Vacuum Gauge Controller

IM540

Versatile hot cathode ionization passive gauge controller

IM540

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Unit
mbar
Flange
DN 16 ISO-KF
Display switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The Vacuum Gauge Controller IM540 is a versatile ionization gauge controller offering complete vacuum measurement and control in the range between 10-12 mbar and atmospheric pressure.  Depending on the application and user’s needs, IM540 is your one-solution as it may combine up to 4 different principles of vacuum measurement - Pirani, capacitive diaphragm, Bayard-Alpert and Extractor. This controller allows for a reliable and complete integration in complex process control systems. 

Advantages

  • Supports the operation of the IE414 (Bayard-Alpert) and the IE514 (extractor) hot cathode ionization gauges
  • Two active gauges from the PSG5xx (Pirani), PCG55x (Pirani-Capacitance diaphragm) and CDG (Capacitance diaphragm) active gauge lines can be connected and operated
  • Simple operation with menu guided display for parameter, sensor or general settings
  • Built-in RS232 communication interface, optional Profibus DP communication card (IF 540 P)
  • Two set points (optional 7) with adjustable hysteresis
  • High resolution – 16 bit A/D converter
  • 2 programmable 0 to 10 V chart recorder outputs

Gauges Overview

IE414
IE514
PSG5xx
PCG55x
CDG (e.g. CDG025D, CDG045D)
Gauge typeBayard-Alpert, hot cathode ionization
Pressure measurement range10-11 mbar to 10-2 mbar (modular emission current)
Bake-out temperature range≤400 °C
Gauge typeExtractor, hot cathode ionization
Pressure measurement range10-12 mbar to 10-4 mbar
Bake-out temperature range≤400 °C
Gauge typePirani (active gauge type)
Pressure measurement range8x10-4 mbar to ATM
Bake-out temperature range≤80 / 250 °C (model dependent)
Gauge typePirani-Capacitance diaphragm (active gauge type)
Pressure measurement range5×10-5 mbar to 1.5×103 mbar
Bake-out temperature range≤80 / 250 °C (model dependent)
Gauge typeCapacitance diaphragm (active gauge type)
Pressure measurement range4 user-selectable pressure decades
Bake-out temperature rangemodel-dependent

Customizable measurement configurations

Channel 1 + 2
Channel 3 + 4
Gauge typeHot cathode ionization gauge
Gauge modelIE414 (Bayard-Alpert)
IE514 (Extractor)
Gauge type

Active gauge:
Pirani
Pirani-Capacitance diaphragmC

apacitance diaphragm

Gauge modelPSG5xx (Pirani)
PCG55x (Pirani-Capacitance diaphragm)
CDG (e.g. CDG025D, CDG045D) (Capacitance diaphragm)

Communication Card

IF 540 P
IF 540 P
Communication protocolProfibus interface and relays (1.5 A)