Capacitance Manometers

SKY® CDG200D

200°C temperature controlled, full scale 1 … 1000 Torr / mbar

SKY-CDG-100D-160D-200D
Drop-in Options

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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON SKY CDG200D high temperature manometers are your best choice for accurate total pressure measurement and control. 

CDG200D gauges are temperature controlled at 200 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. 

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Also available with EtherCAT digital interface!

Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

Specifications

1000 ... 500 Torr / mbar
200 ... 1 Torr / mbar
Accuracy % of reading0.4
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
Accuracy % of reading0.4
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   

Part Number

CDG160_200D Ordering information
CDG160_200D Ordering information

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