Hot Ionization Gauges

Trigon® BCG552

ATM to Ultra High Vacuum TripleGauge®

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Revolutionize your vacuum gauge experience with us!

The TripleGauge® BCG552 combines 3 vacuum sensing elements in one sensor flange. This flagship of the new Trigon® family offers a extremely wide measurement range from UHV (5 x10^-10) up to ATM (1500 mbar). With its added ATM sensor, BCG552 is well-suited for differential pressure measurement and for use as vacuum switch in several applications.

The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity in the UHV and HV range, while the miniaturized capacitance diaphragm gauge has superior accuracy in the ATM range and is gas type independent.

Discover more about VacXplor

VacXplor® Software

VacXplor, our modular user software is designed to enhance your experience with INFICON Trigon Gauges. VacXplor offers a unified interface, dynamic data visualization, and advanced customization options, all without the need for administrator rights for installation.

Download VacXplor® here

Advantages

3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
2 filaments for Bayard-Alpert system
Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
Automatic high vacuum Pirani adjustment reduces operator interventions
Galvanic isolated electronics to avoid electric stray current
Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
Set point relays
Bright & big OLED display (90° rotatable) with user interface
Analog output, RS232C serial interface, EtherCAT®
Usable in conjunction with VGC50x Controller series
Backwards compatible to TripleGauge® BCG450
RoHS compliance

Typical applications

Pressure measurement in Semiconductor processes, transfer and loadlock chambers
Industrial coating
General vacuum measurement and control on systems in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	5 × 10^-10 … 1500 mbar

Accuracy
950 ... 1050 mbar	±2.5% of reading
50 ... 950 mbar	±5% of reading
1 × 10^-8… 50 mbar	±15 of reading

Repeatability	5% of reading, 1 × 10^-8 … 1050 mbar (after 10 min. stabilization)

Materials exposed to vacuum	stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten

Order Information

Product

Spare parts

Accessories

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Downloads

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Brochures

Trigon™ Hot Ion Single and Combi Vacuum Gauges Brochure

pdf • 6,7 MB • English • Brochures

Vacuum Instrumentation with EtherCAT Brochure

pdf • 3,3 MB • English • Brochures

Datasheets

Trigon® BCG552 TripleGauge Datasheet

pdf • 157,0 KB • English • Datasheets

Manuals

Trigon™ BCG552 TripleGauge® Operating Manual

pdf • 3,2 MB • English • Operating Manual

Trigon™ BxG55x Communication Protocol EtherCAT

pdf • 1,6 MB • English

Trigon™ BxG55x Communication Protocol RS232/RS485

pdf • 1,0 MB • English

3D Step Files

Trigon™ 3D 15DSUB, 2SP, 25KF

stp • 3,4 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, 40CF-R

stp • 3,4 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, E-CAT, 25KF

stp • 6,2 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, E-CAT, 40CF-R

stp • 6,2 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, 25KF

stp • 1,8 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, 40CF-R

stp • 1,9 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, E-CAT, 25KF

stp • 4,5 MB • 3D Files

Trigon™ 3D 15DSUB, 2SP, OLED, E-CAT, 40CF-R

stp • 4,7 MB • 3D Files

Other Files

Trigon™ BCG552 EtherCAT ESI-File

zip • 48,9 KB • German, Japanese, Korean, Spanish, Chinese, English

Software

VacXplor Software

zip • 712,0 B • German, Japanese, Korean, Spanish, Chinese, English • Software

The product is used in the following markets

Semiconductor Tool Manufacturer

The semiconductor industry is comprised of the design, manufacturing, assembly, and test of integrated circuits for use in data processing, communications, consumer electronics, automotive, and aerospace.

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Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

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Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

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Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets.

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Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

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Display

INFICON supports leading-edge technology and enables the highest quality Display products

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Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

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