Vacuum Gauge Controller

VGC094

The modular all-in solution for vacuum control

VGC094

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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VGC094 is a prestigious solution for vacuum process measurement, control and data log. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10-11 to 1000 mbar. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron gauges) by two sets of measuring cards. The controller provides latest digital communication interfaces (USB, RS485, Ethernet) and can be customized with user's specific communication standards thanks to individual communication cards (Profibus, Profinet). VGC094 is the ideal solution for applications with demanding performance, such as operation from long distance, high temperature or high ionizing radiation exposure.

Advantages

  • Complete solution for vacuum monitoring and control monitor from 1×10-11 to 1000 mbar, even at long distance
  • Bright and clear screen
  • Bar graph display with set-point or pressure vs. time views
  • Simple sensor operation with intuitive and guided menus for parameter, sensor or general settings
  • Data and parameter log function with USB port (rear side) and USB flash drive (front side)
  • High resolution – 16 bit A/D converter
  • 4 programmable 0 to 10 V chart recorder output
  • Four free definable setpoints per channel with adjustable hysteresis
  • RS485, Ethernet, optional RS232 and fieldbus communication interfaces

Pirani Gauges

PSG010
PSG017
PSG018
Pressure measurement range8×10-4 mbar to ATM
Internal sealingelastomer (FPM)
Bake-out temperature range≤100°C
Ionizing radiation tolerance-
FeaturesTungsten (W) filament
Pressure measurement range8×10-4 mbar to ATM
Internal sealingmetal
Bake-out temperature range≤250°C
Ionizing radiation tolerance106 Gy
FeaturesNickel (Ni) filament, corrosion resistant
Pressure measurement range8×10-4 mbar to ATM
Internal sealingmetal
Bake-out temperature range≤250°C
Ionizing  radiation tolerance106 Gy
FeaturesTungsten (W) filament

Inverted magnetron cold cathode

MAG050
MAG060
MAG070
MAG084
Pressure measurement range 2×10-9 mbar to 5×10-3 mbar
Internal sealingelastomer (FPM)
Bake-out temperature range≤150°C
Ionizing  radiation tolerance-
Magnetic field immunity-
FeaturesCoax connector
Pressure measurement range1×10-10 mbar to 5×10-3 mbar
Internal sealingmetal
Bake-out temperature range≤250°C
Ionizing  radiation tolerance107 Gy
Magnetic field immunity-
FeaturesCoax connector
Pressure measurement range1×10-11 mbar to 5×10-3 mbar
Internal sealingmetal
Bake-out temperature range≤250°C
Ionizing  radiation tolerance107 Gy
Magnetic field immunity-
FeaturesTriax connector
Pressure measurement range1×10-8 mbar to 5×10-3 mbar
Internal sealingmetal
Bake-out temperature range≤230°C
Ionizing  radiation tolerance107 Gy
Magnetic field immunity 
Axial≤280 mT
Radial≤180 mT
FeaturesDouble ionization chamber principle
Coax connector

Panel view

Measurement configurations

Slot A + B
Slot C
Card type

Double Pirani measurement cards (PI 300 D, DN or DL)

Double Cold Cathode measurement cards (PE 300 DC9)

Pirani + Cold Cathode combination measurement cards (CP 300 C9, C10, T11, T11L)

Card type

Communication card

IF 300 A, B, C, P, IF301 P, IF 500 PN

Measurement cards - Pirani

PI 300 D
PI 300 DN
PI 300 DL
Measurement channelsDoube Pirani (2 sensors)
Gauge typePSG010 / PSG018
Max operating distance 
Pirani≤100 m
Cold cathode-
Measurement channelsDoube Pirani (2 sensors)
Gauge typePSG017
Max operating distance 
Pirani≤100 m
Cold cathode-
Measurement channelsDoube Pirani (2 sensors)
Gauge typePSG010 / PSG018
Max operating distance 
Pirani≤500 m
Cold cathode-

Measurement cards - Cold Cathode

PE 300 DC9
PE 300 DC9
Measurement channelsDouble Cold Cathode (2 sensors)
Gauge typeMAG050 / MAG060
Max operating distance-
Pirani-
Cold cathode≤100 m1)

 

1) ≤60 m when using the lower measurement range

Measurement cards - Pirani / Cold Cathode combination

CP 300 C9
CP 300 C10
CP 300 T11
CP 300 T11L
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG050 or MAG60 or MAG084
Max operating distance 
Pirani≤100 m
Cold cathode≤100 m 1)

1) ≤60 m when using the lower measurement range
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG050 or MAG60
Max operating distance 
Pirani≤100 m
Cold cathode≤100 m 1)

1) ≤60 m when using the lower measurement range
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG070
Max operating distance 
Pirani≤100 m
Cold cathode≤500 m
Measurement channelsPirani + Cold Cathode combination
Gauge typePSG010 or PSG018
MAG070
Max operating distance 
Pirani≤500 m
Cold cathode≤500 m

Communication cards

IF 300 A
IF 300 B
IF 300 C
IF 300 P
IF 301 P
IF 500 PN
Communication protocolRS232C interface and relays (1.5 A)
Communication protocolRS232 interface and relays (4.0 A)
Communication protocolRS422 interface and relays (1.5 A)
Communication protocolProfibus interface and relays (1.5 A)
Communication protocolProfibus interface and solid state relays (0.5 A)
Communication protocolProfinet interface
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