
Revolutionize your vacuum gauge experience with us!
VGC094 is a prestigious solution for vacuum process measurement, control and data log. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10-11 to 1000 mbar. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron gauges) by two sets of measurement boards. The controller provides the latest digital communication interfaces (USB, RS485, Ethernet) and can be customized with users' specific communication standards thanks to individual interface boards (PROFIBUS, PROFINET). VGC094 is the ideal solution for applications with demanding performance, such as operation from long distance, high temperature or high ionizing radiation exposure.
Advantages
- Complete solution for vacuum monitoring and control monitor from 1×10-11 to 1000 mbar, even at long distance
- Bright and clear screen
- Bar graph display with set-point or pressure vs. time views
- Simple sensor operation with intuitive and guided menus for parameter, sensor or general settings
- Data and parameter log function with USB port (rear side) and USB flash drive (front side)
- High resolution – 16 bit A/D converter
- 4 programmable 0 to 10 V chart recorder output
- Four free definable setpoints per channel with adjustable hysteresis
- RS485, Ethernet, optional RS232 and fieldbus communication interfaces
Specifications
| Measurement channel | 4 |
| Display | LCD, LED backlight |
| Measurement rate | 100 s-1 |
| Display rate | 10 s-1 |
| Measurement range | 1 x 10-11 ... 1000 mbar |
| Measurement unit (selectable) | mbar, Torr, hPa, Micron, V |
| Slots for plug-in boards | 2 measurement boards 1 interface board |
| Setpoint relays | 4 |
| Error relay | 1 |
| Channel assignement | freely assignable |
| Adjustment range | sensor dependent |
| Hysteresis | adjustable |
| Rely contact | floating changeover contact |
| Contact rating | 30 V (ac) / 1.5 A |
| 30 V (dc) / 1.5 A | |
| Connector | D-sub, 25-pin, female |
| Analog output | 4 |
| Range | 0 ... 10 V / 4 ... 20 mA |
| Interface (digital) | USB slave, master, RS485, Ethernet, USB Type A (flash drive), USB Type B, M12 5-pin FCC68/RJ45 |
| Power supply | 100 ... 240 V (ac) |
| Frequency | 50 ... 60 Hz |
| Operation temperature | +5 ... +50°C |
Order Information
Pirani gauges
| Pressure range | 8×10-4 … 1000 mbar |
| Feedthrough | Internal seal | Glass | Elastomer (FPM) |
| Bake-out temperature range | ≤100°C |
| Ionizing radiation tolerance | - |
| Features | Tungsten (W) filament |
| Pressure range | 8×10-4 … 1000 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 106 Gy |
| Features | Nickel (Ni) filament, corrosion resistant |
| Pressure range | 8×10-4 … 1000 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 106 Gy |
| Features | Tungsten (W) filament |
Inverted magnetron cold cathode gauges
| Pressure range | 2×10-9 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Elastomer (FPM) |
| Bake-out temperature range | ≤150°C |
| Ionizing radiation tolerance | - |
| Magnetic field immunity | - |
| Features | Coax connector |
| Pressure range | 1×10-10 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 107 Gy |
| Magnetic field immunity | - |
| Features | Coax connector |
| Pressure range | 1×10-11 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 107 Gy |
| Magnetic field immunity | - |
| Features | Triax connector |
| Pressure range | 1×10-8 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤230°C |
| Ionizing radiation tolerance | 107 Gy |
| Magnetic field immunity | |
| Axial | ≤280 mT |
| Radial | ≤180 mT |
| Features | Double ionization chamber principle Coax connector |
Panel view
Measurement configurations
| Board type | Double Pirani measurement boards (PI 300 D, DN or DL) Double Cold Cathode measurement boards (PE 300 DC9) Pirani + Cold Cathode combination measurement boards (CP 300 C9, C10, T11, T11L) |
| Board type | Interface board IF 300 A, B, C, P, IF301 P, IF 500 PN |
Measurement boards - Pirani
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG010 / PSG018 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | - |
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG017 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | - |
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG010 / PSG018 |
| Max operating distance | |
| Pirani | ≤500 m |
| Cold cathode | - |
Measurement boards - Cold Cathode
| Measurement channels | Double Cold Cathode (2 sensors) |
| Gauge type | MAG050 / MAG060 |
| Max operating distance | - |
| Pirani | - |
| Cold cathode | ≤100 m1) |
1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range | |
Measurement boards - Pirani / Cold Cathode combination
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG050 or MAG60 or MAG084 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤100 m 1) |
1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range | |
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG050 or MAG60 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤100 m 1) |
1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range | |
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG070 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤500 m |
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG070 |
| Max operating distance | |
| Pirani | ≤500 m |
| Cold cathode | ≤500 m |
Interface boards
| Communication protocol | RS232C interface and relays (1.5 A) |
| Communication protocol | RS232 interface and relays (4.0 A) |
| Communication protocol | RS422 interface and relays (1.5 A) |
| Communication protocol | PROFIBUS interface and relays (1.5 A) |
| Communication protocol | PROFIBUS interface and solid state relays (0.5 A) |
| Communication protocol | PROFINET interface |























