Factory Operations Optimization

Factory Digital Twin

The Smart Data Warehouse.

See the Right Information - Create the Right Schedule - Make the Right Moves

factory dashboard

Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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The FPS Digital Twin collects all of the real-time operations events to compute hundreds of thousands of rows of cycle time and throughput data to drive powerful applications. It is the most critical building block for to developing a Smart factory.

Real-Time Factory Digital Twin

Semiconductor factories often have data in separate places that are useful and valuable to combine. 

Depending on the specifics of the systems that store the data however, there are often practical difficulties that complicate such efforts. With the FPS Data Warehouse, these struggles disappear.

Everything is smartly organized in one place.

Factory Digital Twin_Real-Time Factory Digital Twin
Factory Digital Twin_Real-Time Factory Digital Twin

Combines all important data sources:

  • MES
  • AMHS
  • Equipment Integration
  • Fault Detection
  • Advanced Process Control
  • Statistical Process Control
  • Planning
  • Any other systems

Once the integration is done, it's done.

The FPS Digital Twin common platform enables all factories to have the same look, feel, and messaging regardless of the type of other systems installed. This simplifies the installation of other FPS applications and enables end-user development of core software systems.

Integrate With all Factory Systems

At the start of a project, the Extract, Translate, Load (ETL) process brings all the relevant data into the warehouse. Everything from database links,3rd Party reports, flat files, and shell scripts are used to read from any data source.

Automatic Cycle Time and Throughput

The FPS Digital Twin automatically calculates cycle time (CT) and throughput (THP) from lot event data and provides a sophisticated look up architecture with intelligent fill-in logic to use it effectively. The Digital Twin always has a best guess for when a lot will finish on a tool, or arrive at an operation 6 steps away. Why is this important? Cycle Time and Throughput data are what  the  FPS Factory Schedulers use to look into the future and optimize the flow of Work in Process in the factory, and what Next Move relies on to call out upcoming operator actions. 

The Digital Twin along with the Dashboard also provides all the tools needed to understand the statistical quality and accuracy of the data. Through comprehensive throughput analysis, the system can quickly identify tool sets where event data is not reliable enough to generate state information, and where external or manually overriding data should be used. 

Read our White Paper here
Factory Digital Twin_Automatic Cycle Time and Throughput
Factory Digital Twin_Automatic Cycle Time and Throughput

Over Two Decades of Refinement and Industry Wisdom

The same Digital Twin serves as the base for FPS applications at all installations. With nearly a hundred distinct and diverse facilities currently using the Digital Twin, INFICON strives to solve client requests always in a general, rather than a site-specific way. As a result, the Data Warehouse is a repository of industry knowledge and best practices. It computes and stores a large array of useful and value added quantities that many clients do not think to ask about but are delighted when they discover them in the system. Besides key features like Enhanced Tool Performance states, Enhanced Cycle Time, and Throughput, there are smaller statistics like transit times, lot ships, line balance quantities, test wafer data, and more. When a new factory installs the FPS Digital Twin, that facility obtains solutions to problems and requests from more than two decades of diverse end user feedback.

Why Doesn't the MES Include All of This?

Although a MES provides much data for the Digital Twin, there is a technical reason for maintaining a separate digital twin for computing and storing value-added extrinsic quantities. A MES bears a heavy transactional load recording all Fab events in real time. Any computationally-intensive work is therefore better done on a different system.

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