Vacuum Gauge Controller

VGC094

The modular all-in solution for vacuum control

Drop-in Options

Revolutionize your vacuum gauge experience with us!

VGC094 is a prestigious solution for vacuum process measurement, control and data log. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10^-11 to 1000 mbar. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron gauges) by two sets of measurement boards. The controller provides the latest digital communication interfaces (USB, RS485, Ethernet) and can be customized with users' specific communication standards thanks to individual interface boards (PROFIBUS, PROFINET). VGC094 is the ideal solution for applications with demanding performance, such as operation from long distance, high temperature or high ionizing radiation exposure.

Advantages

Complete solution for vacuum monitoring and control monitor from 1×10^-11 to 1000 mbar, even at long distance
Bright and clear screen
Bar graph display with set-point or pressure vs. time views
Simple sensor operation with intuitive and guided menus for parameter, sensor or general settings
Data and parameter log function with USB port (rear side) and USB flash drive (front side)
High resolution – 16 bit A/D converter
4 programmable 0 to 10 V chart recorder output
Four free definable setpoints per channel with adjustable hysteresis
RS485, Ethernet, optional RS232 and fieldbus communication interfaces

Pirani gauges

PSG010

PSG017

PSG018

Pressure range	8×10^-4 … 1000 mbar

Feedthrough \| Internal seal	Glass \| Elastomer (FPM)

Bake-out temperature range	≤100°C

Ionizing radiation tolerance	-

Features	Tungsten (W) filament

Pressure range	8×10^-4 … 1000 mbar

Feedthrough \| Internal seal	AI₂O₃ ceramic \| Metal

Bake-out temperature range	≤250°C

Ionizing radiation tolerance	10⁶ Gy

Features	Nickel (Ni) filament, corrosion resistant

Pressure range	8×10^-4 … 1000 mbar

Feedthrough \| Internal seal	AI₂O₃ceramic \| Metal

Bake-out temperature range	≤250°C

Ionizing radiation tolerance	10⁶ Gy

Features	Tungsten (W) filament

Inverted magnetron cold cathode gauges

MAG050

MAG060

MAG070

MAG084

Pressure range	2×10^-9 mbar to 5×10^-3 mbar

Feedthrough \| Internal seal	AI₂O₃ ceramic \| Elastomer (FPM)

Bake-out temperature range	≤150°C

Ionizing radiation tolerance	-

Magnetic field immunity	-

Features	Coax connector

Pressure range	1×10^-10 mbar to 5×10^-3 mbar

Feedthrough \| Internal seal	AI₂O₃ ceramic \| Metal

Bake-out temperature range	≤250°C

Ionizing radiation tolerance	10⁷ Gy

Magnetic field immunity	-

Features	Coax connector

Pressure range	1×10^-11 mbar to 5×10^-3 mbar

Feedthrough \| Internal seal	AI₂O₃ ceramic \| Metal

Bake-out temperature range	≤250°C

Ionizing radiation tolerance	10⁷ Gy

Magnetic field immunity	-

Features	Triax connector

Pressure range	1×10^-8 mbar to 5×10^-3 mbar

Feedthrough \| Internal seal	AI₂O₃ ceramic \| Metal

Bake-out temperature range	≤230°C

Ionizing radiation tolerance	10⁷ Gy

Magnetic field immunity
Axial	≤280 mT
Radial	≤180 mT

Features	Double ionization chamber principle Coax connector

Measurement configurations

Slot A + B

Slot C

Board type

Double Pirani measurement boards (PI 300 D, DN or DL)

Double Cold Cathode measurement boards (PE 300 DC9)

Pirani + Cold Cathode combination measurement boards (CP 300 C9, C10, T11, T11L)

Board type

Interface board

IF 300 A, B, C, P, IF301 P, IF 500 PN

Measurement boards - Pirani

PI 300 D

PI 300 DN

PI 300 DL

Measurement channels	Doube Pirani (2 sensors)

Gauge type	PSG010 / PSG018

Max operating distance
Pirani	≤100 m
Cold cathode	-

Measurement channels	Doube Pirani (2 sensors)

Gauge type	PSG017

Max operating distance
Pirani	≤100 m
Cold cathode	-

Measurement channels	Doube Pirani (2 sensors)

Gauge type	PSG010 / PSG018

Max operating distance
Pirani	≤500 m
Cold cathode	-

Measurement boards - Cold Cathode

PE 300 DC9

Measurement channels	Double Cold Cathode (2 sensors)

Gauge type	MAG050 / MAG060

Max operating distance	-
Pirani	-
Cold cathode	≤100 m¹⁾
¹⁾ ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range

Measurement boards - Pirani / Cold Cathode combination

CP 300 C9

CP 300 C10

CP 300 T11

CP 300 T11L

Measurement channels	Pirani + Cold Cathode combination

Gauge type	PSG010 or PSG018 MAG050 or MAG60 or MAG084

Max operating distance
Pirani	≤100 m
Cold cathode	≤100 m ¹⁾
¹⁾≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range

Measurement channels	Pirani + Cold Cathode combination

Gauge type	PSG010 or PSG018 MAG050 or MAG60

Max operating distance
Pirani	≤100 m
Cold cathode	≤100 m ¹⁾
¹⁾≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range

Measurement channels	Pirani + Cold Cathode combination

Gauge type	PSG010 or PSG018 MAG070

Max operating distance
Pirani	≤100 m
Cold cathode	≤500 m

Measurement channels	Pirani + Cold Cathode combination

Gauge type	PSG010 or PSG018 MAG070

Max operating distance
Pirani	≤500 m
Cold cathode	≤500 m

Interface boards

IF 300 A

IF 300 B

IF 300 C

IF 300 P

IF 301 P

IF 500 PN

Communication protocol

RS232C interface and relays (1.5 A)

Communication protocol

RS232 interface and relays (4.0 A)

Communication protocol

RS422 interface and relays (1.5 A)

Communication protocol

PROFIBUS interface and relays (1.5 A)

Communication protocol

PROFIBUS interface and solid state relays (0.5 A)

Communication protocol

PROFINET interface

Specifications

VGC094

Measurement channel	4
Display	LCD, LED backlight
Measurement rate	100 s^-1
Display rate	10 s^-1
Measurement range	1 x 10^-11 ... 1000 mbar
Measurement unit (selectable)	mbar, Torr, hPa, Micron, V
Slots for plug-in boards	2 measurement boards 1 interface board
Setpoint relays	4
Error relay	1
Channel assignement	freely assignable
Adjustment range	sensor dependent
Hysteresis	adjustable
Rely contact	floating changeover contact
Contact rating	30 V (ac) / 1.5 A
Contact rating	30 V (dc) / 1.5 A
Connector	D-sub, 25-pin, female
Analog output	4
Range	0 ... 10 V / 4 ... 20 mA
Interface (digital)	USB slave, master, RS485, Ethernet, USB Type A (flash drive), USB Type B, M12 5-pin FCC68/RJ45
Power supply	100 ... 240 V (ac)
Frequency	50 ... 60 Hz
Operation temperature	+5 ... +50°C

Part number

Accessories

398-401

VGC094 Vacuum Gauge Controller

	Cable for PSG010 80°C Cable connectors: Amphenol / Amphenol
BG548402-T	3 m (9.9 ft)
BG548403-T	6 m (19.8 ft)
BG548450-T	10 m (33 ft)
BG548451-T	15 m (49 ft)

	Cable for PSG017/018 80°C Cable connectors: Amphenol / Push-pull self-latching
BG548308-T	3 m (9.9 ft)
BG548309-T	6 m (19.8 ft)
BG548456-T	10 m (33 ft)
BG548457-T	15 m (49 ft)

	Cable for PSG017/018 250°C Cable connectors: Amphenol / Push-pull self-latching
BG548414-T	3 m (9.9 ft)
BG548465-T	6 m (19.8 ft)
BG448047-T	10 m (33 ft)
BG448043-T	15 m (49 ft)

	Extensions cables for PSG010/017/018 80°C Cable connectors: Amphenol / Amphenol
BG548466-T	10 m (33 ft)
BG548468-T	20 m (65 ft)
BG548470-T	30 m (99 ft)

	Cable for MAG050/060/084 80°C Cable connectors: Bayonet, SHV / SHV
BG548406-T	3 m (9.9 ft)
BG548407-T	6 m (19.8 ft)
BG548419-T	10 m (33 ft)
BG548483-T	15 m (49 ft)

	Cable for MAG050/060/084 250°C Cable connectors: Bayonet, SHV / SHV
BG548542-T	3 m (9.9 ft)
BG548543-T	6 m (19.8 ft)
BG448045-T	10 m (33 ft)
BG548989-T	15 m (49 ft)

	Cable for MAG070 80°C Cable connectors: Push-pull self-latching, Triax / Triax
BG548306-T	3 m (9.9 ft)
BG548317-T	6 m (19.8 ft)
BG548490-T	10 m (33 ft)
BG548491-T	15 m (49 ft)

	Measurement boards
IG546920-T	Double Pirani measurement board, PI 300 D
IG549212-T	Double Pirani measurement board, PI 300 DL
IG549214-T	Double Pirani measurement board, PI 300 DN
IG441375-T	Double cold cathode measurement board, PE 300 DC9
IG441000-T	Pirani/Cold cathode measurement board, CP 300 C9
IG441114-T	Pirani/Cold cathode measurement board, CP 300 C10
IG441080-T	Pirani/Cold cathode measurement board, CP 300 T11
IG441120-T	Pirani/Cold cathode measurement board, CP 300 T11L

	Interface boards
IG441130-T	Interface and relay board, IF300A RS232C
IG441250-T	Interface and relay board, IF300B RS232
IG441390-T	Interface and relay board, IF300C RS422
IG441395-T	Interface and relay board, IF300P PROFIBUS
IG441396-T	Interface and relay board, IF301P PROFIBUS semi relay
398-421	Interface board, IF500 PROFINET

	Pirani Gauges
350-400	PSG010 DN 10 ISO-KF
350-430	PSG017 DN 16 ISO-KF
350-431	PSG017 DN 16 CF-F
350-420	PSG018 DN 16 ISO-KF
350-424	PSG018 DN 16 CF-F
350-423	PSG018 DN 40 CF-F

	Cold Cathode Gauges
399-840	MAG050 DN 25 ISO-KF
399-841	MAG050 DN 40 ISO-KF
399-842	MAG050 DN 40 CF-F
399-845	MAG060 DN 40 ISO-KF
399-846	MAG060 DN 40 CF-F
399-847	MAG070 DN 40 ISO-KF
399-848	MAG070 DN 40 CF-F
399-849	MAG084 DN 40 ISO-KF
399-850	MAG084 DN 40 CF-F

Downloads

Datasheets

Vacuum Gauge Controller VGC094

pdf • 371,0 KB • English • Datasheets

Manuals

Operating Manual VGC094

pdf • 6,2 MB • English

Operating Manual Plug-In Boards for Total Pressure Gauge Controller VGC094

pdf • 1,3 MB • English

Gebrauchsanleitung VGC094

pdf • 4,3 MB • German

Communication Protocol PROFINET Interface Board for Total Pressure Gauge Controller VGC094

pdf • 800,5 KB • English

Communication Protocol PROFIBUS-DP Interface Board for Total Pressure Gauge Controller TPG300, VGC094

pdf • 1,4 MB • English

3D Step Files

VGC094

stp • 11,9 MB • 3D Files

Firmware

Firmware VGC094 V1.30

zip • 476,2 KB • German, Japanese, Korean, Spanish, Chinese, English • Firmwares

Other Files

EthernetConfiguration Tool V1.06

zip • 34,0 MB • German, Japanese, Korean, Spanish, Chinese, English

EU Declaration of Conformity VGC094

pdf • 163,8 KB • German, English

IF300P-301P PROFIBUS GSD file

gsd • 1,5 KB • German, Japanese, Korean, Spanish, Chinese, English

IF500PN PROFINET GSDML file

zip • 8,5 KB • German, Japanese, Korean, Spanish, Chinese, English

Installation Manual VGC094

pdf • 386,6 KB • German, English

USB Update Tool V1.6

zip • 2,1 MB • German, Japanese, Korean, Spanish, Chinese, English

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