Hot Ionization Gauges

Trigon® BPG552

ATM to Ultra High Vacuum Dual Gauge

Prices & Availability

Drop-in Options

Revolutionize your vacuum gauge experience with us!

For applications that require a measurement range from UHV (5 x10^-10) down to ATM (1000 mbar), the Trigon® family includes the dual technology BPG552 gauge. BPG552 consists of an Bayard-Alpert Hot Ionization sensor element and a classical, robust and reliable Pirani sensor element. The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity.

Discover more about VacXplor

VacXplor® Software

VacXplor, our modular user software is designed to enhance your experience with INFICON Trigon Gauges. VacXplor offers a unified interface, dynamic data visualization, and advanced customization options, all without the need for administrator rights for installation.

Download VacXplor® here

Advantages

Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
2 filaments for Bayard-Alpert system
Pirani interlock protection to avoid premature filament burnout
Automatic high vacuum Pirani adjustment reduces operator interventions
Galvanic isolated electronics to avoid electric stray current
Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
Extended bakeability due to removable calibration data chips
Set point relays
Bright & big OLED display (90° rotatable) with user interface
Analog output, RS232C serial interface, EtherCAT®
Usable in conjunction with VGC50x Controller series
Backwards compatible to BPG402
RoHS compliance

Typical applications

Pressure measurement in Semiconductor processes
Industrial coating
General vacuum measurement and control on systems in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	5 × 10^-10 … 1000 mbar

Accuracy
1 × 10^-8 … 1 x 10^-2 mbar	±15 of reading
100 … 1000 mbar	±50%

Repeatability	5% of reading, 10^-8 … 10^-2 mbar (after 10 min. stabilization)

Materials exposed to vacuum	stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten

Order Information

Product

Spare parts

Accessories

Part Number

Downloads

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Brochures

Trigon™ Hot Ion Single and Combi Vacuum Gauges Brochure

pdf • 6,7 MB • English • Brochures

Vacuum Instrumentation with EtherCAT Brochure

pdf • 3,3 MB • English • Brochures

Datasheets

Trigon® BPG552 DualGauge Datasheet

pdf • 156,4 KB • English • Datasheets

Manuals

Trigon™ BPG552 DualGauge Operating Manual

pdf • 3,1 MB • English • Operating Manual

Trigon™ BxG55x Communication Protocol EtherCAT

pdf • 1,6 MB • English

Trigon™ BxG55x Communication Protocol RS232/RS485

pdf • 1,0 MB • English

3D Step Files

Trigon™ 3D 15DSUB, 2SP, 25KF

stp • 3,4 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, 40CF-R

stp • 3,4 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, E-CAT, 25KF

stp • 6,2 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, E-CAT, 40CF-R

stp • 6,2 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, 25KF

stp • 1,8 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, 40CF-R

stp • 1,9 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, E-CAT, 25KF

stp • 4,5 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, E-CAT, 40CF-R

stp • 4,7 MB • 3D Files

Other Files

Trigon™ BPG552 EtherCAT ESI-File

zip • 26,7 KB • German, Japanese, Korean, Spanish, Chinese, English

Software

VacXplor Software

zip • 712,0 B • German, Japanese, Korean, Spanish, Chinese, English • Software

The product is used in the following markets

Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

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Semiconductor Tool Manufacturer

The semiconductor industry is comprised of the design, manufacturing, assembly, and test of integrated circuits for use in data processing, communications, consumer electronics, automotive, and aerospace.

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Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

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Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets.

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Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

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Display

INFICON supports leading-edge technology and enables the highest quality Display products

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Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

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