Hot Ionization Gauges

BCG450

ATM to Ultra High Vacuum TripleGauge^®

Drop-in Options

Revolutionize your vacuum gauge experience with us!

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge^®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10^-10 to 1500 mbar (3.75×10^-10 to 1125 Torr).

The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

Also available wth PROFINET digital interface.

Advantages

BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
Pirani interlock protects the hot filament from premature burnout
Automatic high vacuum Pirani adjustment reduces operator interventions
Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
Optional graphic display and Fieldbus interfaces available
RoHS compliance

Typical applications

Pressure measurement in Semiconductor process, transfer and loadlock chambers
Industrial coating
General vacuum measurement and control on systems in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	mbar Torr	5×10^-10 … 1500 3.75×10^-10 … 1125

Accuracy

10^-8 … 50 mbar	% of reading	±15
50 … 950 mbar	% of reading	±5
950 … 1050 mbar	% of reading	±2.5

Repeatability

10^-8 … 10^-2 mbar	% of reading	5

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange	°C	80
Bakeout electronics removed	°C	150

Supply voltage	V (dc) A (dc)	20 … 28 0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Mo, Cu, W, NiFe, NiCr, AI₂O₃, SnAg, stainless steel, glass

Download full specifications

Part Number

Accessories

Spare Parts

Part Number	Description
353-550	BCG450 DN 25 ISO-KF
353-551	BCG450 DN 40 CF-R
353-552	BCG450 LCD, DN 25 ISO-KF
353-553	BCG450 LCD, DN 40 CF-R
353-554	BCG450-SP PBus, DN 25 ISO-KF
353-556	BCG450-SP PBus, DN 40 CF-R
353-557	BCG450-SD DNet, DN 25 ISO-KF
353-558	BCG450-SD DNet, DN 40 CF-R
353-592	BCG450-SE ECAT, DN 25 ISO-KF
353-593	BCG450-SE ECAT, DN 40 CF-R
353-598	BCG450-SE ECAT, DN 25 ISO-KF
353-599	BCG450-SE ECAT, DN 40 CF-R
353-517	BCG450-PN PROFINET, DN 25 ISO-KF
353-518	BCG450-PN PROFINET, DN 40 CF-R

Part Number	Description
353-511	Power supply BPG400 24VDC
353-512	Baffle for BPG400
211-113	Centering ring with baffle DN 25 KF

Part Number	Description
354-492	Spare sensor head BCG450, DN 25 ISO-KF
354-493	Spare sensor head BCG450, DN 40 CF-R

Downloads

Brochures

Brochure Vacuum Instrumentation with EtherCAT

pdf • 3,3 MB • English • Brochures

Hot Ion Gauge Brochure

pdf • 2,5 MB • English • Brochures

Manuals

BCG450 Communication Protocol EtherCAT_New Generation

pdf • 773,5 KB • English • Operating Manual

Triple Gauge BCG450 Gebrauchsanleitung

pdf • 2,0 MB • German • Operating Manual

Triple Gauge BCG450 Operating manual

pdf • 1,8 MB • English • Operating Manual

TripleGauge BCG450 Communication Protocol DeviceNet

pdf • 289,8 KB • English • Operating Manual

TripleGauge BCG450 Communication Protocol EtherCAT

pdf • 350,6 KB • English • Operating Manual

TripleGauge BCG450 Communication Protocol PROFIBUS

pdf • 360,8 KB • English • Operating Manual

TripleGauge BCG450 Communication Protocol PROFINET

pdf • 824,0 KB • English • Operating Manual

3D Step Files

353-517 BCG450 PROFINET DN 25 ISO-KF

stp • 3,5 MB • 3D Files

353-518 BCG450 PROFINET DN 40 CF-R

stp • 5,4 MB • 3D Files

353-550 BCG450 DN 25 ISO-KF

zip • 451,7 KB • 3D Files

353-551 BCG450 DN 40-CF-R

zip • 455,6 KB • 3D Files

353-552 BCG450 LCD DN 25 ISO-KF

zip • 453,5 KB • 3D Files

353-553 BCG450 LCD DN 40 CF-R

zip • 459,6 KB • 3D Files

353-554 BCG450 PROFIBUS DN 25 ISO-KF

zip • 459,8 KB • 3D Files

353-556 BCG450 PROFIBUS DN 40-CF-R

zip • 467,2 KB • 3D Files

353-557 BCG450 DNET DN 25 ISO-KF

zip • 457,3 KB • 3D Files

353-558 BCG450 DNET DN 40-CF-R

zip • 462,3 KB • 3D Files

353-592 BCG450-SE EtherCAT 25 ISO-KF

zip • 197,6 KB • 3D Files

353-593 BCG450-SE EtherCAT 40 CF-R

zip • 196,8 KB • 3D Files

Others

BCG450_08E6.GSD

GSD • 2,5 KB • English

BCG450-float.eds

eds • 53,7 KB • English

BCG450-int.eds

eds • 53,7 KB • English

ESI File_BCG450 V1_3_0_0

xml • 1,4 MB • English

EtherCAT new generation ESI file BCG450 V2_0_0_0.xml

xml • 218,7 KB • English

Inficon_450_SP_STEP7

zip • 857,1 KB • English

PROFINET GSDML File for BCG450

zip • 3,2 KB • English

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Pharma & Medical

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Advantages

Typical applications

Specifications

Downloads

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