Pirani Gauges

PPG550

ATM TO MEDIUM VACUUM GAUGE

Pirani-PPG570
Drop-in Options

Revolutionize your vacuum gauge experience with us!

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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The new INFICON Pirani Piezo combination gauge (PPG550) is based on the most advanced MEMS (Microelctromechanical Systems) sensor technology available.

The Pirani/ Piezo combination technology miniaturized in the MEMS process enables the construction of a very small and thus space-saving sensor, which makes it possible to keep the overall height of the measuring device very small.

In addition to the advantage of the low height, a Pirani based on MEMS technology also offers the advantage of measuring deeper and more accurately in the HV range than a classic Pirani. In combination with a MEMS piezo sensor, mounted in the same flange, the Pirani gauge becomes a real vacuum wide range gauge, extending the measuring range far beyond the usual 1000 mbar, also towards the atmosphere. At the same time the MEMS piezo sensor provides gas type independent pressure measurement in the range of 2 ... 1333 mbar. Another advantage of the technologies mentioned is the increased resistance to acceleration forces and vibrations.

Last but not least the new INFICON PPG550 can be used to direct drop in replace the so called  MKS910 “DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. Inficon offes same connectors/ pin assignment, analog output and RS232/485 compatibility. 

Advantages

  • Gas type independent above 2 mbar – allows safe venting with any gas mixture 
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection 
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration 
  •  Digital interfaces RS232/ RS485 
  • Compliance & standards: CE, EN, UL, CSA, RoHS 
  • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA 
  • Compliance & standards: CE, EN, UL, CSA, RoHS 

Typical applications

  • Use in Analytical equipment/ mass spectrometers
  • Physical vapor deposition 
  • Fore-line measurement 
  •  Gas-backfilling 

Specifications

Measurement range (N2)mbar1x10-6 … 1333
   
Accuracy  
100 ... 1333 mbar% of reading0.5
800 ... 1099 mbar% of reading0.25
100 ... 800 mbar% of reading0.5
2 ... 99.9 mbar% of reading1
1 x 10-4 ... 1.99 mbar% of reading5
1 x 10-5 ... 9.99 x 10-5 mbar% of reading25
   
Temperature compensation°C+10 … +50
   
Temperature measurement absolute accuracy°C+/-1.5 (0 … +80)
   
Supply voltage at the gaugeV (dc)+12 … 30
Download full specifications

Part Number

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INFICON Communicator V1.0

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