Vacuum Switch
VSD200
Setpoint range ambient -100 … +50 Torr

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON Vacuum Switches are designed for accurate and reliable pressure detection. These robust electronic switches are used in all vacuum applications, including pressure interlock.
The switches are available in two versions, absolute (references vacuum) or differential (references ambient).
Features
- IP 44 protection
- Relay output with potential free contacts
- High-accuracy temperature compensated sensor
- Application pressure range 1×10-9 mbar … 2 bar
Advantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
Specifiaction
-100 ... +50 Torr
-100 ... +50 mbar
Setpoint range | mbar Torr | – –99 … +46 |
Relay output | Relay output | n.o., n.c., potential free |
Setpoint accuracy | Torr | ±0.75 |
Materials exposed to vacuum | stainless steel | |
Hysteresis | Torr | 3 |
Setpoint range | mbar Torr | –99 … +46 – |
Relay output | Relay output | n.o., n.c., potential free |
Setpoint accuracy | Torr | ±0.75 |
Materials exposed to vacuum | stainless steel | |
Hysteresis | Torr | 3 |
Part Number

Downloads
Datasheets
VSD200 differential switch DE
pdf
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382,5 KB
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German
VSD200 differential switch ES
pdf
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423,7 KB
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Spanish
VSD200 differential switch JA
pdf
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479,5 KB
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Japanese
VSD200 differential switch KO
pdf
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411,0 KB
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Korean
VSD200 differential switch ZH
pdf
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455,8 KB
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Chinese
VSD200 differential switch EN
pdf
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369,9 KB
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English
Dimension Drawings
Manuals
3D Step Files
VSA200 / VSD200 4VCR female
zip
•
23,7 KB
•
German, Japanese, Korean, Spanish, Chinese, English
VSA200 / VSD200 4VCR male
zip
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37,4 KB
•
German, Japanese, Korean, Spanish, Chinese, English
VSA200 / VSD200 KF16
zip
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24,7 KB
•
German, Japanese, Korean, Spanish, Chinese, English
The product is used in the following markets