4. VSA100A
Vacuum Switch

VSA100A

Setpoint 3 mbar below ambient 

VSA100

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure. 

At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.

Advantages

  • Reliable and budget-priced vacuum switch
  • High life time
  • Rugged design
  • Easy to integrate
  • IP 44 protection

Typical applications

  • Control of load lock chambers
  • Safety shutdown of vacuum systems

Specifications

Switching pressurembar6 ±2 (below atmosphere)
Back switchingmbar3 ±2 (below atmosphere)
Operating pressure (absolute)bar<2
Protective type IP 44
Materials exposed to vacuum stainless steel 1.4305, EPDM, PTFE (Teflon)
   
Technical Note: Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100A is not suited for applications in which the process gascontains large quantities of helium. The leak rate of the diaphragm for helium is -6 mbar l/s.
Download full specifications

Part Number

Part NumberDescription
399-001VSA100A Vacuum Switch DN16KF, 3m Cable
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