Process Control

FabGuard® FDC

Now is the Time for Smarter Manufacturing 

FabGuard preview

Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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FabGuard® is an extensive engineering tool kit that uses real time data from process equipment, advanced sensors, IoT devices, gauges, and subfab/facilities components together to provide the most comprehensive Fault Detection system available in the industry.

Real-Time Process Monitoring

INFICON’s FabGuard FDC System provides unparalleled capability to connect, collect, and translate data into meaningful information. Engineers use this information to develop deep insights into tool capability and process optimization. In addition to working alongside proven FDC techniques, powerful unsupervised Machine Learning with SmartFDC® enables FabGuard to automatically detect when changes occur.


  • Seamless integration of process equipment and sensor data 
  • Edge computing 
  • On Premises or Cloud-based 
  • Real Time and Run-by-Run analysis 
  • World-class connectivity  to sensors, gauges, IoT/ IIoT, process tools
  • Automatic Machine Learning

Smart Process Monitoring

FabGuard is a Smart process monitoring and control system that enables engineers to collect data from a wide range of sensors, gauges, facilities, and other devices to develop the most comprehensive view of process tools in the industry.

Smart Fault Detection and Classification_Smart Tool Digital Twin
Smart Fault Detection and Classification_Smart Tool Digital Twin

Collecting the right data at the right time is critical to building the comprehensive fault detection and enables process characterization. FabGuard’s dynamic data collection capabilities also maximizes the bandwidth of the tool to increase the breadth of data collected. 

Data collection is adjusted on-the-fly to match the needs of the process, sensors, support components, and the tool.

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Bring Process Experience to the Factory

INFICON field service and software development teams are experienced process and equipment engineers dedicated to solving real-world factory problems.

INFICON expertise spans all wafer diameters, flat panel sizes, device geometries, substrate types, and factories running no automation to factories that are fully automated.

Interested in More?

Contact us to help you maximize your factory operations.

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