The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package.
The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.
Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
Overpressure detection protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Automatic emission current selection reduces control complexity
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
Pressure measurement in semiconductor process and transfer chambers
General vacuum measurement and control in the low to ultra high vacuum range