VGC094
The modular all-in solution for vacuum control
Product configurator
Gemini™ MxG5xx
VGC094 is a prestigious solution for vacuum process measurement, control and data log. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10-11 to 1000 mbar. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron gauges) by two sets of measuring cards. The controller provides latest digital communication interfaces (USB, RS485, Ethernet) and can be customized with user's specific communication standards thanks to individual communication cards (Profibus, Profinet). VGC094 is the ideal solution for applications with demanding performance, such as operation from long distance, high temperature or high ionizing radiation exposure.
Advantages
- Complete solution for vacuum monitoring and control monitor from 1×10-11 to 1000 mbar, even at long distance
- Bright and clear screen
- Bar graph display with set-point or pressure vs. time views
- Simple sensor operation with intuitive and guided menus for parameter, sensor or general settings
- Data and parameter log function with USB port (rear side) and USB flash drive (front side)
- High resolution – 16 bit A/D converter
- 4 programmable 0 to 10 V chart recorder output
- Four free definable setpoints per channel with adjustable hysteresis
- RS485, Ethernet, optional RS232 and fieldbus communication interfaces
Pirani Gauges
| Pressure measurement range | 8×10-4 mbar to ATM |
| Internal sealing | elastomer (FPM) |
| Bake-out temperature range | ≤100°C |
| Radiation tolerance | - |
| Features | Tungsten (W) filament |
| Pressure measurement range | 8×10-4 mbar to ATM |
| Internal sealing | metal |
| Bake-out temperature range | ≤250°C |
| Radiation tolerance | 106 Gy |
| Features | Nickel (Ni) filament, corrosion resistant |
| Pressure measurement range | 8×10-4 mbar to ATM |
| Internal sealing | metal |
| Bake-out temperature range | ≤250°C |
| Radiation tolerance | 106 Gy |
| Features | Tungsten (W) filament |
Inverted magnetron cold-cathode
| Pressure measurement range | 2×10-9 mbar to 5×10-3 mbar |
| Internal sealing | elastomer (FPM) |
| Bake-out temperature range | ≤150°C |
| Radiation tolerance | - |
| Magnetic field immunity | - |
| Features | Coax connector |
| Pressure measurement range | 1×10-10 mbar to 5×10-3 mbar |
| Internal sealing | metal |
| Bake-out temperature range | ≤250°C |
| Radiation tolerance | 107 Gy |
| Magnetic field immunity | - |
| Features | Coax connector |
| Pressure measurement range | 1×10-11 mbar to 5×10-3 mbar |
| Internal sealing | metal |
| Bake-out temperature range | ≤250°C |
| Radiation tolerance | 107 Gy |
| Magnetic field immunity | - |
| Features | Triax connector |
| Pressure measurement range | 1×10-8 mbar to 5×10-3 mbar |
| Internal sealing | metal |
| Bake-out temperature range | ≤230°C |
| Radiation tolerance | 107 Gy |
| Magnetic field immunity | ≤280 mT |
| Features | Double ionization chamber principle Coax connector |
Panel view
Customizable Measurement Configurations
| Card type | Double Pirani measurement cards (PI 300 D, DN or DL) Double Cold Cathode measurement cards (PE 300 DC9) Pirani + Cold Cathode combination measurement cards (CP 300 C9, C10, T11, T11L) |
| Card type | Communication card IF 300 A, B, C, P, IF301 P, IF 500 PN |
Measurement cards - Pirani
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG010 / PSG018 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | - |
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG017 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | - |
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG010 / PSG018 |
| Max operating distance | |
| Pirani | ≤500 m |
| Cold cathode | - |
Measurement cards - Cold Cathode
| Measurement channels | Double Cold Cathode (2 sensors) |
| Gauge type | MAG050 / MAG060 |
| Max operating distance | - |
| Pirani | - |
| Cold cathode | ≤100 m1) |
1) ≤60 m when using the lower measurement range | |
Measurement cards - Pirani / Cold Cathode combination
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG050 or MAG60 or MAG084 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤100 m 1) |
1) ≤60 m when using the lower measurement range | |
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG050 or MAG60 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤100 m 1) |
1) ≤60 m when using the lower measurement range | |
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG070 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤500 m |
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG070 |
| Max operating distance | |
| Pirani | ≤500 m |
| Cold cathode | ≤500 m |
Communication cards
| Communication protocol | RS232C interface and relays (1.5 A) |
| Communication protocol | RS232 interface and relays (4.0 A) |
| Communication protocol | RS422 interface and relays (1.5 A) |
| Communication protocol | Profibus interface and relays (1.5 A) |
| Communication protocol | Profibus interface and solid state relays (0.5 A) |
| Communication protocol | Profinet interface |
