BAG402

The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10^-10 mbar to 2.7×10^-2 mbar (3.75×10^-10 Torr to 5×10^-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package.

The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.

Advantages

Measurement range from 5×10^-10 mbar to 2.7×10^-2 mbar (3.75×10^-10 Torr to 5×10^-2 Torr)
Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
Overpressure detection protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Automatic emission current selection reduces control complexity
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
RoHS compliance

Typical applications

Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)	mbar Torr	5×10^-10 … 2.7×10^-2 3.75×10^-10 5×10^-2

Accuracy

10^-8 … 10^-2 mbar	% of reading	±15

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange without electronics	°C	80

Supply voltage	V (dc) A (dc)	+20 … +28 ≤0.8

Download full specifications

Part Number

Accessories

Spare Parts

353-600	BAG402 DSUB9 KF25
353-601	BAG402 DSUB9 CF40

303-333

Diagnostic cable 1.9m (P3)

354-484	Spare sensor head BAG402 DN 25 ISO-KF
354-485	Spare sensor head BAG402 DN 40 CF-R

Downloads

The product is used in the following markets

Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

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Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

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Energy

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

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Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

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Display

INFICON supports leading-edge technology and enables the highest quality Display products

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Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma

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Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important

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Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

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Battery

Around the globe, the battery industry is expanding production capacities. At the same time, it is continuously improving chemistry and production processes.

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