Hot Ionization Gauges

Trigon™ BAG552

Medium to Ultra High Vacuum Single Gauge

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Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
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Gemini™ MxG5xx
Gemini™ MAG500
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For applications that require stand-alone hot ion gauge technology, the Trigon™ family includes the single technology Bayard-Alpert Hot Ion Gauge BAG552.

The BAG552 is designed for vacuum measurement of gases in the pressure range 5 × 10-10 ... 2 x 10-2 mbar. The supported dual filament offers superior accuracy, repeatability and longevity. The BAG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503.


  • Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range 
  • 2 filaments for Bayard-Alpert system 
  • Galvanic isolated electronics to avoid electric stray current 
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream 
  • Extended bakeability due to removable calibration data chips 
  • Set point relays 
  • Bright & big OLED display (90° rotateable) with user interface 
  • Analog output, RS232C serial interface, EtherCAT® 
  • Usable in conjunction with VGC50x Controller series 
  • RoHS compliance

Typical applications

  • Pressure measurement in Semiconductor processes
  • Industrial coating
  • General vacuum measurement and control on systems in the high to ultra high vacuum range


Measurement range (air, O2, CO, N2)5 × 10-10 … 2 × 10-2 mbar
1 × 10-8 … 2 × 10-2 mbar±15 of reading
Repeatability5% of reading, 10-8 … 2 × 10-2 mbar (after 10 min. stabilization)
Materials exposed to vacuumstainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten

Part Number

BAG552 Ordering Information
BAG552 Ordering Information

Spare Parts

Part NumberDescription
352-420BAG552 Spare sensor head, 25KF
352-421BAG552 Spare sensor head, 40CF
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