Sensors & Feedthroughs
Crystal 12® Sensor
Auto Crystal Switching Maximizes Production Time
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller.
Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.
Features
- Holds 12 crystals with robust, automatic switching to maximize process up-time
- Easy-to-remove carousel allows fast replacement of all 12 crystals
- Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
- Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
- Optional mounting-post kit can be user-modified to accommodate metric hardware
Specifications
| Maximum bakeout temp with no water | 130°C |
| Maximum operating isothermal environment temperature with minimum water flow | 300° C |
| Size (maximum envelope) | 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed |
| Crystal exchange | Front-loading |
Accessories
Consumables
Spare Parts
| Name | Description |
| QCM Sensor Feedthroughs | QCM Sensor Feedthroughs |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
| Part Number | Description |
| 750-276-P3 | Actuator cover |
| 750-644-G1 | Housing |
| XL12-000100 | Deposition Shield, Crystal 12 Sensor |
| 750-286-P2 | Pneumatic actuator |
| 750-291-P1 | Detent |
| 750-902-G1 | Crystal 12 Kit |
| 750-294-P2 | Stop ratchet |
| 750-293-P2 | Ratchet |
| 750-256-P2 | Extension spring |
| 750-252-P2 | Spring post |
| 750-649-G1 | Electrical connection |
| 750-295-G1 | Pawl and actuator |
| 750-258-P2 | Bearing Shaft |
| 070-0779 | Ball bearing |
| XL12-001000 | Carousel Assembly, Crystal 12 Sensor |
| 750-650-P1 | Aperture plate (without dowel pin) |
| 070-1253 | Dowel pin |
| 750-651-P1 | Resistor network support |
| 750-655-P1 | Resistor network insulator |
| 750-642-G1 | Resistor Network |
| 750-661-P1 | Contact terminal (carousel component) |
| 750-656-P1 | Crystal insulator (carousel component) |
| 321-038-P6 | Leaf spring (carousel component) |
| 750-657-P1 | Grounding leaf spring |
| 750-671-P1 | Torsion spring |
| 750-626-P1 | Spring for sputtering head cover |
| 750-647-P1 | Spindle |
| 070-1268 | Spindle bearing (spindle component) |
| 070-1254 | E-Ring (spindle component) |
| 750-660-P1 | Location screw (spindle component) |
| 007-126 | 0.125 in. x 30 in. (3.175 mm x 762 mm) seamless tubing |
| 070-201 | #4 Split lockwasher |
| 084-004 | #4-40 X .187 Hex socket head screw |
| 070-398 | Retaining ring |
| 070-0867 | Shaft spacer |
| 070-170S | #2 Split Lockwasher SS Spare |
| 070-177 | #4-40 X 3.12 Hex head screw |
| 080-038S | Screw 0-80 x.375 LG Phil Pan HD SS Spare |
| 082-032S | Lock Washer #2 Stainless Steel Spare |
| 082-045 | #2-56 x .187 Phillips screw |
| 084-054 | #4 Split lock washer |
| 082-022 | #2 Flat washer |
| 082-024 | #2-56 x .250 Hex socket screw |
| 750-292-P2 | Detent spacer |
| 080-013 | #0-80 Split washer |
| 080-007-P1 | #0-80 x .170 Flat washer |
| 080-009-P1 | #0-80 X .188 Socket head screw |
| 084-048 | #4-40 x .250 Flat head screw |
| 750-665-P1 | #2-56 Torsion spring shoulder screw |
| 084-093S | Screw Socket HD 4-40 x 1.125 in Spare |
| 086-084-P2S | Screw Socket HD Set 6-32 x 0.125in Spare |
| 086-041 | #6 Flat washer |
| 086-038 | #6 Split lock washer |
| 086-036 | #6-32 x 3/8 socket head screw
|
| In-vacuum cables | |
| 321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
| 007-252 | In-vacuum cable, 30.5 cm (12 in.) |
| 321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
| 007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
| 007-059 | In-vacuum cable, 91.4 cm (36 in.) |
| 007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
| 321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
| 321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
| 321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
| 321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |
Downloads
3D Step Files
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