Vacuum Switch
VSA100A
Setpoint 3 mbar below ambient
Drop-in Options
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The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure.
At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.
Advantages
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical applications
- Control of load lock chambers
- Safety shutdown of vacuum systems
Specifications
| Switching pressure | mbar | 6 ±2 (below atmosphere) |
| Back switching | mbar | 3 ±2 (below atmosphere) |
| Operating pressure (absolute) | bar | <2 |
| Protective type | IP 44 | |
| Materials exposed to vacuum | stainless steel 1.4305, EPDM, PTFE (Teflon) | |
| Technical Note: Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100A is not suited for applications in which the process gascontains large quantities of helium. The leak rate of the diaphragm for helium is 5 x 10-5 mbar l/s. | ||
Part Number
| Part Number | Description |
| 399-001 | VSA100A Vacuum Switch DN16KF, 3m Cable |
Downloads
Datasheets
VSA100A Datasheet
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87,4 KB
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English
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Datasheets
VSA100A Datenblatt
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268,6 KB
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German
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Datasheets
VSA100A Ficha técnica
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267,1 KB
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Spanish
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Datasheets
VSA100A データシート
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376,3 KB
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Japanese
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Datasheets
VSA100A 数据表
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355,9 KB
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Chinese
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Datasheets
VSA100A 데이터시트
pdf
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308,9 KB
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Korean
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Datasheets
Dimension Drawings
Manuals
3D Step File
The product is used in the following markets
