Capacitance Manometers

SKY® CDG100D

100°C temperature controlled, full scale 0.1 … 1000 Torr / mbar

Drop-in Options

Revolutionize your vacuum gauge experience with us!

INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control.

CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof.

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Also available with PROFINET^® digital interface!

Advantages

Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Two year warranty, longer life time with advanced heating concept and gauge protection
No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, CVD, PVD and other semiconductor production processes
Chemical and corrosive high temperature processes
General thin film and vacuum processes requiring gauge protection

Specifications

1000 ... 500 Torr / mbar

200 ... 1 Torr / mbar

0.5 ... 0.1 Torr / mbar

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.4

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130 / 30 ⁽³⁾

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Download full specifications

Part Number

Downloads

Brochures

SKY® CDG100-200D Brochure

pdf • 2,5 MB • English • Brochures

Vacuum Instrumentation with EtherCAT Brochure

pdf • 3,3 MB • English • Brochures

Datasheets

SKY® CDG100D Datasheet

pdf • 163,4 KB • English • Datasheets

SKY® CDG100D Datenblatt

pdf • 889,7 KB • German • Datasheets

SKY® CDG100D Ficha de datos

pdf • 931,7 KB • Spanish • Datasheets

SKY® CDG100D データシート

pdf • 1,0 MB • Japanese • Datasheets

SKY® CDG100D 数据表

pdf • 1,0 MB • Chinese • Datasheets

SKY® CDG100D 데이터시트

pdf • 934,9 KB • Korean • Datasheets

Dimension Drawings

SKY® CDG100D Dimensions

jpg • 653,2 KB • German, Japanese, Korean, Spanish, Chinese, English • Dimension Drawings

Manuals

SKY® CDG045D-200D DeviceNet Communication Protocol

pdf • 474,8 KB • English • Operating Manual

SKY® CDG100D 4-20 mA Current Loop Operating Manual

pdf • 1,1 MB • English • Operating Manual

SKY® CDG100D 4-20 mA Current Loop, Gebrauchsanleitung

pdf • 1,1 MB • German • Operating Manual

SKY® CDG100D Gebrauchsanleitung

pdf • 1,3 MB • German • Operating Manual

SKY® CDG100D Operating Manual

pdf • 1,3 MB • English • Operating Manual

SKY® CDG100D 数据表

pdf • 1,4 MB • Chinese • Operating Manual

SKY® CDGxxxD, CDGxxxD Communication protocol PROFINET

pdf • 874,8 KB • English • Operating Manual

SKY® Communication protocol PROFIBUS

pdf • 592,8 KB • English • Operating Manual

SKY®, Edge® CDGxxxD Communication manual RS232C

pdf • 187,4 KB • English • Operating Manual

SKY®, Edge® CDGxxxD Kommunikationsanleitung RS232C

pdf • 188,5 KB • German • Operating Manual

SKY®, Edge®, Stripe® CDG Communication protocol EtherCAT

pdf • 972,1 KB • English • Operating Manual

SKY®, Edge®, Stripe® CDG EtherCAT New Generation Communication Protocol

pdf • 2,1 MB • English • Operating Manual

3D Step Files

SKY® CDG100D 3D 16CF 9DSUB

zip • 542,8 KB • 3D Files

SKY® CDG100D 3D 16CF D-NET

zip • 225,3 KB • 3D Files

SKY® CDG100D 3D 16CF E-CAT

zip • 250,3 KB • 3D Files

SKY® CDG100D 3D 16CF P-BUS

zip • 222,7 KB • 3D Files

SKY® CDG100D 3D 16CF P-NET

zip • 301,7 KB • 3D Files

SKY® CDG100D 3D 16KF 15DSUB

stp • 937,0 KB • 3D Files

SKY® CDG100D 3D 16KF 9DSUB

zip • 536,8 KB • 3D Files

SKY® CDG100D 3D 16KF D-NET

zip • 220,4 KB • 3D Files

SKY® CDG100D 3D 16KF E-CAT

zip • 242,6 KB • 3D Files

SKY® CDG100D 3D 16KF P-BUS

zip • 217,5 KB • 3D Files

SKY® CDG100D 3D 16KF P-NET

zip • 293,1 KB • 3D Files

SKY® CDG100D 3D 4-VCR-f 15DSUB

zip • 257,9 KB • 3D Files

SKY® CDG100D 3D 4-VCR-f 9DSUB

zip • 543,2 KB • 3D Files

SKY® CDG100D 3D 4-VCR-f D-NET

zip • 302,4 KB • 3D Files

SKY® CDG100D 3D 4-VCR-f E-CAT

zip • 250,0 KB • 3D Files

SKY® CDG100D 3D 4-VCR-f P-BUS

zip • 820,0 KB • 3D Files

SKY® CDG100D 3D 4-VCR-f P-NET

zip • 354,3 KB • 3D Files

SKY® CDG100D 3D 4-VCR-m 15DSUB

zip • 277,6 KB • 3D Files

SKY® CDG100D 3D 4-VCR-m 9DSUB

zip • 565,8 KB • 3D Files

SKY® CDG100D 3D 4-VCR-m D-NET

zip • 869,0 KB • 3D Files

SKY® CDG100D 3D 4-VCR-m P-BUS

zip • 839,7 KB • 3D Files

SKY® CDG100D 3D 4-VCR-m P-NET

zip • 385,9 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f 15DSUB

zip • 193,1 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f 9DSUB

zip • 374,9 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f D-NET

zip • 230,8 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f E-CAT

zip • 254,0 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f Long 15DSUB

zip • 259,4 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f Long D-NET

zip • 853,0 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f Long E-CAT

zip • 292,5 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f Long P-BUS

zip • 821,9 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f Long P-NET

zip • 366,1 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f P-BUS

zip • 229,0 KB • 3D Files

SKY® CDG100D 3D 8-VCR-f P-NET

zip • 296,1 KB • 3D Files

SKY® CDG100D 3D Tube 15DSUB

zip • 179,6 KB • 3D Files

SKY® CDG100D 3D Tube 9DSUB

zip • 534,1 KB • 3D Files

SKY® CDG100D 3D Tube D-NET

zip • 219,7 KB • 3D Files

SKY® CDG100D 3D Tube E-CAT

zip • 239,9 KB • 3D Files

SKY® CDG100D 3D Tube P-BUS

zip • 216,3 KB • 3D Files

SKY® CDG100D 3D Tube P-NET

zip • 287,2 KB • 3D Files

Other

SKY® CDG EDS

zip • 7,6 KB • English

SKY® CDG GSD

zip • 1,6 KB • English

SKY® CDGxxxD PROFINET GSDML

zip • 3,1 KB • English

SKY®, Edge® CDG EtherCAT ESI V1.4

xml • 1,3 MB • English

SKY®, Edge® CDG EtherCAT New Generation ESI V2

zip • 10,5 KB • Japanese, English

The product is used in the following markets

Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets.

Learn more

Display

INFICON supports leading-edge technology and enables the highest quality Display products

Learn more

Energy

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

Learn more

Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

Learn more

Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

Learn more

Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma

Learn more

Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

Learn more

Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

Learn more

Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

Learn more

Advantages

Typical applications

Specifications

Part Number

Downloads

Related Products