Vacuum Gauge Controller

VGC094

The modular all-in solution for vacuum control

VGC094

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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VGC094 is a prestigious solution for vacuum process measurement, control and data log. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10-11 to 1000 mbar. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron gauges) by two sets of measurement boards. The controller provides the latest digital communication interfaces (USB, RS485, Ethernet) and can be customized with users' specific communication standards thanks to individual interface boards (Profibus, Profinet). VGC094 is the ideal solution for applications with demanding performance, such as operation from long distance, high temperature or high ionizing radiation exposure.

Advantages

  • Complete solution for vacuum monitoring and control monitor from 1×10-11 to 1000 mbar, even at long distance
  • Bright and clear screen
  • Bar graph display with set-point or pressure vs. time views
  • Simple sensor operation with intuitive and guided menus for parameter, sensor or general settings
  • Data and parameter log function with USB port (rear side) and USB flash drive (front side)
  • High resolution – 16 bit A/D converter
  • 4 programmable 0 to 10 V chart recorder output
  • Four free definable setpoints per channel with adjustable hysteresis
  • RS485, Ethernet, optional RS232 and fieldbus communication interfaces

Pirani gauges

PSG010
PSG017
PSG018
Pressure range8×10-4 … 1000 mbar
Feedthrough | Internal sealGlass | Elastomer (FPM)
Bake-out temperature range≤100°C
Ionizing radiation tolerance-
FeaturesTungsten (W) filament
Pressure range8×10-4 … 1000 mbar
Feedthrough | Internal sealAI2O3 ceramic | Metal
Bake-out temperature range≤250°C
Ionizing radiation tolerance106 Gy
FeaturesNickel (Ni) filament, corrosion resistant
Pressure range8×10-4 … 1000 mbar
Feedthrough | Internal sealAI2O3 ceramic | Metal
Bake-out temperature range≤250°C
Ionizing radiation tolerance106 Gy
FeaturesTungsten (W) filament

Inverted magnetron cold cathode gauges

MAG050
MAG060
MAG070
MAG084
Pressure range 2×10-9 mbar to 5×10-3 mbar
Feedthrough | Internal sealAI2O ceramic | Elastomer (FPM)
Bake-out temperature range≤150°C
Ionizing radiation tolerance-
Magnetic field immunity-
FeaturesCoax connector
Pressure range1×10-10 mbar to 5×10-3 mbar
Feedthrough | Internal sealAI2O3 ceramic | Metal
Bake-out temperature range≤250°C
Ionizing radiation tolerance107 Gy
Magnetic field immunity-
FeaturesCoax connector
Pressure range1×10-11 mbar to 5×10-3 mbar
Feedthrough | Internal sealAI2O3 ceramic | Metal
Bake-out temperature range≤250°C
Ionizing radiation tolerance107 Gy
Magnetic field immunity-
FeaturesTriax connector
Pressure range1×10-8 mbar to 5×10-3 mbar
Feedthrough | Internal sealAI2O3 ceramic | Metal
Bake-out temperature range≤230°C
Ionizing radiation tolerance107 Gy
Magnetic field immunity 
Axial≤280 mT
Radial≤180 mT
FeaturesDouble ionization chamber principle
Coax connector

Measurement configurations

Slot A + B
Slot C
Board type

Double Pirani measurement boards (PI 300 D, DN or DL)

Double Cold Cathode measurement boards (PE 300 DC9)

Pirani + Cold Cathode combination measurement boards (CP 300 C9, C10, T11, T11L)

Board type

Interface board

IF 300 A, B, C, P, IF301 P, IF 500 PN

Measurement boards - Pirani

PI 300 D
PI 300 DN
PI 300 DL
Measurement channelsDoube Pirani (2 sensors)
Gauge typePSG010 / PSG018
Max operating distance 
Pirani≤100 m
Cold cathode-
Measurement channelsDoube Pirani (2 sensors)
Gauge typePSG017
Max operating distance 
Pirani≤100 m
Cold cathode-
Measurement channelsDoube Pirani (2 sensors)
Gauge typePSG010 / PSG018
Max operating distance 
Pirani≤500 m
Cold cathode-

Measurement boards - Cold Cathode

PE 300 DC9
PE 300 DC9
Measurement channelsDouble Cold Cathode (2 sensors)
Gauge typeMAG050 / MAG060
Max operating distance-
Pirani-
Cold cathode≤100 m1)

 

1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range

Measurement boards - Pirani / Cold Cathode combination

CP 300 C9
CP 300 C10
CP 300 T11
CP 300 T11L
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG050 or MAG60 or MAG084
Max operating distance 
Pirani≤100 m
Cold cathode≤100 m 1)

1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG050 or MAG60
Max operating distance 
Pirani≤100 m
Cold cathode≤100 m 1)

1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG070
Max operating distance 
Pirani≤100 m
Cold cathode≤500 m
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG070
Max operating distance 
Pirani≤500 m
Cold cathode≤500 m

Interface boards

IF 300 A
IF 300 B
IF 300 C
IF 300 P
IF 301 P
IF 500 PN
Communication protocolRS232C interface and relays (1.5 A)
Communication protocolRS232 interface and relays (4.0 A)
Communication protocolRS422 interface and relays (1.5 A)
Communication protocolProfibus interface and relays (1.5 A)
Communication protocolProfibus interface and solid state relays (0.5 A)
Communication protocolProfinet interface

Specifications

VGC094
VGC094
Measurement channel4
DisplayLCD, LED backlight
Measurement rate100 s-1
Display rate10 s-1
Measurement range1 x 10-11 ... 1000  mbar
Measurement unit (selectable)mbar, Torr, hPa, Micron, V
Slots for plug-in boards2 measurement boards
1 interface board
Setpoint relays4
Error relay1
Channel assignementfreely assignable
Adjustment rangesensor dependent
Hysteresisadjustable
Rely contactfloating changeover contact
Contact rating30 V (ac) / 1.5 A
30 V (dc) / 1.5 A
ConnectorD-sub, 25-pin, female
Analog output4
Range0 ... 10 V / 4 ... 20 mA
Interface (digital)USB slave, master, RS485, Ethernet, USB Type A (flash drive), 
USB Type B, M12 5-pin FCC68/RJ45
Power supply100 ... 240 V (ac)
Frequency50 ... 60 Hz
Operation temperature+5 ... +50°C

Part number

Part number
Accessories
398-401VGC094 Vacuum Gauge Controller
 Cable for PSG010 80°C
Cable connectors: Amphenol / Amphenol
BG548402-T3 m (9.9 ft)
BG548403-T6 m (19.8 ft)
BG548450-T10 m (33 ft)
BG548451-T15 m (49 ft)
  
 Cable for PSG017/018 80°C
Cable connectors: Amphenol / Push-pull self-latching
BG548308-T3 m (9.9 ft)
BG548309-T6 m (19.8 ft)
BG548456-T10 m (33 ft)
BG548457-T15 m (49 ft)
  
 Cable for PSG017/018 250°C
Cable connectors: Amphenol / Push-pull self-latching
BG548414-T3 m (9.9 ft)
BG548465-T6 m (19.8 ft)
BG448047-T10 m (33 ft)
BG448043-T15 m (49 ft)
  
 Extensions cables for PSG010/017/018 80°C
Cable connectors: Amphenol / Amphenol
BG548466-T10 m (33 ft)
BG548468-T20 m (65 ft)
BG548470-T30 m (99 ft)
  
 Cable for MAG050/060/084 80°C
Cable connectors: Bayonet, SHV / SHV
BG548406-T3 m (9.9 ft)
BG548407-T6 m (19.8 ft)
BG548419-T10 m (33 ft)
BG548483-T15 m (49 ft)
  
 Cable for MAG050/060/084 250°C
Cable connectors: Bayonet, SHV / SHV
BG548542-T3 m (9.9 ft)
BG548543-T6 m (19.8 ft)
BG448045-T10 m (33 ft)
BG548989-T15 m (49 ft)
  
 Cable for MAG070 80°C
Cable connectors: Push-pull self-latching, Triax / Triax
BG548306-T3 m (9.9 ft)
BG548317-T6 m (19.8 ft)
BG548490-T10 m (33 ft)
BG548491-T15 m (49 ft)
  
 Measurement boards
IG546920-TDouble Pirani measurement board, PI 300 D
IG549212-TDouble Pirani measurement board, PI 300 DL
IG549214-TDouble Pirani measurement board, PI 300 DN
IG441375-TDouble cold cathode measurement board, PE 300 DC9
IG441000-TPirani/Cold cathode measurement board, CP 300 C9
IG441114-TPirani/Cold cathode measurement board, CP 300 C10
IG441080-TPirani/Cold cathode measurement board, CP 300 T11
IG441120-TPirani/Cold cathode measurement board, CP 300 T11L
  
 Interface boards
IG441130-TInterface and relay board, IF300A RS232C
IG441250-TInterface and relay board, IF300B RS232
IG441390-TInterface and relay board, IF300C RS422
IG441395-TInterface and relay board, IF300P Profibus
IG441396-TInterface and relay board, IF301P Profibus semi relay
398-421Interface board, IF500 Profinet
  
 Pirani Gauges
350-400PSG010 DN 10 ISO-KF
350-430PSG017 DN 16 ISO-KF
350-431PSG017 DN 16 CF-F
350-420PSG018 DN 16 ISO-KF
350-424PSG018 DN 16 CF-F
350-423PSG018 DN 40 CF-F
  
 Cold Cathode Gauges
399-840MAG050 DN 25 ISO-KF
399-841MAG050 DN 40 ISO-KF
399-842MAG050 DN 40 CF-F
399-845MAG060 DN 40 ISO-KF
399-846MAG060 DN 40 CF-F
399-847MAG070 DN 40 ISO-KF
399-848MAG070 DN 40 CF-F
399-849MAG084 DN 40 ISO-KF
399-850MAG084 DN 40 CF-F
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