Vacuum Gauge Controller
IM540
Versatile hot cathode ionization passive gauge controller
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The Vacuum Gauge Controller IM540 is a versatile ionization gauge controller offering complete vacuum measurement and control in the range between 10-12 mbar and atmospheric pressure. Depending on the application and user’s needs, IM540 is your one-solution as it may combine up to 4 different principles of vacuum measurement - Pirani, capacitive diaphragm, Bayard-Alpert and Extractor. This controller allows for a reliable and complete integration in complex process control systems.
Advantages
- Supports the operation of the IE414 (Bayard-Alpert) and the IE514 (extractor) hot cathode ionization gauges
- Two active gauges from the PSG5xx (Pirani), PCG55x (Pirani-Capacitance diaphragm) and CDG (Capacitance diaphragm) active gauge lines can be connected and operated
- Simple operation with menu guided display for parameter, sensor or general settings
- Built-in RS232 communication interface, optional Profibus DP communication card (IF 540 P)
- Two set points (optional 7) with adjustable hysteresis
- High resolution – 16 bit A/D converter
- 2 programmable 0 to 10 V chart recorder outputs
Gauges Overview
IE414
IE514
PSG5xx
PCG55x
CDG (e.g. CDG025D, CDG045D)
| Gauge type | Bayard-Alpert, hot cathode ionization |
| Pressure measurement range | 10-11 mbar to 10-2 mbar (modular emission current) |
| Bake-out temperature range | ≤400 °C |
| Gauge type | Extractor, hot cathode ionization |
| Pressure measurement range | 10-12 mbar to 10-4 mbar |
| Bake-out temperature range | ≤400 °C |
| Gauge type | Pirani (active gauge type) |
| Pressure measurement range | 8x10-4 mbar to ATM |
| Bake-out temperature range | ≤80 / 250 °C (model dependent) |
| Gauge type | Pirani-Capacitance diaphragm (active gauge type) |
| Pressure measurement range | 5×10-5 mbar to 1.5×103 mbar |
| Bake-out temperature range | ≤80 / 250 °C (model dependent) |
| Gauge type | Capacitance diaphragm (active gauge type) |
| Pressure measurement range | 4 user-selectable pressure decades |
| Bake-out temperature range | model-dependent |
Customizable measurement configurations
Channel 1 + 2
Channel 3 + 4
| Gauge type | Hot cathode ionization gauge |
| Gauge model | IE414 (Bayard-Alpert) IE514 (Extractor) |
| Gauge type | Active gauge: apacitance diaphragm |
| Gauge model | PSG5xx (Pirani) PCG55x (Pirani-Capacitance diaphragm) CDG (e.g. CDG025D, CDG045D) (Capacitance diaphragm) |
Communication Card
IF 540 P
IF 540 P
| Communication protocol | Profibus interface and relays (1.5 A) |
The product is used in the following markets
