Pirani Gauges
PSG55x
ATM To Medium Vacuum Gauge

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Pirani Standard Gauge (PSG55x) employs like his brothers PCG55x and PSG50x the most advanced digital Pirani technology available. The rugged sensor design combined with the compact size and the variety of features qualifies as the right product for measurement from low to the high vacuum range.
Now available with EtherCAT digital interface!
Advantages
- Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic coated (PSG554) sensor unit for highly corrosive applications
- Optional display, setpoints and digital interfaces
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data - guarantees high reproducibility and low cost of ownership
- Selectable output signal and various plug versions for easy integration
- Mounts in any orientation - provides engineering freedom in tool design
- Diagnostic port on all versions
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control from low to the high vacuum range
Specifications
PSG550 Tungsten
PSG552 Nickel
PSG554 ceramic coated
Measuring Principle | thermal conductance accurcy to Pirani | |
Measurement range | Torr mbar | 5×10-5 … 1000 3.8×10-5 … 750 |
Accuracy (N2) | ||
5×10-4 … 1×10-3 mbar | % of reading | ±50 |
1×10-3 … 100 mbar | % of reading | ±15 |
100 … 1000 mbar | % of reading | ±50 |
Repeatability (N2) | ||
1×10-3 … 100 mbar | % of reading | ±2 |
Mounting orientation | any |
Measuring Principle | thermal conductance accurcy to Pirani | |
Measurement range | Torr mbar | 3.8×10-5 … 750 5×10-5 … 1000 |
Accuracy (N2) | ||
5×10-4 … 1×10-3 mbar | % of reading | ±50 |
1×10-3 … 100 mbar | % of reading | ±15 |
100 … 1000 mbar | % of reading | ±50 |
Repeatability (N2) | ||
1×10-3 … 100 mbar | % of reading | ±2 |
Mounting orientation | any |
Measuring Principle | thermal conductance accurcy to Pirani | |
Measurement range | Torr mbar | 5×10-5 … 1000 3.8×10-5 … 750 |
Accuracy (N2) | ||
5×10-4 … 1×10-3 mbar | % of reading | ±50 |
1×10-3 … 100 mbar | % of reading | ±15 |
100 … 1000 mbar | % of reading | ±50 |
Repeatability (N2) | ||
1×10-3 … 100 mbar | % of reading | ±2 |
Mounting orientation | any |
Accessories
Spare Parts
PSG550 Tungsten | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG552 Nickel | |
211-001 | Clamping ring DN 10-16 ISO-KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG554 ceramic coated | |
211-001 | Clamping ring DN 10-16 ISO-KF |
211-097 | Centering ring with fine filter DN 16 KF |
350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
PSG552 Nickel | |
211-097 | Centering ring with fine filter DN 16 KF |
PSG550 Tungsten | |
# | |
211-097 | Centering ring with fine filter DN 16 KF |
PSG552 Nickel | |
303-333 | Diagnostic cable 1.9m (P3) |
PSG554 ceramic coated | |
303-333 | Diagnostic cable 1.9m (P3) |
PSG550 Tungsten | |
303-333 | Diagnostic cable 1.9m (P3) |
PSG550 Tungsten | |
355-925 | PSG550 Spare sensor, DN 16 ISO-KF |
355-926 | PSG550 Spare sensor, DN16 ISO-KF, long |
355-927 | PSG550 Spare sensor, DN 16 CF-F |
355-928 | PSG550 Spare sensor, DN 16 CF-R, long |
355-929 | PSG550 Spare sensor, DN 25 ISO-KF |
355-930 | PSG550 Spare sensor, 1/8" NPT |
355-931 | PSG550 Spare sensor, 8-VCR |
355-932 | PSG550 Spare sensor, 4-VCR |
355-933 | PSG550 Spare sensor, 7/16-20 UNF |
355-934 | PSG550 Spare sensor, 29x29mm |
355-935 | PSG550 Spare sensor, 4-VCR / 90° |
PSG552 Nickel | |
355-936 | PSG552 Spare sensor, DN 16 ISO-KF |
355-937 | PSG552 Spare sensor, DN16 ISO-KF, long |
355-938 | PSG552 Spare sensor, DN 16 CF-F |
355-939 | PSG552 Spare sensor, DN 16 CF-R, long |
355-940 | PSG552 Spare sensor, DN 25 ISO-KF |
355-941 | PSG552 Spare sensor, 1/8" NPT |
355-942 | PSG552 Spare sensor, 8-VCR |
355-943 | PSG552 Spare sensor, 4-VCR |
355-944 | PSG552 Spare sensor, 7/16-20 UNF |
355-945 | PSG552 Spare sensor, 29 x 29mm |
355-946 | PSG552 Spare sensor, 4-VCR / 90° |
PSG554 ceramic coated | |
355-947 | PSG554 Spare sensor, DN 16 ISO-KF |
355-948 | PSG554 Spare sensor, DN 16 ISO-KF, long |
355-949 | PSG554 Spare sensor, DN 16 CF-F |
355-950 | PSG554 Spare sensor, DN 16 CF-R, long |
355-951 | PSG554 Spare sensor, DN 25 ISO-KF |
355-952 | PSG554 Spare sensor, 1/8" NPT |
355-953 | PSG554 Spare sensor, 8-VCR |
355-954 | PSG554 Spare sensor, 4-VCR |
355-955 | PSG554 Spare sensor, 7/16-20 UNF |
355-956 | PSG554 Spare sensor, 29x29mm |
355-957 | PSG554 Spare sensor, 4-VCR / 90° |
Part number


Downloads
Datasheets
Brochures
Manuals
TINA60D1_Gebrauchsanleitung
pdf
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968,5 KB
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German
TINA60D1_PSG55x Gebrauchsanleitung
pdf
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734,8 KB
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English
TINA60E1_Operating manual
pdf
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927,1 KB
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English
TINA60E1_PSG55x Operating Manual
pdf
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715,7 KB
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English
TIRA56E1_PxG55x Communication Protocol Profibus
pdf
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738,1 KB
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English
TIRA58E1_PxG55x Communication protocol DeviceNet
pdf
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474,3 KB
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English
TIRA59E1 PxG55x Communication Protocol RS232c_RS485c
pdf
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177,9 KB
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English
TIRA85E1_PxG55x Communication protocol EtherCAT
pdf
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493,0 KB
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English
TIRB72E1_PxG55x_Communication Protocol Profinet
pdf
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1,6 MB
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English
3D Files
MPSG55x_Plug_RS485_UNF.stp
stp
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1,9 MB
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German, Japanese, Korean, Spanish, Chinese, English
PxG550_9DSub_16K_long.zip
zip
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297,4 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_16CF
zip
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280,5 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_16KF
zip
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274,8 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_4VCR
zip
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283,7 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_DNet_16CF
zip
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313,7 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_DNet_16KF
zip
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308,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_DNet_4VCR
zip
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314,6 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_PBus_16CF
zip
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330,5 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_PBus_16KF
zip
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324,9 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_15DSub_PBus_4VCR
zip
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331,4 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_16CF
zip
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256,7 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_16KF
zip
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251,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_25KF
zip
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251,5 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_29x29
zip
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214,5 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_4VCR
zip
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257,5 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_4VCR_90
zip
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214,3 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_8VCR
zip
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255,8 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_DNet_16CF
zip
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287,8 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_DNet_16KF
zip
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282,3 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_DNet_25KF
zip
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298,5 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_DNet_4VCR
zip
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286,6 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_EtherCAT_16CF
zip
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349,0 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_EtherCAT_16KF
zip
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344,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_EtherCAT_4VCR
zip
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350,3 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_PBus_16CF
zip
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305,0 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_PBus_16KF
zip
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299,4 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_PBus_25KF
zip
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299,6 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_9DSub_PBus_4VCR
zip
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305,8 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_16CF
zip
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204,3 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_16KF
zip
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252,7 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_25KF
zip
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198,9 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_29x29
zip
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172,0 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_4VCR
zip
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205,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_4VCR_90
zip
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175,9 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_DNet_16CF
zip
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236,8 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_DNet_16KF
zip
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231,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_DNet_4VCR
zip
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237,7 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_PBus_16CF
zip
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253,8 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_PBus_16KF
zip
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248,2 KB
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German, Japanese, Korean, Spanish, Chinese, English
PxG55x_FCC_PBus_4VCR
zip
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254,7 KB
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German, Japanese, Korean, Spanish, Chinese, English
Others
EtherCAT new generation ESI file PSG V1_3_0_0.xml
xml
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140,1 KB
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English
GSDML-V2.35-INFICON_AG-PressureGauge
xml
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18,4 KB
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English
Inficon PSG V1_2_1_0.xml
xml
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556,6 KB
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English
PSG550-PC21 Int.eds
eds
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50,5 KB
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English
PSG550-PC21 Real.eds
eds
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50,6 KB
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English
PxG_0C85.GSD
GSD
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5,0 KB
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English