Hot Ionization Gauges
BAG402
Medium to Ultra High Vacuum Gauge
Drop-in Options
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package.
The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.
Advantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Specifications
| Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 2.7×10-2 3.75×10-10 5×10-2 |
| Accuracy | ||
| 10-8 … 10-2 mbar | % of reading | ±15 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange without electronics | °C | 80 |
| Supply voltage | V (dc) A (dc) | +20 … +28 ≤0.8 |
Part Number
Accessories
Spare Parts
| 353-600 | BAG402 DSUB9 KF25 |
| 353-601 | BAG402 DSUB9 CF40 |
| 303-333 | Diagnostic cable 1.9m (P3) |
| 354-484 | Spare sensor head BAG402 DN 25 ISO-KF |
| 354-485 | Spare sensor head BAG402 DN 40 CF-R |
Downloads
Manual
The product is used in the following markets
