
431,8 KB
•
3D Files
353-575 BPG402-SP PROFIBUS DN 40 CF-R
zip
•
442,2 KB
•
3D Files
353-576 BPG402-SD DNET DN 25 ISO-KF
zip
•
424,5 KB
•
3D Files
353-577 BPG402-SD DNET DN 40 CF-R
zip
•
433,8 KB
•
3D Files
353-578 BPG402-SL long-tube DN 40 CF-R
zip
•
391,4 KB
•
3D Files
353-590 BPG402-SE EtherCAT 25 ISO-KF
zip
•
197,6 KB
•
3D Files
353-591 BPG402-SE EtherCAT 40 CF-R
zip
•
196,8 KB
•
3D Files
Others
BGP402-float.eds
eds
•
42,8 KB
•
English
BPG402_09AA.GSD
GSD
•
3,0 KB
•
English
BPG402-int.eds
eds
•
42,8 KB
•
English
EtherCAT ESI file BPG402 V1_3_0_0
xml
•
1,1 MB
•
English
EtherCAT new generation ESI file BPG402 V2_0_0_0.xml
xml
•
171,8 KB
•
English
Inficon_402_SP_STEP7
zip
•
847,3 KB
•
English
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