Capacitance Manometers

SKY® CDG100D

100°C temperature controlled, full scale 0.1 … 1000 Torr / mbar

INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control.

CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof.

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Also available with Profinet^® digital interface!

Advantages

Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Two year warranty, longer life time with advanced heating concept and gauge protection
No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, CVD, PVD and other semiconductor production processes
Chemical and corrosive high temperature processes
General thin film and vacuum processes requiring gauge protection

Specifications

1000 ... 500 Torr / mbar

200 ... 1 Torr / mbar

0.5 ... 0.1 Torr / mbar

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.4

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130 / 30 ⁽³⁾

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Download full specifications

Part Number

CDG100D Ordering information

CDG100D Ordering information

Downloads

Brochures

Brochure CDG100-200D

pdf • 2,4 MB • English

EtherCAT Brochure

pdf • 1,6 MB • English

Datasheets

SKY® CDG100D 0.1 ... 1000 Torr / mbar DE

pdf • 889,7 KB • German

SKY® CDG100D 0.1 ...1000 Torr / mbar JA

pdf • 1,0 MB • Japanese

SKY® CDG100D 0.1 ... 1,000 Torr/mbar KO

pdf • 934,9 KB • Korean

SKY® CDG100D 0.1 ... 1000 Torr / mbar

pdf • 931,7 KB • Spanish

SKY® CDG100D 0.1 ... 1000 Torr / mbar

pdf • 2,9 MB • English

SKY® CDG100D 0.1 ... 1,000 Torr/mbar CN

pdf • 1,0 MB • Chinese

Dimension Drawings

CDG100D SKY Dimension Drawing

jpg • 653,2 KB • German, Japanese, Korean, Spanish, Chinese, English

Manuals

Manual CDG100D ZN

pdf • 1,3 MB • Chinese

Gebrauchsanleitung CDG100D 4-20 mA Current Loop

pdf • 1,1 MB • German

pdf • 1,0 MB • English

CDGxxxD Communication manual RS232C

pdf • 187,4 KB • English

CDGxxxD Kommunikationsanleitung RS232C

pdf • 188,5 KB • German

Communication Protocol - DeviceNet - CDG045D-200D EN

pdf • 474,8 KB • English

Communication protocol EtherCAT

pdf • 972,1 KB • English

Communication protocol EtherCAT new generation

pdf • 2,1 MB • English

Communication protocol Profibus

pdf • 592,8 KB • English

Communication protocol Profinet

pdf • 874,8 KB • English

Gebrauchsanleitung SKY® CDG100D

pdf • 1,0 MB • German

Manual CDG100D 4-20 mA Current loop

pdf • 1,1 MB • English

3D Step Files

zip • 151,3 KB

CDG100D 16CF D-Net

zip • 179,1 KB

CDG100D 16CF ECAT

CDG100D 16CF P-Bus

zip • 177,9 KB

CDG100D 16CF P-Net

zip • 241,3 KB

zip • 146,5 KB

CDG100D 16KF D-Net

zip • 176,1 KB

CDG100D 16KF ECAT

CDG100D 16KF P-Bus

zip • 173,5 KB

CDG100D 16KF P-Net

zip • 230,9 KB

CDG100D 4VCR D-Net

zip • 302,3 KB

CDG100D 4VCR ECAT

CDG100D 4VCR female

zip • 258,0 KB

CDG100D 4VCR male

zip • 277,6 KB

CDG100D 8VCR D-Net

zip • 185,0 KB

CDG100D 8VCR ECAT

CDG100D 8VCR female

zip • 156,2 KB

CDG100D 8VCR female long

zip • 259,4 KB

CDG100D 8VCR P-Bus

zip • 182,8 KB

CDG100D 8VCR P-Net

zip • 235,4 KB

zip • 146,0 KB

CDG100D tube D-Net

zip • 175,2 KB

CDG100D tube ECAT

CDG100D tube P-Net

zip • 231,6 KB

CDG100D tubeP-Bus

zip • 173,7 KB

CDG100D_4-VCR female

CDG100D_4-VCR female_P-Bus

CDG100D_4-VCR female_P-Net

CDG100D_4-VCR male_D-Net

CDG100D_4-VCR male_P-Bus

CDG100D_4-VCR male_P-Net

CDG100D_8-VCR female long_D-Net

CDG100D_8-VCR female long_P-Bus

CDG100D_8-VCR female long_P-Net

CDG100D_8VCR_long_ECAT_II

CDG100D_9DSUB_16CF

CDG100D_9DSUB_16KF

CDG100D_9DSUB_4VCR female

CDG100D_9DSUB_4VCR male

CDG100D_9DSUB_8VCRf

CDG100D_9DSUB_tube

Edge CDGxxxD2 16CF

zip • 477,0 KB

Edge CDGxxxD2 16CF EtherCAT

Edge CDGxxxD2 16KF

zip • 471,5 KB

Edge CDGxxxD2 16KF EtherCAT

Edge CDGxxxD2 8VCR EtherCAT

Edge CDGxxxD2 tube EtherCAT

Other

EtherCAT ESI file CDG V1_4_0_0

xml • 1,3 MB • English

EtherCAT new generation ESI file CDG V2_0_0_0

zip • 10,5 KB • Japanese, English

Profinet GSDML File for CDGxxxD

zip • 3,1 KB • English

Software EDS for CDGxxxD

zip • 7,6 KB • English

Software GSD for CDGxxxD

zip • 1,6 KB • English

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