FabGuard® ASG-100 Fail-to-Safe Switch

In the demanding world of semiconductor manufacturing, SEMI S2 guidelines set the standard for ensuring equipment meets critical environmental, health, and safety requirements. Compliance not only helps keep people, equipment, and facilities safe, it ensures fabs can operate with confidence. 

The FabGuard® ASG-100 Fail-to-Safe Switch seamlessly integrates with INFICON FabGuard software so fabs can safely control subfab systems and equipment remotely with a SEMI S2 certified solution. This fail-to-safe remote switch is designed to keep systems operational without releasing unregulated harmful gases and chemicals into the environment (e.g., CO, CO2, NOx), even if the FabGuard control software loses communication with the target equipment. 

With ASG-100, fabs can improve process control and gain a clear view of potential impacts. With this information, users can understand when to turn off their subfab systems based on process tool state, thereby reducing the expensive consumption of greenhouse gases. Users who pair ASG-100 with FabGuard Facilities Monitor to safely control abatement systems have saved approximately 50% in fuel by toggling the abatement based on demand.