Hot Ionization Gauges
Trigon™ BPG552
ATM to Ultra High Vacuum Dual Gauge
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Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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For applications that require a measurement range from UHV (5 x10-10) down to ATM (1000 mbar), the Trigon™ family includes the dual technology BPG552 gauge. BPG552 consists of an Bayard-Alpert Hot Ionization sensor element and a classical, robust and reliable Pirani sensor element. The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity.
Advantages
- Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Pirani interlock protection to avoid premature filament burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to BPG402
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Specifications
| Measurement range (air, O2, CO, N2) | 5 × 10-10 … 1000 mbar |
| Accuracy | |
| 1 × 10-8 … 1 x 10-2 mbar | ±15 of reading |
| 1 x 10-2 mbar … 1000 mbar | ±30% of reading |
| Repeatability | 5% of reading, 10-8 … 10-2 mbar (after 10 min. stabilization) |
| Materials exposed to vacuum | stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten |
Part Number
Spare Parts
| Part Number | Description |
| 354-420 | BPG552 Spare sensor head, KF25 |
| 354-421 | BPG552 Spare sensor head, CF40 |
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