Pirani Gauges



Drop-in Options

Revolutionize your vacuum gauge experience with us!

Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
Your configuration has been successfully sent!

The new INFICON Pirani Piezo combination gauge (PPG550) is based on the most advanced MEMS (Microelctromechanical Systems) sensor technology available.

The Pirani/ Piezo combination technology miniaturized in the MEMS process enables the construction of a very small and thus space-saving sensor, which makes it possible to keep the overall height of the measuring device very small.

In addition to the advantage of the low height, a Pirani based on MEMS technology also offers the advantage of measuring deeper and more accurately in the HV range than a classic Pirani. In combination with a MEMS piezo sensor, mounted in the same flange, the Pirani gauge becomes a real vacuum wide range gauge, extending the measuring range far beyond the usual 1000 mbar, also towards the atmosphere. At the same time the MEMS piezo sensor provides gas type independent pressure measurement in the range of 2 ... 1333 mbar. Another advantage of the technologies mentioned is the increased resistance to acceleration forces and vibrations.

Last but not least the new INFICON PPG550 can be used to direct drop in replace the so called  MKS910 “DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. Inficon offes same connectors/ pin assignment, analog output and RS232/485 compatibility. 


  • Gas type independent above 2 mbar – allows safe venting with any gas mixture 
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection 
  • Versatile of mounting orientation – provides engineering freedom in tool design
  •  Selectable analog output signal for easy system integration 
  •  Digital interfaces RS232/ RS485 
  • Compliance & standards: CE, EN, UL, CSA, RoHS 
  • Able to direct drop in replace MKS910 “DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers” as well as MKS925  “Micro Pirani™ Vacuum Pressure Transducers”. DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MA 
  • Compliance & standards: CE, EN, UL, CSA, RoHS 

Typical applications

  • Use in Analytical equipment/ mass spectrometers
  • Physical vapor deposition 
  • Fore-line measurement 
  •  Gas-backfilling 


Measurement range (N2)mbar1x10-6 … 1333
100 ... 1333 mbar% of reading0.5
800 ... 1099 mbar% of reading0.25
100 ... 800 mbar% of reading0.5
2 ... 99.9 mbar% of reading1
1 x 10-4 ... 1.99 mbar% of reading5
1 x 10-5 ... 9.99 x 10-5 mbar% of reading25
Temperature compensation°C+10 … +50
Temperature measurement absolute accuracy°C+/-1.5 (0 … +80)
Supply voltage at the gaugeV (dc)+12 … 30
Download full specifications

Part Number

Download Software

INFICON Communicator V1.0

1. Fill out the software download form with the necessary information.
2. Receive an email with instructions on how to download the software.

The product is used in the following markets
Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets. 

Learn more

From electrode production to end-of-line testing

Learn more

INFICON supports leading-edge technology and enables the highest quality Display products

Learn more

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

Learn more

Refrigeration and air conditioning technology is undoubtedly one of the important topics of the 21st century. Effectiveness of use, energy efficiency, and last but not least optimal temperatures or an optimal climate (in the private as well as commercial sector) play an important role. 

Learn more
Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

Learn more
Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

Learn more
Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma 

Learn more
Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

Learn more
Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

Learn more
Semiconductor Tool Manufacturer

The semiconductor industry is comprised of the design, manufacturing, assembly, and test of integrated circuits for use in data processing, communications, consumer electronics, automotive, and aerospace. 

Learn more
Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

Learn more
We require your consent for video content
More Information