Capacitance Manometers

SKY® CDG100D

100°C temperature controlled, full scale 0.1 … 1000 Torr / mbar

SKY-CDG-100D-160D-200D

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. 

CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. 

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Also available with Profinet® digital interface!

Advantages

  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive high temperature processes
  • General thin film and vacuum processes requiring gauge protection

Specifications

1000 ... 500 Torr / mbar
200 ... 1 Torr / mbar
0.5 ... 0.1 Torr / mbar
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
Accuracy % of reading0.4
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms130 / 30 (3)
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
Download full specifications

Part Number

CDG100D Ordering information
CDG100D Ordering information

Downloads

3D Step Files
CDG100D 16CF
zip 151,3 KB
CDG100D 16CF D-Net
zip 179,1 KB
CDG100D 16CF ECAT
stp 1,4 MB
CDG100D 16CF P-Bus
zip 177,9 KB
CDG100D 16CF P-Net
zip 241,3 KB
CDG100D 16KF
zip 146,5 KB
CDG100D 16KF D-Net
zip 176,1 KB
CDG100D 16KF ECAT
stp 1,3 MB
CDG100D 16KF P-Bus
zip 173,5 KB
CDG100D 16KF P-Net
zip 230,9 KB
CDG100D 4VCR D-Net
zip 302,3 KB
CDG100D 4VCR ECAT
stp 1,4 MB
CDG100D 4VCR female
zip 258,0 KB
CDG100D 4VCR male
zip 277,6 KB
CDG100D 8VCR D-Net
zip 185,0 KB
CDG100D 8VCR ECAT
stp 1,4 MB
CDG100D 8VCR female
zip 156,2 KB
CDG100D 8VCR female long
zip 259,4 KB
CDG100D 8VCR P-Bus
zip 182,8 KB
CDG100D 8VCR P-Net
zip 235,4 KB
CDG100D tube
zip 146,0 KB
CDG100D tube D-Net
zip 175,2 KB
CDG100D tube ECAT
stp 1,3 MB
CDG100D tube P-Net
zip 231,6 KB
CDG100D tubeP-Bus
zip 173,7 KB
CDG100D_4-VCR female
stp 1,2 MB
CDG100D_4-VCR female_P-Bus
stp 4,9 MB
CDG100D_4-VCR female_P-Net
stp 1,9 MB
CDG100D_4-VCR male_D-Net
stp 5,1 MB
CDG100D_4-VCR male_P-Bus
stp 5,0 MB
CDG100D_4-VCR male_P-Net
stp 2,0 MB
CDG100D_8-VCR female long_D-Net
stp 5,0 MB
CDG100D_8-VCR female long_P-Bus
stp 4,9 MB
CDG100D_8-VCR female long_P-Net
stp 1,9 MB
CDG100D_8VCR_long_ECAT_II
stp 1,4 MB
CDG100D_9DSUB_16CF
stp 3,0 MB
CDG100D_9DSUB_16KF
stp 2,9 MB
CDG100D_9DSUB_4VCR female
stp 3,0 MB
CDG100D_9DSUB_4VCR male
stp 3,1 MB
CDG100D_9DSUB_8VCRf
stp 2,1 MB
CDG100D_9DSUB_tube
stp 2,9 MB
Edge CDGxxxD2 16CF
zip 477,0 KB
Edge CDGxxxD2 16CF EtherCAT
stp 1,5 MB
Edge CDGxxxD2 16KF
zip 471,5 KB
Edge CDGxxxD2 16KF EtherCAT
stp 1,4 MB
Edge CDGxxxD2 8VCR EtherCAT
stp 1,5 MB
Edge CDGxxxD2 tube EtherCAT
stp 1,4 MB
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