Hot Ionization Gauges
BCG450
ATM to Ultra High Vacuum TripleGauge®

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr).
The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
Also available wth Profinet digital interface.
Advantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Specifications
Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 1500 3.75×10-10 … 1125 |
Accuracy | ||
10-8 … 50 mbar | % of reading | ±15 |
50 … 950 mbar | % of reading | ±5 |
950 … 1050 mbar | % of reading | ±2.5 |
Repeatability | ||
10-8 … 10-2 mbar | % of reading | 5 |
Temperature | ||
Operation (ambient) | °C | 0 … +50 |
Storage | °C | -20 … +70 |
Bakeout at flange | °C | 80 |
Bakeout electronics removed | °C | 150 |
Supply voltage | V (dc) A (dc) | 20 … 28 0.8 |
Materials exposed to vacuum | Yt2O3, Ir, Mo, Cu, W, NiFe, NiCr, AI2O3, SnAg, stainless steel, glass |
Part Number
Accessories
Spare Parts
Part Number | Description |
353-550 | BCG450 DN 25 ISO-KF |
353-551 | BCG450 DN 40 CF-R |
353-552 | BCG450 LCD, DN 25 ISO-KF |
353-553 | BCG450 LCD, DN 40 CF-R |
353-554 | BCG450-SP PBus, DN 25 ISO-KF |
353-556 | BCG450-SP PBus, DN 40 CF-R |
353-557 | BCG450-SD DNet, DN 25 ISO-KF |
353-558 | BCG450-SD DNet, DN 40 CF-R |
353-592 | BCG450-SE ECAT, DN 25 ISO-KF |
353-593 | BCG450-SE ECAT, DN 40 CF-R |
353-598 | BCG450-SE ECAT, DN 25 ISO-KF |
353-599 | BCG450-SE ECAT, DN 40 CF-R |
353-517 | BCG450-PN Profinet, DN 25 ISO-KF |
353-518 | BCG450-PN Profinet, DN 40 CF-R |
Part Number | Description |
353-511 | Power supply BPG400 24VDC |
353-512 | Baffle for BPG400 |
211-113 | Centering ring with baffle DN 25 KF |
Part Number | Description |
354-492 | Spare sensor head BCG450, DN 25 ISO-KF |
354-493 | Spare sensor head BCG450, DN 40 CF-R |
Downloads
Brochures
Manuals
TIMA40D1 Triple Gauge BCG450 Gebrauchsanleitung_kurz
pdf
•
744,0 KB
•
German
TIMA41D1 Triple Gauge BCG450 Gebrauchsanleitung Feldbusse_kurz
pdf
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752,2 KB
•
German
TINA40D1 Triple Gauge BCG450 Gebrauchsanleitung_lang
pdf
•
1,9 MB
•
German
TIMA40E1 Triple Gauge BCG450 Operating manual_short
pdf
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748,1 KB
•
English
TIMA41E1 Triple Gauge BCG450 Operating manual Fieldbusses_short
pdf
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748,3 KB
•
English
TIMA41E1_TripleGauge BCG450 Operating manual for DNET and Profibus_short
pdf
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260,8 KB
•
English
TINA40E1 Triple Gauge BCG450 Operating manual_long
pdf
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1,8 MB
•
English
TIRA40E1_TripleGauge BCG450 Communication protocol DeviceNet
pdf
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289,8 KB
•
English
TIRA41E1_TripleGauge BCG450 Communication protocol Profibus
pdf
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360,8 KB
•
English
TIRA87E1_TripleGauge BCG450_Communication protocol EtherCAT
pdf
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350,6 KB
•
English
TIRB52e1_BCG450_Communication protocol EtherCAT_New Generation
pdf
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773,5 KB
•
English
TIRB61E1 TripleGauge BCG450 Communication protocol Profinet
pdf
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824,0 KB
•
English
3D Step Files
353-517 BCG450 Profinet DN 25 ISO-KF
stp
•
3,5 MB
•
German, Japanese, Korean, Spanish, Chinese, English
353-518 BCG450 Profinet DN 40 CF-R
stp
•
5,4 MB
•
German, Japanese, Korean, Spanish, Chinese, English
353-550 BCG450 DN 25 ISO-KF
zip
•
451,7 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-551 BCG450 DN 40-CF-R
zip
•
455,6 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-552 BCG450 LCD DN 25 ISO-KF
zip
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453,5 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-553 BCG450 LCD DN 40 CF-R
zip
•
459,6 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-554 BCG450 Profibus DN 25 ISO-KF
zip
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459,8 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-556 BCG450 Profibus DN 40-CF-R
zip
•
467,2 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-557 BCG450 DNET DN 25 ISO-KF
zip
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457,3 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-558 BCG450 DNET DN 40-CF-R
zip
•
462,3 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-592 BCG450-SE EtherCAT 25 ISO-KF
zip
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197,6 KB
•
German, Japanese, Korean, Spanish, Chinese, English
353-593 BCG450-SE EtherCAT 40 CF-R
zip
•
196,8 KB
•
German, Japanese, Korean, Spanish, Chinese, English
Others
BCG450_08E6.GSD
GSD
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2,5 KB
•
English
BCG450-float.eds
eds
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53,7 KB
•
English
BCG450-int.eds
eds
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53,7 KB
•
English
ESI File_BCG450 V1_3_0_0.xml
xml
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1,4 MB
•
English
EtherCAT new generation ESI file BCG450 V2_0_0_0.xml
xml
•
218,7 KB
•
English
Inficon_450_SP_STEP7.zip
zip
•
857,1 KB
•
English
Profinet GSDML File for BCG450.zip
zip
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3,2 KB
•
English
The product is used in the following markets