Process Control and FDC
Collect the Right Information - Analyze the Right Data - Make the Right Decisions
Reset the filters to get results.
Smart Fault Detection and Classification provides real time data integration and analysis to predict excursions before they happen.
- Seamless integration of process equipment and sensor data allows data from multiple sources to be available for analysis
- Edge computing enables data collection and analysis to happen at the source for faster response and enhanced detection
- On Premises or Cloud-based installation offered to allow maximum flexibility of performance and cost
- Real Time and Run-by-Run analysis reduces scrap and improves process control
Provides unparalleled capability to automatically translate collected data into meaningful information.
- Automatic Machine Learning of factory processes
- Comprehensive visualization and analysis tools
- Provide augmentation for existing 3rd party FDC
Provides integration of facilities and subfab components with process information.
- Smart control/ Energy savings: Reduced energy usage by linking tool states to facilities
- Migrate to condition-based consumption: Reduced use of consumables/chemicals/gases (reduction of 15-50% typical)
- Smart and Predictive maintenance scheduling: Use data to create predictive maintenance routines
A knowledge-based, decision support software platform specifically designed to help factories return tools to production quickly and correctly.
- Step-by-step, dynamic guidance and needed support for BKM work
- Root cause analysis and identification based on historical and heuristic data trends
- Modeled linkage between control system events, troubleshooting, and remediation
Enabling fast, reliable deployment of integrated process monitoring across semiconductor tools and sensors.
- Powerful enough to run the FabGuard suite of products
- Capable of supporting INFICON sensors and third-party sensors
- Small footprint for ease of installation
- High-capacity hard drive for extended data storage
Suitable for any subfab equipment needing SEMI S2 compliance to perform process control.
- Integrated equipment and sensor data for unified analysis
- Edge-level processing for faster response and better detection
- Flexible installation options: on-premises or cloud
- Real-time, run-by-run analysis to reduce scrap and improve control
Innovative process control and decision support software
Smart Manufacturing through innovative process control and decision support software.
The most comprehensive and advanced Process Control and Maintenance Management Software Suite for the electronics manufacturing industry. Our solutions are proven to increase capital productivity, labor efficiency and overall factory efficiency by detecting and predicting excursions, automating complex decision making, and delivering industry-leading process control capability.