Process Control
FabGuard® Controller
A powerful yet compact solution for deployment of FabGuard software.
FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions.
These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide Statistical Process Control and Fault Detection Classification system.
FabGuard Controllers support INFICON sensors and third-party sensors, as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard high-speed controller.
Advantages
- Powerful enough to run the FabGuard suite of products
- Capable of supporting INFICON sensors and third-party sensors
- Small footprint for ease of installation
- High-reliability fanless industrial controller
- High-capacity hard drive for extended data storage
- Optional data acquisition boards
- INFICON solution for FabGuard deployment
Specifications
| Type | Industrial Form Factor | Industrial Form Factor 4 Port | Industrial Form Factor 6 Port |
| Size (Length) | 8.9 inches | 8.9 inches | 8.9 inches |
| Size (Width) | 9.5 inches | 9.5 inches | 9.5 inches |
| Size (Height) | 3.6 inches | 3.6 inches | 3.6 inches |
| CPU | i5-6500TE | i5-6500TE | i5-6500TE |
| Memory | 8-32 GB | 8-32 GB | 8-32 GB |
| Hard Disk | 500 GB-1TB | 500 GB-1TB | 1 TB |
| Operating System | Windows | Windows | Windows |
| Ethernet | 2 x GbE LAN | 4 x GbE LAN | 6 x GbE LAN |
| Other/Options | OPC Server | OPC Server | OPC Server |
The product is used in the following markets
