Vacuum Switch
VSA100A
Setpoint 3 mbar below ambient
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure.
At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.
Advantages
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical applications
- Control of load lock chambers
- Safety shutdown of vacuum systems
Specifications
| Switching pressure | mbar | 6 ±2 (below atmosphere) |
| Back switching | mbar | 3 ±2 (below atmosphere) |
| Operating pressure (absolute) | bar | <2 |
| Protective type | IP 44 | |
| Materials exposed to vacuum | stainless steel 1.4305, EPDM, PTFE (Teflon) | |
| Technical Note: Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100A is not suited for applications in which the process gascontains large quantities of helium. The leak rate of the diaphragm for helium is -6 mbar l/s. | ||
Part Number
| Part Number | Description |
| 399-001 | VSA100A Vacuum Switch DN16KF, 3m Cable |
Downloads
Datasheets
VSA100A differential to ambient DE
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268,6 KB
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German
VSA100A differential to ambient ES
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267,1 KB
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Spanish
VSA100A differential to ambient JA
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376,3 KB
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Japanese
VSA100A differential to ambient KO
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308,9 KB
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Korean
VSA100A differential to ambient ZH
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355,9 KB
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Chinese
VSA100A differential to ambien
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1,2 MB
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English
Dimension Drawings
The product is used in the following markets
