Hot Ionization Gauges
Trigon™ BAG552
Medium to Ultra High Vacuum Single Gauge
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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For applications that require stand-alone hot ion gauge technology, the Trigon™ family includes the single technology Bayard-Alpert Hot Ion Gauge BAG552.
The BAG552 is designed for vacuum measurement of gases in the pressure range 5 × 10-10 ... 2 x 10-2 mbar. The supported dual filament offers superior accuracy, repeatability and longevity. The BAG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503.
Advantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
Specifications
| Measurement range (air, O2, CO, N2) | 5 × 10-10 … 2 × 10-2 mbar |
| Accuracy | |
| 1 × 10-8 … 2 × 10-2 mbar | ±15 of reading |
| Repeatability | 5% of reading, 10-8 … 2 × 10-2 mbar (after 10 min. stabilization) |
| Materials exposed to vacuum | stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten |
Part Number
Spare Parts
| Part Number | Description |
| 352-420 | BAG552 Spare sensor head, 25KF |
| 352-421 | BAG552 Spare sensor head, 40CF |
The product is used in the following markets
