Hot Ionization Gauges
BCG450
ATM to Ultra High Vacuum TripleGauge®
Drop-in Options
Revolutionize your vacuum gauge experience with us!
More Flexibility. Better Stability.
Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable) and more.
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The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr).
The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
Also available wth PROFINET digital interface.
Advantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Specifications
| Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 1500 3.75×10-10 … 1125 |
| Accuracy | ||
| 10-8 … 50 mbar | % of reading | ±15 |
| 50 … 950 mbar | % of reading | ±5 |
| 950 … 1050 mbar | % of reading | ±2.5 |
| Repeatability | ||
| 10-8 … 10-2 mbar | % of reading | 5 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange | °C | 80 |
| Bakeout electronics removed | °C | 150 |
| Supply voltage | V (dc) A (dc) | 20 … 28 0.8 |
| Materials exposed to vacuum | Yt2O3, Ir, Mo, Cu, W, NiFe, NiCr, AI2O3, SnAg, stainless steel, glass |
Part Number
Part Number
Accessories
Spare Parts
| Part Number | Description |
| 353-550 | BCG450 DN 25 ISO-KF |
| 353-551 | BCG450 DN 40 CF-R |
| 353-552 | BCG450 LCD, DN 25 ISO-KF |
| 353-553 | BCG450 LCD, DN 40 CF-R |
| 353-554 | BCG450-SP PBus, DN 25 ISO-KF |
| 353-556 | BCG450-SP PBus, DN 40 CF-R |
| 353-557 | BCG450-SD DNet, DN 25 ISO-KF |
| 353-558 | BCG450-SD DNet, DN 40 CF-R |
| 353-592 | BCG450-SE ECAT, DN 25 ISO-KF |
| 353-593 | BCG450-SE ECAT, DN 40 CF-R |
| 353-598 | BCG450-SE ECAT, DN 25 ISO-KF |
| 353-599 | BCG450-SE ECAT, DN 40 CF-R |
| 353-517 | BCG450-PN PROFINET, DN 25 ISO-KF |
| 353-518 | BCG450-PN PROFINET, DN 40 CF-R |
| Part Number | Description |
| 353-511 | Power supply BPG400 24VDC |
| 353-512 | Baffle for BPG400 |
| 211-113 | Centering ring with baffle DN 25 KF |
| Part Number | Description |
| 354-492 | Spare sensor head BCG450, DN 25 ISO-KF |
| 354-493 | Spare sensor head BCG450, DN 40 CF-R |
Downloads
Datasheets
Calibre triple BGC450 ATM to Ultra-High Vacuum Triple Gauge ES
pdf
•
386,9 KB
•
Spanish
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Datasheets
BCG450 TripleGauge ATM bis Ultra-Hoch Vakuum Datenblatt
pdf
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392,0 KB
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German
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Datasheets
BCG450 TripleGauge Datasheet
pdf
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185,1 KB
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English
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Datasheets
BCG450 トリプルゲージ
pdf
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479,4 KB
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Japanese
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Datasheets
BCG450 大气压至超高真空三合一真空计
pdf
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471,4 KB
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Chinese
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Datasheets
BCG450 트리플 게이지
pdf
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382,5 KB
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Korean
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Datasheets
Brochures
Manuals
BCG450 TripleGauge DeviceNet Communication Protocol
pdf
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289,8 KB
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English
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Operating Manual
BCG450 TripleGauge EtherCAT Communication Protocol
pdf
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350,6 KB
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English
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Operating Manual
BCG450 TripleGauge EtherCAT New Generation Communication Protocol
pdf
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773,5 KB
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English
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Operating Manual
BCG450 TripleGauge Gebrauchsanleitung
pdf
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2,0 MB
•
German
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Operating Manual
BCG450 TripleGauge Operating Manual
pdf
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1,8 MB
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English
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Operating Manual
BCG450 TripleGauge PROFIBUS Communication Protocol
pdf
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360,8 KB
•
English
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Operating Manual
BCG450 TripleGauge PROFINET Communication Protocol
pdf
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824,0 KB
•
English
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Operating Manual
3D Step Files
BCG450 TripleGauge 3D DN25 ISO-KF
zip
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451,7 KB
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3D Files
BCG450 TripleGauge 3D DN40-CF-R
zip
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455,6 KB
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3D Files
BCG450 TripleGauge 3D DNET DN40 CF-R
zip
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462,3 KB
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3D Files
BCG450 TripleGauge 3D LCD DN25 ISO-KF
zip
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453,5 KB
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3D Files
BCG450 TripleGauge 3D LCD DN40 CF-R
zip
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459,6 KB
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3D Files
BCG450 TripleGauge 3D PROFIBUS DN25 ISO-KF
zip
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459,8 KB
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3D Files
BCG450 TripleGauge 3D PROFIBUS DN40 CF-R
zip
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467,2 KB
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3D Files
BCG450 TripleGauge 3D PROFINET DN40 CF-R
stp
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5,4 MB
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3D Files
BCG450 TripleGauge DNET DN25 ISO-KF
zip
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457,3 KB
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3D Files
BCG450 TripleGauge PROFINET DN25 ISO-KF
stp
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3,5 MB
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3D Files
BCG450-SE TripleGauge 3D EtherCAT 25 ISO-KF
stp
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5,1 MB
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3D Files
BCG450-SE TripleGauge 3D EtherCAT 40 CF-R
stp
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5,2 MB
•
3D Files
Others
BCG450 TripleGauge 08E6 GSD
GSD
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2,5 KB
•
English
BCG450 TripleGauge ESI V1.3
xml
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1,4 MB
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English
BCG450 TripleGauge EtherCAT New Generation ESI V2
xml
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218,7 KB
•
English
BCG450 TripleGauge Float EDS
eds
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53,7 KB
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English
BCG450 TripleGauge int EDS
eds
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53,7 KB
•
English
BCG450 TripleGauge PROFINET GSDML
zip
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3,2 KB
•
English
Inficon_450_SP_STEP7
zip
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857,1 KB
•
English
The product is used in the following markets
