BCG450

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge^®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10^-10 to 1500 mbar (3.75×10^-10 to 1125 Torr).

The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

Also available wth Profinet digital interface.

Advantages

BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
Pirani interlock protects the hot filament from premature burnout
Automatic high vacuum Pirani adjustment reduces operator interventions
Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
Optional graphic display and Fieldbus interfaces available
RoHS compliance

Typical applications

Pressure measurement in Semiconductor process, transfer and loadlock chambers
Industrial coating
General vacuum measurement and control on systems in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	mbar Torr	5×10^-10 … 1500 3.75×10^-10 … 1125

Accuracy

10^-8 … 50 mbar	% of reading	±15
50 … 950 mbar	% of reading	±5
950 … 1050 mbar	% of reading	±2.5

Repeatability

10^-8 … 10^-2 mbar	% of reading	5

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange	°C	80
Bakeout electronics removed	°C	150

Supply voltage	V (dc) A (dc)	20 … 28 0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Mo, Cu, W, NiFe, NiCr, AI₂O₃, SnAg, stainless steel, glass

Download full specifications

Part Number

Accessories

Spare Parts

Part Number	Description
353-550	BCG450 DN 25 ISO-KF
353-551	BCG450 DN 40 CF-R
353-552	BCG450 LCD, DN 25 ISO-KF
353-553	BCG450 LCD, DN 40 CF-R
353-554	BCG450-SP PBus, DN 25 ISO-KF
353-556	BCG450-SP PBus, DN 40 CF-R
353-557	BCG450-SD DNet, DN 25 ISO-KF
353-558	BCG450-SD DNet, DN 40 CF-R
353-592	BCG450-SE ECAT, DN 25 ISO-KF
353-593	BCG450-SE ECAT, DN 40 CF-R
353-598	BCG450-SE ECAT, DN 25 ISO-KF
353-599	BCG450-SE ECAT, DN 40 CF-R
353-517	BCG450-PN Profinet, DN 25 ISO-KF
353-518	BCG450-PN Profinet, DN 40 CF-R