Mass Spectrometers

Transpector® CPM 3

Fast, Field-Ready Process Monitoring System

Transpector-CPM

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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Performance, Reliability, and Versatility

INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.

Transpector CPM 3 provides proven return on investment to our partners through:

  • Industry Leading Measurement Technology
  • Robust and Adaptive Architecture
  • Ease of Maintenance
  • Superior Product Support

Features

  • Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
  • ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
  • Field-proven durability and reliability in the most demanding CVD and Etch applications
  • Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
  • Compact size—allows for easy integration into production semiconductor equipment
  • Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
  • Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
  • Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching

Specifications

100 AMU CPM
200 AMU CPM
300 AMU CPM
Total Pressure Range5E-7 - 1E-3 Torr
Detection Limit< 1 ppm
Process Pressure Range1E-8 Torr - 1.2 atm
Sensitivity (Low Emission)> 4E-6 Amps/Torr
Sensitivity (High Emission)> 2E-5 Amps/Torr
Total Pressure Range5E-7 - 1E-3 Torr
Detection Limit< 2 ppm
Process Pressure Range1E-8 Torr - 1.2 atm
Sensitivity (Low Emission)> 2E-6 Amps/Torr
Sensitivity (High Emission)> 1E-5 Amps/Torr
Total Pressure Range5E-7 - 1E-3 Torr
Detection Limit< 4 ppm
Process Pressure Range1E-8 Torr - 1.2 atm
Sensitivity (Low Emission)> 1E-6 Amps/Torr
Sensitivity (High Emission)> 5E-6 Amps/Torr
Download full specifications

Consumables

100 AMU CPM
200 AMU CPM
300 AMU CPM
Part NumberDescription
059-0196NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400Replacement c-ring
070-1042O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1CPM Replacement Diaphragm Kit 2 Stage
923-706-G1030 Torr HexBlock orifice (10.5 micron)
923-706-G310 Torr HexBlock orifice (20 micron)
923-706-G41 Torr HexBlock orifice (62 micron)
923-706-G610 mtorr HexBlock orifice (750 micron)
923-706-G7360 mtorr HexBlock orifice (120 micron)
923-706-G815 mtorr HexBlock orifice (350 micron)
923-706-G93 Torr HexBlock orifice (35 micron)
923-707-G110 Torr HexBlock sniffer (5 cm length)
923-707-G2100 Torr HexBlock sniffer (5 cm length)
923-707-G37 Torr HexBlock sniffer
961-707-G1Electron Multiplier Kit, Spare
964-710-G1Filament Kit CPM Tungsten
964-710-G2Filament Kit CPM Coated
964-711-G1Ion Source Kit CPM Tungsten
964-711-G2Ion Source Kit CPM Tungsten w/Liner
964-712-G1Ion Source Kit CPM Coated
964-712-G2Ion Source Kit CPM Coated w/Liner
Part NumberDescription
059-0196NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400Replacement c-ring
070-1042O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1CPM Replacement Diaphragm Kit 2 Stage
923-706-G1030 Torr HexBlock orifice (10.5 micron)
923-706-G310 Torr HexBlock orifice (20 micron)
923-706-G41 Torr HexBlock orifice (62 micron)
923-706-G610 mtorr HexBlock orifice (750 micron)
923-706-G7360 mtorr HexBlock orifice (120 micron)
923-706-G815 mtorr HexBlock orifice (350 micron)
923-706-G93 Torr HexBlock orifice (35 micron)
923-707-G110 Torr HexBlock sniffer (5 cm length)
923-707-G2100 Torr HexBlock sniffer (5 cm length)
923-707-G37 Torr HexBlock sniffer
961-707-G1Electron Multiplier Kit, Spare
964-710-G1Filament Kit CPM Tungsten
964-710-G2Filament Kit CPM Coated
964-711-G1Ion Source Kit CPM Tungsten
964-711-G2Ion Source Kit CPM Tungsten w/Liner
964-712-G1Ion Source Kit CPM Coated
964-712-G2Ion Source Kit CPM Coated w/Liner
300 AMU CPM
Part NumberDescription
059-0196NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400Replacement c-ring
070-1042O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1CPM Replacement Diaphragm Kit 2 Stage
923-706-G1030 Torr HexBlock orifice (10.5 micron)
923-706-G310 Torr HexBlock orifice (20 micron)
923-706-G41 Torr HexBlock orifice (62 micron)
923-706-G610 mtorr HexBlock orifice (750 micron)
923-706-G7360 mtorr HexBlock orifice (120 micron)
923-706-G815 mtorr HexBlock orifice (350 micron)
923-706-G93 Torr HexBlock orifice (35 micron)
923-707-G110 Torr HexBlock sniffer (5 cm length)
923-707-G2100 Torr HexBlock sniffer (5 cm length)
923-707-G37 Torr HexBlock sniffer
961-707-G1Electron Multiplier Kit, Spare
964-710-G1Filament Kit CPM Tungsten
964-710-G2Filament Kit CPM Coated
964-711-G1Ion Source Kit CPM Tungsten
964-711-G2Ion Source Kit CPM Tungsten w/Liner
964-712-G1Ion Source Kit CPM Coated
964-712-G2Ion Source Kit CPM Coated w/Liner

Spare Parts

100 AMU CPM
200 AMU CPM
300 AMU CPM
Part NumberDescription
032-0079Turbo Molecular Pump (w/CF40 flange)
059-0400Replacement c-ring
915-724-G1Package of three spare liners (used only with liner configured ion source)
922-204-G1Capillary assembly - 1.5 m
922-204-G3Capillary assembly - 3 m
923-403-P2CPM Valve Controller Manifold Assembly
923-417-G1Foreline Protection Kit, CPM
923-710-G1HexBlock orifice replacement tools
923-711-G1HexBlock valve replacement kit
923-712-G1Spare HexBlock orifice gasket (pack of five)
923-723-G22 Stage Diaphragm Foreline Pump
964-208-G11CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1CPM Cable Box Assembly
964-403-P1CPM Manifold Heater
964-603-G2CPM Controller Box
964-720-G1CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
Part NumberDescription
032-0079Turbo Molecular Pump (w/CF40 flange)
059-0400Replacement c-ring
915-724-G1Package of three spare liners (used only with liner configured ion source)
922-204-G1Capillary assembly - 1.5 m
922-204-G3Capillary assembly - 3 m
923-403-P2CPM Valve Controller Manifold Assembly
923-417-G1Foreline Protection Kit, CPM
923-710-G1HexBlock orifice replacement tools
923-711-G1HexBlock valve replacement kit
923-712-G1Spare HexBlock orifice gasket (pack of five)
923-723-G22 Stage Diaphragm Foreline Pump
964-208-G11CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1CPM Cable Box Assembly
964-403-P1CPM Manifold Heater
964-603-G2CPM Controller Box
964-720-G1CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
Part NumberDescription
032-0079Turbo Molecular Pump (w/CF40 flange)
059-0400Replacement c-ring
915-724-G1Package of three spare liners (used only with liner configured ion source)
922-204-G1Capillary assembly - 1.5 m
922-204-G3Capillary assembly - 3 m
923-403-P2CPM Valve Controller Manifold Assembly
923-417-G1Foreline Protection Kit, CPM
923-710-G1HexBlock orifice replacement tools
923-711-G1HexBlock valve replacement kit
923-712-G1Spare HexBlock orifice gasket (pack of five)
923-723-G22 Stage Diaphragm Foreline Pump
964-208-G11CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1CPM Cable Box Assembly
964-403-P1CPM Manifold Heater
964-603-G2CPM Controller Box
964-720-G1CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
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