4. BAG402
Hot Ionization Gauges

BAG402

Medium to Ultra High Vacuum Gauge

Pirani-BAG402-BPG400-BPG402

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information

You can unsubscribe from these communications at any time. For more information please review our Privacy Policy.

Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
Your configuration has been successfully sent!
Back

The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. 

The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.

Advantages

  • Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Overpressure detection protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Automatic emission current selection reduces control complexity
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr		5×10-10 … 2.7×10-2
3.75×10-10 5×10-2
   
Accuracy   
10-8 … 10-2 mbar% of reading±15
   
Temperature  
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange without electronics °C80
   
Supply voltageV (dc)
A (dc)		+20 … +28
≤0.8
Download full specifications
Part Number
Accessories
Spare Parts
353-600BAG402 DSUB9 KF25
353-601BAG402 DSUB9 CF40
303-333Diagnostic cable 1.9m (P3)
354-484Spare sensor head BAG402 DN 25 ISO-KF
354-485Spare sensor head BAG402 DN 40 CF-R
The product is used in the following markets
Analytical-Instrumentation-Navi
Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets. 

Learn more
Battery-Market-Navi
Battery

From electrode production to end-of-line testing

Learn more
Display-Navi
Display

INFICON supports leading-edge technology and enables the highest quality Display products

Learn more
energy-market-navi
Energy

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

Learn more
Industrial-Manufacturing-Navi-2
Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

Learn more
Mobility_and_Automotive-Navi
Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

Learn more
Pharma_and_Medical-Navi
Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma 

Learn more
Research-and-Academia-Navi
Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

Learn more
Semiconductur-IDM-and-Foundry-Navi
Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

Learn more
Vacuum_Coating-Navi
Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

Learn more