The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure.
At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.
Reliable and budget-priced vacuum switch
High life time
Easy to integrate
IP 44 protection
Control of load lock chambers
Safety shutdown of vacuum systems
6 ±2 (below atmosphere)
3 ±2 (below atmosphere)
Operating pressure (absolute)
Materials exposed to vacuum
stainless steel 1.4305, EPDM, PTFE (Teflon)
Technical Note: Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100A is not suited for applications in which the process gascontains large quantities of helium. The leak rate of the diaphragm for helium is -6 mbar l/s.