Helium Leak Detector

UL3000 Fab Series

UL3000 Fab /UL3000 Fab ULTRA

ULTRATEST ™ sensor technology

UL3000-Fab-ULTRA

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
Your configuration has been successfully sent!

Specifically designed for the needs of leak checking in semiconductor applications.

It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

  • Faster pump down (evacuation) times due to higher air pumping speed.
  • Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • The UL3000 Fab ULTRA offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.


Fast Results 

The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.

 

Rotatable Display and Remote Controllable User Interface

The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

 

Slim Design for Advanced Maneuverability

A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.
 

Advantages

  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
  • Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
  • Applicable for vacuum and sniffer leak search
  • Minimize leak checking efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display
  • UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
  • UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

Typical Applications

  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications

Specifications

UL3000 Fab
UL3000 Fab ULTRA
Max. pumping speed of roughing pumpm³/h>30
Helium pumping speed (high sensitive mode ULTRA)L/s4
Dimensions (LxWxH)mm
in.
1050x472x987
42x21x34
Additional FeaturesRoots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder
Max. pumping speed of roughing pumpm³/h>36
Helium pumping speed (high sensitive mode ULTRA)L/s4
Dimensions (LxWxH)mm
in.
1050x472x987
42x21x34
Additional FeaturesRoots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

Ordering Information

Part Number
Accessories
Consumables
550-260UL3000 Fab ULTRA
550-200UL3000 Fab
551-010Remote Control RC1000C, wired, with 4m coiled cable
551-202Vacuum Hose Holder for UL3000 Fab (incl. for ULTRA version)
525-001SL3000-3, sniffer line 3 m length
525-002SL3000-5, sniffer line 5 m length
525-003SL3000-10, sniffer line 10 m length
551-203Bracket for SL3000
551-210SL200, Sniffer line + el. extension for UL3000
551-201Helium Bottle Holder
560-310I/O 1000 module
560-315BM1000 PROFIBUS module
560-316BM1000 PROFINET IO module
560-317BM1000 DeviceNet module
560-318BM1000 Ethernet/IP module
560-334Data Cable for IO1000, BM1000, 0.5m
560-332Data Cable 2 m
560-335Data Cable 5 m
560-340Data Cable 10 m
551-005TC1000Test Chamber, DN25KF, ESD wrist band
551-205Extension cable for TC1000/SL200, UL3000
551-600I·BOOST software license
551-031SPRAY-Check TL8
200007656Airfilter Kit UL3 Housing Ventilation

Downloads

Manuals
BM1000 Operating manual
pdf 824,6 KB Chinese Operating Manual
BM1000 Operating manual
pdf 1.004,7 KB German Operating Manual
IO1000 Betriebsanleitung
pdf 1,3 MB German Operating Manual
Halterung SL3000
pdf 328,7 KB German Operating Manual
TC1000 Betriebsanleitung
pdf 340,5 KB German Operating Manual
IO1000 Manual de instrucciones
pdf 1,3 MB Spanish Operating Manual
BM1000 Operating manual
pdf 640,6 KB Spanish Operating Manual
IO1000 操作说明书
pdf 1,4 MB Chinese Operating Manual
BM1000 Operating manual
pdf 734,7 KB English Operating Manual
IO1000 Operating manual
pdf 1,3 MB English Operating Manual
RC1000 Betriebsanleitung
pdf 2,1 MB German Operating Manual
RC1000 Notice d'utilisation
pdf 2,1 MB French Operating Manual
RC1000 Operating instructions
pdf 2,1 MB English Operating Manual
SL3000 bracket
pdf 148,3 KB English Operating Manual
SMART-Spray Betriebsanleitung
pdf 2,5 MB German Operating Manual
SMART-Spray Operating instructions
pdf 2,5 MB English Operating Manual
TC1000 Operating Manual
pdf 353,8 KB English Operating Manual
UL3000 Fab Betriebsanleitung
pdf 3,5 MB German Operating Manual
UL3000 Fab Operating instructions
pdf 3,5 MB English Operating Manual
UL3000 Fab ULTRA Betriebsanleitung
pdf 4,7 MB German Operating Manual
UL3000 Fab ULTRA Manual de instrucciones
pdf 4,7 MB Spanish Operating Manual
UL3000 Fab ULTRA Operating instructions
pdf 4,7 MB English Operating Manual
UL3000 Fab ULTRA инструкция по эксплуатации
pdf 5,2 MB Russian Operating Manual
UL3000 Fab ULTRA 操作说明书 Operating instructions (zh-cn)
pdf 4,9 MB Chinese Operating Manual
UL3000 Fab ULTRA 사용 설명서 Operating instructions
pdf 4,7 MB Korean Operating Manual
UL3000 Fab ULTRA-操作手冊 Operating Instructions (zh-tw)
pdf 4,8 MB Chinese Operating Manual
UL3000 Fab 操作手冊 Operating Instructions (zh-tw)
pdf 3,6 MB Chinese Operating Manual
UL3000 Fab 操作説明 Operating instructions
pdf 3,7 MB Japanese Operating Manual
UL3000 Fab 操作说明书 Operating instructions
pdf 3,7 MB Chinese Operating Manual