4. VSA200
Vacuum Switch

VSA200

Setpoint range 20 … 970 Torr

VSA200

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON Vacuum Switches are designed for accurate and reliable pressure detection. These robust electronic switches are used in all vacuum applications, including pressure interlock. 

The switches are available in two versions, absolute (references vacuum) or differential (references ambient).

Features

  • IP 44 protection
  • Relay output with potential free contacts
  • High-accuracy temperature compensated sensor
  • Application pressure range 1×10-9 mbar … 2 bar

Advantages

  • Corrosion resistant all stainless steel design
  • Robust design, cleanroom compliant
  • Easy installation with setpoints factory preset or field-adjustable

Typical Applications

  • Atmospheric pressure detection for all vacuum applications
  • Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
  • Vacuum to high vacuum

Specifications

1100 mbar
1000 Torr
Setpoint rangembar
Torr		30 … 1060
–
Admissible pressurebar (absolute)5
Setpoint accuracyTorr± 5
Response timems≤45
HysteresisTorr20
Setpoint rangembar
Torr		–
20 … 970
Admissible pressurebar (absolute)5
Setpoint accuracyTorr± 5
Response timems≤45
HysteresisTorr20
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Part Number

VSA200 Ordering information
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